• Title/Summary/Keyword: Inorganic precursor

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Study on the Atomic Layer Deposition System and Process of the MgO Thin Layer for the Thin Film Encapsulation of OLED (OLED의 Thin Film Encapsulation을 위한 MgO 박막의 원자층 증착 장치 및 공정에 관한 연구)

  • Cho, Eou Sik;Kwon, Sang Jik
    • Journal of the Semiconductor & Display Technology
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    • v.20 no.3
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    • pp.22-26
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    • 2021
  • Thin-film encapsulation (TFE) technology is most effective in preventing water vapor and oxygen permeation in the organic light emitting diodes (OLED). Of those, a laminated structure of Al2O3 and MgO were applied to provide efficient barrier performance for increasing the stability of devices in air. Atomic layer deposition (ALD) method is known as the most promising technology for making the laminated Al2O3/MgO and is used to realize a thin film encapsulation technology in organic light-emitting diodes. Atomic layer deposited inorganic films have superior barrier performance and have advantages of excellent uniformity over large scales at relatively low deposition temperatures. In this study, the control system of the MgCP2 precursor for the atomic layer deposition of MgO was established in order to deposit the MgO layer stably by the injection time of second level and the stable heating temperature. The deposition rate was obtained stably to be from 4 to 10 Å/cycle using the injection pulse times ranging from 3 to 12 sec and a substrate temperature ranging from 80 to 150 ℃.

MOD-processed YBCO coated conductors on the $CeO_2$-buffered IBAD-MgO template

  • Shin, G.M.;Ko, R.K.;Oh, S.S.;Moon, S.H.;Yoo, S.I.
    • Progress in Superconductivity and Cryogenics
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    • v.11 no.4
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    • pp.20-24
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    • 2009
  • YBCO coated conductors (CC) on the $CeO_2$-buffered IBAD-MgO template were fabricated by metal-organic deposition (MOD) Process with Ba-trifluoroacetate and fluorine-free Y and Cu precursor materials. The precursor solution was coated on $CeO_2$-buffered IBAD MgO templates using the multiple dip-coating method, decomposed into inorganic precursors by pyrolysis up to $400^{\circ}C$ within 3 h, and finally fired at $740{\sim}800^{\circ}C$ in a reduced oxygen atmosphere. Microstructure, texture, and superconducting properties of YBCO films were found highly sensitive to both the firing temperature and time. The high critical current density ($J_C$) of $1.15\;MA/cm^2$ at 77.3K in the self-field could be obtained from $1\;{\mu}m$ thick YBCO CC, fired at $740^{\circ}C$ for 3.5 h, implying that high performance YBCO CC is producible on IBAD MgO template. Further enhancement of $J_C$ values is expected by improving the in-plane texture of $CeO_2$-buffer layer and avoiding the metal substrate contamination.

Characteristics of Organic Thin Film Transistors with Organic and Organic-inorganic Hybrid Polymer Gate Dielectric (유기물과 유무기 혼합 폴리머 게이트 절연체를 사용한 유기 박막 트랜지스터의 특성)

  • Bae, In-Seob;Lim, Ha-Young;Cho, Su-Heon;Moon, Song-Hee;Choi, Won-Seok
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.12
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    • pp.1009-1013
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    • 2009
  • In this study, we have been synthesized the dielectric layer using pure organic and organic-inorganic hybrid precursor on flexible substrate for improving of the organic thin film transistors (OTFTs) and, design and fabrication of organic thin-film transistors (OTFTs) using small-molecule organic semiconductors with pentacene as the active layer with record device performance. In this work OTFT test structures fabricated on polymerized substrates were utilized to provide a convenient substrate, gate contact, and gate insulator for the processing and characterization of organic materials and their transistors. By an adhesion development between gate metal and PI substrate, a PI film was treated using $O_2$ and $N_2$ gas. The best peel strength of PI film is 109.07 gf/mm. Also, we have studied the electric characteristics of pentacene field-effect transistors with the polymer gate-dielectrics such as cyclohexane and hybrid (cyclohexane+TEOS). The transistors with cyclohexane gate-dielectric has higher field-effect mobility, $\mu_{FET}=0.84\;cm^2/v_s$, and smaller threshold voltage, $V_T=-6.8\;V$, compared with the transistor with hybrid gate-dielectric.

