• 제목/요약/키워드: Inter digit transducer (IDT)

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Electroactive Paper (EAPap)를 이용한 표면탄성파 센서 (Surface Acoustic Wave Sensor using Electroactive Paper (EAPap))

  • 이민희;김주형;김재환
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2008년도 추계학술대회논문집
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    • pp.368-371
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    • 2008
  • Cellulose based Electroactive Paper (EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used fur a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer (IDT) structure using lift-off technique with a finger gap of $10{\mu}m$ was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.

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Electroactive Paper(EAPap)를 이용한 표면탄성파 센서 (Surface Acoustic Wave Sensor Using Electroactive Paper(EAPap))

  • 이민희;김주형;김재환
    • 한국소음진동공학회논문집
    • /
    • 제18권11호
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    • pp.1128-1133
    • /
    • 2008
  • Cellulose based electroactive paper(EAPap) has been developed as a new smart material due to its advantages of piezoelectricity, large displacement, low power consumption, low cost and flexibility. EAPap can be used for a surface acoustic wave (SAW) device using the piezoelectric property of EAPap, resulting in the cost effective and flexible SAW device. In this paper, inter digit transducer(IDT) structure using lift-off technique with a finger gap of 10mm was used for micro fabrication of the cellulose EAPap SAW devices. The performance of IDT patterned SAW device was characterized by a Network Analyzer. The feasibility of cellulose EAPap as a potential acoustic device was presented and explained.