• Title/Summary/Keyword: InAsP

Search Result 77,668, Processing Time 0.086 seconds

As/P Exchange Reaction of InAs/InGaAsP/InP Quantum Dots during Growth Interruption

  • Choe, Jang-Hui;Han, Won-Seok;Jo, Byeong-Gu;Song, Jeong-Ho;Jang, Yu-Dong;Lee, Dong-Han
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.02a
    • /
    • pp.146-147
    • /
    • 2012
  • InP 기판위에 자발성장법으로 성장된 InAs 양자점은 $1.55{\mu}m$ 영역에서 발진하는 양자점 반도체 레이저 다이오드 및 광 증폭기를 제작할 수 있기 때문에 많은 관심을 받고 있다. 광통신 대역의 $1.55{\mu}m$ 반도체 레이저 다이오드 및 광 증폭기 분야에서 InAs/InP 양자점이 많은 관심을 받고 있으나, InAs/GaAs 양자점에 비해 제작이 어려운 단점을 가지고 있다. InAs/InP 양자점은 InAs/GaAs 양자점에 비해 격자 불일치가 작아 양자점의 크기가 크고 특히 As 계 박막과 P 계박막의 계면에서 V 족 원소 교환 반응으로 계면 특성 저하가 발생하여 성장이 까다롭다. As 과 P 간의 교환반응은 성장온도와 V/III 에 의해 크게 영향을 받는 것으로 보고되었다. 그러나, P계 InGaAsP 박막 위에 InAs 성장 시 발생하는 As/P 교환반응에 대한 연구는 매우 적다. 본 연구에서는 InGaAsP 박막 위에 InAs 양자점 성장 시 GI (growth interruption)에 의한 As/P 교환반응이 InAs 양자점의 형상 및 광학적 특성에 미치는 영향을 연구하였다. 시료는 수직형 저압 Metal Organic Chemical Vapor Deposition (MOCVD)를 이용하여 $520^{\circ}C$의 온도에서 성장하였다. 그림1(a) 구조의 양자점은 InP (100) 기판위에 InP buffer layer를 성장한 후 InP와 격자상수가 일치하는 $1.1{\mu}m$ 파장의 InGaAsP barrier를 50 nm 성장하였다. 그 후 As 분위기 하에서 다양한 GI 시간을 주었고 그 위에 InAs 양자점을 성장하였다. 양자점 성장 후 InGaAsP barrier를 50 nm, InP capping layer를 50 nm 성장하였다. AFM측정을 위해 InP capping layer 위에 동일한 GI 조건의 InAs/InGaAsP 양자점을 성장하였고 양자점 성장 후 As분위기 하에 온도를 내려주었다. 그림1(b) 구조의 양자점은 그림1(a) 와 모든 조건은 동일하나 InAs 양자점과 InGaAsP barrier 사이에 GaAs 2ML를 삽입한 구조이다. 양자점 형상 특성 평가는 Atomic force microscopy를 이용하였으며, 광특성 분석은 Photoluminescence를 이용하였다.

  • PDF

Effects of growth interruption on the photoluminescence characteristics of InGaAs/InP quantum wells (성장정지효과에 의한 InGaAs/InP 양자우물구조의 Photoluminescence 특성 변화)

  • 문영부;이태완;김대연;윤의준;유지범
    • Journal of the Korean Vacuum Society
    • /
    • v.7 no.2
    • /
    • pp.104-111
    • /
    • 1998
  • The InGaAs/InP quantum wells(QWs) were grown by low pressure metalorganic chemical vapor deposition and the effects of growth interruption steps on their interfacial structures were investigated by measuring photoluminescence spectra. When InP or InGaAs surface was treated under the same group V ambient, the full width at half maximum (FWHM) of the QW peak increased possibly due to the incorporation of impurities during the growth interruption time. When InP surface was treated under $AsH_3$, howerer, the PL peak showed red-shift due to the As-P exchange reaction and the change of FWHM was not remarkable. The effective thickness of InAs interfacial layer formed during $AsH_3$, treatment on the InP surface was calculated to be 1~2 monolayers. In the case of InGaAs treatment under $PH_3$, the PL peak energy and the FWHM increasied. This results suggest that $PH_3$ treatment on the InGaAs surface suppresses the incorporation of As into the subsequent InP layer and the local replacement of As by P occurs simultaneously.

  • PDF

A Numerical Study on the Growth and Composition of InGaAs, InGaP and InGaAsP Films Grown by MOCVD (MOCVD에 의한 InGaAs, InGaP 및 InGaAsP필름의 성장 및 조성변화에 대한 수치해석 연구)

  • Im, Ik-Tae;Kim, Dong-Suk;Kim, Woo-Seung
    • Journal of the Semiconductor & Display Technology
    • /
    • v.4 no.1 s.10
    • /
    • pp.43-48
    • /
    • 2005
  • Metaloganic chemical vapor deposition, also known as metalorganic vapor phase epitaxy has become one of the main techniques for growing thin, high purity films for compound semiconductors such as GaAs, InP, and InGaAsP. In this study, the distribution of growth rate and composition of InGaAsP, InGaP, and InGaAs films are studied using computational method. The influences of process parameters such as pressure, temperature and precursors' partial pressure on the growth rate and composition distributions are analyzed. The film growth rate is increased in the upstream part according to the increase of temperature but not in the downstream part. The Ga composition in InGaAsP film shows an asymptotic behavior for temperature variation but As composition varies significantly within the temperature range considered in the present study. The overall film growth rates of InGaP, InGaAs and InGaAsP are decreased with increasing the Ga/In ratios of the source gases. Pressure variation does not seem to be a significant parameter to the film growth. Film growth characteristics of tertiary films such as InGaP and InGaAs show similar trends to the quaternary film, InGaAsP.