Surface Chemical Reactions for Metal Organic Semiconductor Films by Alternative Atomic Layer Deposition and Thermal Evaporation

  • Kim, Seong Jun;Min, Pok Ki;Lim, Jong Sun;Kong, Ki-Jeong;An, Ki-Seok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.166.2-166.2
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    • 2014
  • In this work, we demonstrated a facile and effective method for deposition of metal tetraphenylporphyrin (MTPP) thin film by a combined a thermal evaporation (TE) and atomic layer deposition (ALD). For the deposition of Zn-TPP thin film, Tetraphenylporphyrin (TPP) and diethyl zinc (DEZ) were used as organic and inorganic materials, respectively. Optimum conditions for the deposition of Zn-TPP thin film were established systematically: (1) the exposure time of DEZ as inorganic precursor and (2) the substrate temperature were adjusted, respectively. As a result, we verified that the surface reaction between organic semiconductor (TPP) and metal atom (Zn) was ALD process. In addition, we calculated activation energy by using Arrhenius equation for the substrate temperature versus area change rate of pyrrolic nitrogen. The surface and interface reactions between TPP with Zn were investigated by X-ray photoelectron spectroscopy, Raman spectroscopy, UV-vis spectroscopy, and scanning electron microscopy. These results show a facile and well-controllable fabrication technique for the metal-organic thin film for future electronic applications.

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Analysis of Optical Properties with Photopolymers for Holographic Application

  • Kim Nam;Hwang Eun-Seop;Shin Chang-Won
    • Journal of the Optical Society of Korea
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    • v.10 no.1
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    • pp.1-10
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    • 2006
  • Optical transparency and high diffraction efficiency are two essential factors for high performance of the photopolymer. Optical transparency mainly depends on the miscibility between polymer binder and photopolymerized polymer, while diffraction efficiency depends on the refractive index modulation between polymer binder and photopolymerized polymer. For most of organic materials, the large refractive index difference between two polymers accompanies large structural difference that leads to the poor miscibility and thus poor optical quality via light scattering. Therefore, it is difficult to design a high-performance photopolymer satisfying both requirements. In this work, first, we prepared a new phase-stable photopolymer (PMMA) with large refractive index modulation and investigated the optical properties. Our photopolymer is based on modified poly (methyl methacrylate) as a polymer binder, acryl amide as a photopolymerizable monomer, triethanolamine as initiator, and yellow eosin as a photosensitizer at 532 nm. Diffraction efficiency over 85% and optical transmittance over 90% were obtained for the photopolymer. Second, Organic-inorganic nanocomposite films were prepared by dispersing an aromatic methacrylic monomer and a photo- initiator in organic-inorganic hybrid sol-gel matrices. The film properties could be controlled by optimizing the content of an organically modified silica precursor (TSPEG) in the sol-gel matrices. The photopolymer film modified with the organic chain (TSPEG) showed high diffraction efficiency (> 90%) under an optimized condition. High diffraction efficiency could be ascribed to the fast diffusion and efficient polymerization of monomers under interference light to generate refractive index modulation. The TSPEG modified photopolymer film could be successfully used for holographic memory.

Optical Absorption and Fluorescence of NADH Encapsulated Sol-Gel Silicate Gels

  • Hong, Hye-Jeong;Jiin Jung;Jeong, Ae-Young;Kim, Dong-Pyo;Bae, Byeong-Soo
    • The Korean Journal of Ceramics
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    • v.6 no.4
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    • pp.359-363
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    • 2000
  • Reduced nicotinamide adenine dinucleotide (NADH) was encapsulated in transparent porous sol-gel silicate gels using by different organoalkoxysilane precursor. Characteristics optical absorption and fluorescence of NADH in the gels were examined with depending on NADH concentration and compared. Optical absorption in the aminopropyltrimethoxysilane (APTMS) gel is highest and remains constant during aging the gel. Thus, it is found that NADH in the APTMS gel is most stable and activated. On the other hand, methyltriethoxysilane (MTES) gel presents the lowest optical absorption diminishing with aging the gel. Measurable increase of fluorescence with raising the NADH concentration is observed except for the APTMS gel due to its solubility in the buffer during fluorescence measurement.

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Investigation of Initial Formation of Aluminum Nitride Films by Single Precursor Organometallic Chemical Vapor Deposition of$[Me_{2}Al(\mu-NHR)]_{2}\;(R=^{i}Pr,\;^{t}Bu)$

  • Sung Myung Mo;Jung Hyun Dam;Lee June-Key;Kim Sehun;Park Joon T.;Kim Yunsoo
    • Bulletin of the Korean Chemical Society
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    • v.15 no.1
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    • pp.79-83
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    • 1994
  • The organometallic chemical vapor deposition of single precursors, $[Me_2Al({\mu}-NHR)]_2\;(R=^iPr,\;^tBu)$, for alumininum nitride thin films has been investigated to evaluate their poroperties as potential precursors. In chemical vapor deposition processes the gas phase products scattered from a Ni(100) substrate were analyzed by mass spectrometry and the deposited films were characterized by X-ray photoelectron spectroscopy (XPS). The optimum temperatures for the formation of AlN films have been found to be between 700 K and 800 K. Carbon contamination of the films seems to be attributed mainly to the methyl groups bonded to the aluminum atoms. It is apparent that $^tBu$ group is better than $^iPr$ group as a substituent on the nitrogen atom of the single precursors for the AlN thin film formation.

