• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.21 no.11
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• pp.968-972
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• 2008

Ni/Ti/Al multilayer system ('/'denotes the deposition sequence) was tested for low-resistance ohmic contact formation to Al-implanted p-type 4H-SiC. Ni 30 nm / Ti 50 nm / Al 300 nm layers were sequentially deposited by e-beam evaporation on the 4H-SiC samples which were implanted with Al (norminal doping concentration = $4\times10^{19}cm^{-3}$) and then annealed at $1700^{\circ}C$ for dopant activation. Rapid thermal anneal (RTA) temperature for ohmic contact formation was varied in the range of $840\sim930^{\circ}C$. Specific contact resistances were extracted from the measured current vs. voltage (I-V) data of linear- and circular transfer length method (TLM) patterns. In constrast to Ni contact, Ni/Ti/Al contact shows perfectly linear I-V characteristics, and possesses much lower contact resistance of about $2\sim3\times10^{-4}\Omega{\cdot}cm^2$ even after low-temperature RTA at $840^{\circ}C$, which is about 2 orders of magnitude smaller than that of Ni contact. Therefore, it was shown that RTA temperature for ohmic contact formation can be lowered to at least $840^{\circ}C$ without significant compromise of contact resistance. X-ray diffraction (XRD) analysis indicated the existence of intermetallic compounds of Ni and Al as well as $NiSi_{1-x}$, but characteristic peaks of $Ti_{3}SiC_2$, a probable narrow-gap interfacial alloy responsible for low-resistance Ti/Al ohmic contact formation, were not detected. Therefore, Al in-diffusion into SiC surface region is considered to be the dominant mechanism of improvement in conduction behavior of Ni/Ti/Al contact.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.362-365
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• 2005

Currently Chemical Mechanical Planarization (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. Especially the CMP pad conditioner, one of the diamond tools, is required to have strong diamond retention. Strong cohesion between diamond grits and metal matrix prevents macro scratch on the wafer. If diamond retention is weak, the diamond will be pulled out of metal matrix. The pulled diamond grits are causative of macro scratch on wafer during CMP process. Firstly, some results will be reported of cohesion between diamond grits and metal matrix on the diamond tools prepared by three different manufacturing methods. A measuring instrument with sharp cemented carbide connected with a push-pull gauge was manufactured to measure the cohesion between diamond grits and metal matrix. The retention force of brazed diamond tool was stronger than the others. The retention force was also increased in proportion to the contact area of diamond grits and metal matrix. The brazed diamond tool has a strong chemical combination of the interlayer composed of chrome in metal matrix and carbon which enhance the interfacial cohesion strength between diamond grits and metal matrix. Secondly, we measured real-time data of the coefficient of friction and the pad wear rate by using CMP tester (CETR, CP-4). CMP pad conditioner samples were manufactured by brazed, electro-plated and sintered methods. The coefficient of friction and the pad wear rate were shown differently according to the arranged diamond patterns. Consequently, the coefficient of friction is increased according as the space between diamonds is increased or the concentration of diamonds is decreased. The pad wear rate is increased according as the degree of diamond protrusion is increased.

• Economic and Environmental Geology
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• v.54 no.1
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• pp.105-115
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• 2021

