• Tribology and Lubricants
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• 제34권6호
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• pp.226-234
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• 2018

Copper chemical mechanical planarization (CMP) has become a key process in integrated circuit (IC) technology. The results of copper CMP depend not only on the mechanical abrasion, but also on the slurry chemistry. The slurry used for Cu CMP is known to have greater chemical reactivity than mechanical material removal. The Cu CMP slurry is composed of abrasive particles, an oxidizing agent, a complexing agent, and a corrosion inhibitor. Citric acid can be used as the complexing agent in Cu CMP slurries, and is widely used for post-CMP cleaning. Although many studies have investigated the effect of citric acid on Cu CMP, no studies have yet been conducted on the interfacial friction characteristics and step height reduction in CMP patterns. In this study, the effect of citric acid on the friction characteristics and step height reduction in a copper wafer with varying pattern densities during CMP are investigated. The prepared slurry consists of citric acid ($C_6H_8O_7$), hydrogen peroxide ($H_2O_2$), and colloidal silica. The friction force is found to depend on the concentration of citric acid in the copper CMP slurry. The step heights of the patterns decrease rapidly with decreasing citric acid concentration in the copper CMP slurry. The step height of the copper pattern decreases more slowly in high-density regions than in low-density regions.

• 한국세라믹학회지
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• 제29권7호
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• pp.551-557
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• 1992

X-ray diffraction patterns, IR spectra and zeta-potentials of silicon nitride and $\beta$-Sialon powders were investigated before and after surface manipulations. $\beta$-Sialon powder was produced from Hadong Kaolin by the carbothermic reduction and simulataneous nitridation. Isoelectric points of as-prepared Si3N4 and $\beta$-Sialon powders were 8.4 and 7.4, respectively. After both silicon nitride and $\beta$-Sialon powders were oxidized at 80$0^{\circ}C$ for 24 h in air, the isoelectric points of these powders corresponded to that of silica (pH=3). I case of the addition of Darvan C as deflocculant, its isoelectric point was 3 and zeta-potential was nearly constant in the range of pH 5~12. When SN 7347 was used as deflocculant, its isoelectric point was 8.3 and zeta-potential over -156 mV was measured above pH 11.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2000년도 봄 학술발표회 논문집
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• pp.289-296
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• 2000

This paper summarizes the results of a study which has quantified the evolution of the structure of sands adjacent to geomembranes of varying roughness at different stages of shearing. The results show that the structure evolution, and hence shear mechanisms for rounded uniform sands adjacent to geomembranes, are directly influenced by the surface roughness of the geomembranes. For smooth geomembranes, the shear mechanism predominantly involves sliding of sand particles and only affects the sand structure within two particle diameters of the geomembrane. For slightly textured geomembranes, the effects of interlocking and dilation of sand particles extends the zone of evolution to four particles diameters from the interface. For moderately/heavily textured geomembranes, the interlocking and dilation of sand particles is fully developed and results in large dilation in the interfacial zone, which extends up to six particle diameters from the interface. By understanding how the structure of the sand adjacent to geomembranes of different roughness changes during shearing, it may be possible to identify alternative geomembrane roughening procedures and patterns that can lead to more efficient interface designs.

• Korean Chemical Engineering Research
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• 제52권1호
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• pp.75-80
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• 2014

The convective flow structures in the vapor phase on earth are shown to be single unicellular, indicating the solutally dominant convection is important. These findings reflect that the total molar fluxes show asymmetrical patterns in a viewpoint of interfacial distributions. With decreasing the gravitational level form $1g_0$ down to $1.0{\times}10^{-4}g_0$, the total molar fluxes decay first order exponentially. It is also found that the total molar fluxes decay first order exponentially with increasing the partial pressure of component B, PB (Torr) form 5 Torr up to 400 Torr. Under microgravity environments less than $1g_0$, a diffusive-convection mode is dominant and, results in much uniformity in front of the crystal regions in comparisons with a normal gravity acceleration of $1g_0$.

• Journal of Electrical Engineering and Technology
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• 제7권1호
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• pp.91-96
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• 2012

We introduce an understanding of silver (Ag) inkjet overlap-printing characteristics from the viewpoints of cohesion between ink droplets and adhesion between an ink droplet and a surface. The printing characteristics were closely monitored by changing the surface energy to elucidate the effect of adhesion and cohesion on printing instability, such as droplet merging and line bulging. The surface energy of the substrate was changed through the hydrophilization of a hydrophobic fluorocarbon-coated surface. The surface energy and ink wettability of the prepared surfaces were characterized using sessile drop contact angle analysis, and printing instability was observed using an optical microscope after drop-on-demand inkjet printing with a 50% overlap in diameter of deposited singlet patterns. We found that the surface energy is not an appropriate indicator based on the experimental results of Ag ink printing on a hydrofluoric-treated silicon surface. The analytical approach using adhesion and cohesion was helpful in understanding the instability of the inkjet overlap-printing, as adhesion and cohesion represent the direct interfacial relationship between the Ag inks used and the substrate.