Fabrication of CIGS/CZTS Thin Films Solar Cells by Non-vacuum Process (비진공 방법에 의한 CIGS/CZTS계 박막 태양전지 제조)

  • Yoo, Dayoung;Lee, Dongyun
    • Korean Journal of Materials Research
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    • v.28 no.12
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    • pp.748-757
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    • 2018
  • Inorganic semiconductor compounds, e.g., CIGS and CZTS, are promising materials for thin film solar cells because of their high light absorption coefficient and stability. Research on thin film solar cells using this compound has made remarkable progress in the last two decades. Vacuum-based processes, e.g., co-evaporation and sputtering, are well established to obtain high-efficiency CIGS and/or CZTS thin film solar cells with over 20 % of power conversion. However, because the vacuum-based processes need high cost equipment, they pose technological barriers to producing low-cost and large area photovoltaic cells. Recently, non-vacuum based processes, for example the solution/nanoparticle precursor process, the electrodeposition method, or the polymer-capped precursors process, have been intensively studied to reduce capital expenditure. Lately, over 17 % of energy conversion efficiency has been reported by solution precursors methods in CIGS solar cells. This article reviews the status of non-vacuum techniques that are used to fabricate CIGS and CZTS thin films solar cells.

Advancement of Clay and Clay-based Materials in the Remediation of Aquatic Environments Contaminated with Heavy Metal Toxic Ions and Micro-pollutants

  • Lalhmunsiama, Lalhmunsiama;Malsawmdawngzela, Ralte;Vanlalhmingmawia, Chhakchhuak;Tiwari, Diwakar;Yoon, Yiyong
    • Applied Chemistry for Engineering
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    • v.33 no.5
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    • pp.502-522
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    • 2022
  • Clay minerals are natural materials that show widespread applications in various branches of science, including environmental sciences, in particular the remediation of water contaminated with various water pollutants. Modified clays and minerals have attracted the attention of researchers in the recent past since the modified materials are seemingly more useful and efficient for removing emerging water contaminants. Therefore, modified engineered materials having multi-functionalities have received greater interest from researchers. The advanced clay-based materials are highly effective in the remediation of water contaminated with organic and inorganic contaminants, and these materials show enhanced selectivity towards the specific pollutants. The review inherently discusses various methods employed in the modification of clays and addresses the challenges in synthesizing the advanced engineered materials precursor to natural clay minerals. The changes in physical and chemical properties, as investigated by various characterization techniques before and after the modifications, are broadly explained. Further, the implications of these materials for the decontamination of waterbodies as contaminated with potential water pollutants are extensively discussed. Additionally, the insights involved in the removal of organic and inorganic pollutants are discussed in the review. Furthermore, the future perspectives and specific challenges in the scaling up of the treatment methods in technology development are included in this communication.

The optimum condition of the powder synthesis and sintering for the floatign zone crystal growth of $LiNbO_3$ (Floating zone법에 의한 $LiNbO_3$ 단결정 성장을 위한 최적 원료분말 합성 및 소결 조건)

  • Cho, Hyun;Shim, Kwang-Bo;Auh, Keun-Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.6 no.2
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    • pp.121-128
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    • 1996
  • The optimum conditons were experimentally established for the powder synthesis and sintering of the feed-rods for $LiNbO_3$ crystal growth by a floating zone method. At the lower synthesis temperatures(700, $ 800^{\circ}C$) the minor amounts of $Li_2CO_3$ and $Nb_2O_5$ were present in the synthesized $LiNbO_3$ powder and at the higher temperature the particle size increased which is not favorable for the sintering process for the feed-rods. $LiNbO_3$ powder synthesized at $950^{\circ}C$ for 12 hours was found to be the best because it contains only the$LiNbO_3$ phase with the small particle size and uniform particle size distribution. As the sintering temperature and the soaking time increase, the sintered feed-rods exhibited the higher sintered density and grain growth phenomena. The $LiNbO_3$ feed rods sintering at $1100^{\circ}C$ for 2 hours were found to have the best microstructure for the precursor feed-rods of the floating zone crystal growth because of their higher density, small grain size and uniform particle size distribution. As the sintering temperature and the soaking time increase, the sintered feed-rods exhibited the higher sintered density and grain growth phenomena. The $LiNbO_3$ feed rods sintering at $1100^{\circ}C$ for 2 hours were found to have the best microstructure for the precursor feed-rods of the floating zone crystal growth because of their density, small grain size and uniform grain size distribution.

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