The geological CO2 sequestration in underground geological formation such as deep saline aquifers and depleted hydrocarbon reservoirs is one of the most promising options for reducing the atmospheric CO2 emissions. The process in geological CO2 sequestration involves injection of supercritical CO2 (scCO2) into porous media saturated with pore water and initiates CO2 flooding with immiscible displacement. The CO2 migration and distribution, and, consequently, the displacement efficiency is governed by the interaction of fluids. Especially, the viscous force and capillary force are controlled by geological formation conditions and injection conditions. This study aimed to estimate the effects of surfactant on interfacial tension between the immiscible fluids, scCO2 and porewater, under high pressure and high temperature conditions by using a pair of proxy fluids under standard conditions through pendant drop method. It also aimed to observe migration and distribution patterns of the immiscible fluids and estimate the effects of surfactant concentrations on the displacement efficiency of scCO2. Micromodel experiments were conducted by applying n-hexane and deionized water as proxy fluids for scCO2 and porewater. In order to quantitatively analyze the immiscible displacement phenomena by n-hexane injection in pore network, the images of migration and distribution pattern of the two fluids are acquired through a imaging system. The experimental results revealed that the addition of surfactants sharply reduces the interfacial tension between hexane and deionized water at low concentrations and approaches a constant value as the concentration increases. Also it was found that, by directly affecting the flow path of the flooding fluid at the pore scale in the porous medium, the surfactant showed the identical effect on the displacement efficiency of n-hexane at equilibrium state. The experimental observation results could provide important fundamental information on immiscible displacement of fluids in porous media and suggest the potential to improve the displacement efficiency of scCO2 by using surfactants.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.777-782
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• 2011

Micro features on the surface are well-known to have significant effects on optical or mechanical properties such as the optical interference, reflectance at the surface, contact angle, interfacial friction, etc. These surface micro features are increasingly employed to enhance the functionality of the applications in various application areas such as optical components for LCD or solar panel. Diverse surface features have been proposed and some of them are showing excellent efficiency or functionality, especially in optical applications. Most applications employing the micro features need manufacturing process for mass production and the injection molding and roll-to-roll forming, which are typical processes for mass production adopting polymeric materials, may be also preferred for micro patterned plastic product. Since the functionality or efficiency of the surface structures generally depends on the shape and the size of the structure itself or the array of the structures on the surface, it would be very important to replicate the features very precisely as being designed during the molding the micro pattern applications. In this paper, a series of research activities is introduced for roll-to-roll forming of micro patterned film including filling of patterns with UV curable resin, demolding of surface structures from the roll tool, control of surface energy and cure shrinkage of resin and dispose time and intensity of the UV light for curing of UV curable resin.

• Composites Research
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• v.29 no.6
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• pp.408-413
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• 2016

Commonly-used polymers are manufactured as versatile forms. Furthermore, continuous polymer fibers are recently manufactured using nylon or aramid fiber. One of common epoxy was also used to make polymer fibers. Bisphenol-A type was used as base epoxy whereas amine and anhydride were used as hardeners. Epoxy fibers was cured by stepping up the temperature to maintain the shape of epoxy fiber. Surface energy was measured to confirm the degree of interfacial adhesion by modified static contact angle method. After mechanical properties were measured via fiber tensile test, the evaluation of fiber fracture was proceeded. Tensile strength of epoxy fiber using amine type hardener was higher as 138 MPa than anhydride case as 70 MPa. Fractured surface exhibited different failure patterns at the cross-section.

• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.245-253
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• 2009

For the growth optimization of InAs/GaSb (8/8-ML) strained-layer superlattice (SLS), the structure has been grown under various conditions and modes and characterized by the high-resolution x-ray diffraction (XRD) analysis. In this study, the strain modulation is induced by changing parameters and modes, such as the growth temperature, the ratio of V/III beam-equivalent-pressure (BEP), and the growth interruption (GI), and the strain variation is analyzed by measuring the angle separation of 0th-order satellite peak in XRD patterns. The XRD results reveal that the growth temperature and the V/III(Sb/Ga) ratio are major parameters to change the crystallineity and the strain modulation in SLS structures, respectively. We have observed that the SLS samples with compressive strain prepared in this study are show a transition to tensile strain with decreasing V/III(Sb/Ga) ratio, and the GI process is a sensitive factor giving rise to strain modulation. These results obtained in this study suggest that optimized growth temperature and V/III(Sb/Ga) ratio are $350^{\circ}C$ and 20, respectively, and the appropriate GI time is approximately 3 seconds just before InAs growth that the crystallineity is maximized and the strain relaxation is minimized.