• 한국세라믹학회지
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• 제27권5호
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• pp.677-683
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• 1990

Melt-textured growth of the YBa2Cu3O7-x phase from a supercooled melt created locally aligned, barshaped grains of the orthorhombic 1-2-3 phase. Based on all the observed phenomena, the gross mechanism of the melt-textrued growth of YBa2Cu3O7-x on the (100) plane of MgO was delineated by three basic patterns of reactions. These are : (ⅰ) formation of the aligned 1-2-3 phase and the Y-rich 2-1-1 phase at the bulk region away from the (100) plane of MgO ; (ⅱ) formation of the Cu-richprecipitates at the interfacial region by the selective interface-induced precipitation of the liquid phase ; (ⅲ) condensation reaction of the entrapped Cu-rich vapor with Mg atoms during the initial stage of rapid cooling from 130$0^{\circ}C$ to 98$0^{\circ}C$.

• Macromolecular Research
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• 제17권3호
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• pp.163-167
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• 2009

This study presents a microfluidic method for the production of monodisperse poly(ethylene glycol) (PEG) microspheres using continuous droplet formation and in situ photopolymerization in microfluidic devices. We investigated the flow patterns for the stable formation of droplets using capillary number and the flow rate of the hexade-cane phase. Under the stable region, the resulting microspheres showed narrow size distribution having a coefficient of variation (CV) of below 1.8%. The size of microspheres ($45{\sim}95{\mu}m$) could be easily controlled by changing the interfacial tension between the two immiscible phases and the flow rates of the dispersed or continuous phase.

• 대한기계학회논문집
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• 제17권2호
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• pp.237-247
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• 1993

본 연구에서는 CFRP 적층재를 구조재료로 사용할 경우 우수한 인장강도를 갖 지만, 충격하중에 취약한 특성을 갖기 때문에 구조안정성에 관한 큰 문제의 하나로 충 격손상을 받은 적층판의 잔류 압축강도가 현저히 저하되는 것이 문제점으로 지적되어 왔다.특히, 충격손상에 의한 압축강도의 저하는 인장강도보다 압축강도에 중점을 두는 항공기의 강도설계에서 중요한 문제가 되므로, 저속충격에 의한 복합재료 구조체 의 충격파괴의 문제를 잘 이해하는 것이 요구된다. 지금까지의 연구에 의하면 CFRP 복합적층재의 손상은 주로 층간박리현상과 손상역의 크기변화를 실험적으로 고찰하였 다.

• Restorative Dentistry and Endodontics
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• 제28권3호
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• pp.222-231
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• 2003

The purpose of this study was to compare shear bond strength and interfacial pattern of composite bond-ed to dentin using self-etching adhesive systems. Sixty extracted human molars with exposed occlusal dentin were divided into four groups and bonded with four adhesives and composites. Single Bond/Filtek Z 350(SB), Tyrian SPE-One-Step Plus/Aelitefil(TY), Prompt L-Pop/Filtek Z 250(LP), and One-Up Bond F/palfique Toughwell(OU). The results of this study were as follows; 1 Shear bond strength for OU was significantly lower than that of other groups(p＜0.05). No significant difference was founded among SB, TY, and LP. 2. Failure modes to dentin showed adhesive and mixed for SB TY and LP, but them for OU showed adhesive in all spceimens. 3. Dentin-resin interface showed close adaptation for SB, TY, and LP, but it showed gap for OU. 4. The hybrid layers for TY, LP OU were thinner than that of SB. Adhesive layers were observed between composite and hybrid layer, which were 5 $\mu\textrm{m}$ thick for TY and 10 $\mu\textrm{m}$ thick for OU.

• Structural Engineering and Mechanics
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• 제78권2호
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• pp.163-174
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• 2021

Track-bridge interaction has become an essential part in the design of bridges and rails in terms of modern railways. As a unique ballastless slab track, the longitudinal continuous slab track (LCST) or referred to as the China railway track system Type-II (CRTS II) slab track, demonstrates a complex force mechanism. Therefore, a comprehensive track-bridge interaction study between multi-span simply supported beam bridges and the LCST is presented in this work. In specific, we have developed an integrated finite element model to investigate the overall interaction effects of the LCST-bridge system subjected to the actions of temperature changes, traffic loads, and braking forces. In that place, the deformation patterns of the track and bridge, and the distributions of longitudinal forces and the interfacial shear stress are studied. Our results show that the additional rail stress has been reduced under various loads and the rail's deformation has become much smoother after the transition of the two continuous structural layers of the LCST. However, the influence of the temperature difference of bridges is significant and cannot be ignored as this action can bend the bridge like the traffic load. The uniform temperature change causes the tensile stress of the concrete track structure and further induce cracks in them. Additionally, the influences of the friction coefficient of the sliding layer and the interfacial bond characteristics on the LCST's performance are discussed. The systematic study presented in this work may have some potential impacts on the understanding of the overall mechanical behavior of the LCST-bridge system.