  • PDF

A Study on the Single Crystal Growth of InGaAsP/GaAs by Vertical LPE System (수직형 LPE 장치에 의한 InGaAsP/GaAs 단결성 성장에 관한 연구)

  • 홍창희;조호성;황상구;오종환;예병덕;박윤호
    • Journal of the Korean Institute of Navigation
    • /
    • v.16 no.2
    • /
    • pp.21-27
    • /
    • 1992
  • Shortening the lasing wavelength(particularly below infrared ; the visible region) of laser diodes is very attractive because it can provide a wide range of applications in the fields of optical information, measurement, sensor, the development of medical instrument, and optical communication through plastic fibers. According to the recent researches on the field, InGaAsP/GaAs was suggested as a material for red-light laser. In this study, in order to grow InGaAsP/GaAs epitaxial layer on InGaAsP/GaAs by LPE, we used GaP and InP two phase solution technique for 670nm and 780 nm region, respectively. Through the X-ray diffraction measurement for the epitaxial layer grown from the experiments, we found that the lattice mismatch of $In_{0.46}Ga_{0.54}As_{0.07}P_{0.93}$/GaAs and $In_{0.19}Ga_{0.81}As_{0.62}P_{0.38}$/GaAs was about +0.3% and +0.1%, respectively.

  • PDF

Stability of Ascorbic Acid in the Catechin Solution (Catechin용액 중에서 Ascorbic acid의 안정성)

  • Kim, Sang Oak
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.12 no.3
    • /
    • pp.284-288
    • /
    • 1983
  • This experiment was carried out to investigate the stability of ascorbic acid (AsA) in the mixed solution of AsA and catechin according to the content changes of AsA and catechin under boiling, and for the respective concentration and pH. The loss of AsA was most for 10 minutes of boiling and accelerated by the mixture of catechin, but the loss was less in the high mixture rate than in the low the loss of catechin most for 10 minutes of boiling, also as the concentration of AsA becomes higher but that of cathchin lower, and as that of AsA lower but that of catechin higher, the loss of catechin becomes less moreover in the case of the low content ratio of catechin, the stability of AsA was better in order of the pH 4, pH 5, pH 6, namely as the pH increased, but in the case of the high better in order of the pH 6, pH 5, pH 4, that is as in decreased.

  • PDF

Coherent Precipitation of $Zn_3P_2$ During Zn Diffusion in a GaInAsP/InP Heterostructure (GaInAsP/InP 이종구조에서 Zn 확산에 의한 $Zn_3P_2$의 정합석출)

  • 홍순구;이정용;박효훈
    • Journal of the Korean Ceramic Society
    • /
    • v.30 no.3
    • /
    • pp.206-214
    • /
    • 1993
  • Coherent precipitation of Zn3P2 during Zn diffusion in a GaInAsP/InP heterostructure was studied using high-resolution transmission electron microscopy. Zn-diffusion-induced intermixing of Ga and In across the GaInAsP/InP heterointerface provided a Ga-mixed InP region which was nearly lattice-matched with Zn3P2 crystal and thus allowed thecoherent precipitation of Zn3P2. The Zn3P2 precipitates were preferentially nucleated at stacking faults which were formed to relax interfacial strain built up by the intermixing. The precipitates were grown to planar epitaxial layer along (100) plane in the lattice-matched region. The TEM images and diffraction pettern revealed that the tetragonal Zn3P2 crystals were coherently matched to the fcc structured GaInP matrix by the {{{{ SQRT {2} $\times$ SQRT {2} $\times$2 }} arrangement. The precipitation reaction of Zn3P2 was explained by an atomic migration model based on the kick-out mechanism.

  • PDF

Formation of ITO ohmic contact to $n^{+}$-InP for InP/lnGaAs HPT's fabrication (InP/AnGaAs HPT's 제작을 위한 $ITO/n^+$-InP Ohmic contact 특성 연구)

  • 황용한;한교용
    • Proceedings of the IEEK Conference
    • /
    • 2001.06b
    • /
    • pp.213-216
    • /
    • 2001
  • The use of a thin film of indium between the ITO and the $n^{+}$-InP contact layers for InP/InGaAs HPTs was studied without degrading its excellent optical transmittance properties. ITO/$n^{+}$-InP ohmic contact was successfully achieved by the deposition of Indium and thermal annealing. The specific contact resistance of about 6.6$\times$$10^{-4}$$\Omega\textrm{cm}^2$ was measured by use of the transmission line method (TLM). However, as the thermal annealing was just performed to ITO/$n^{+}$-InP contact without the deposition of Indium between ITO and $n^{+}$-InP, it exhibited schottky characteristics. In the applications, the DC characteristics of InP/InGaAs HPTs with ITO emitter contacts was compared with that of InP/InGaAs HBTs with the opaque emitter contacts.

  • PDF

Auger Study of LPE Grown In Ga As P/In P Heterostructure (Auger 전자현미경을 이용한 LPE에 의해서 성장된 InGaAsP/InP 이종접합계면에 대한 연구)

  • 김정호;권오대;박효현;남은수
    • Journal of the Korean Institute of Telematics and Electronics
    • /
    • v.25 no.12
    • /
    • pp.1656-1662
    • /
    • 1988
  • Auger depth profiles of various In Ga As P/In P heterojunctions grown by liquid phase epitaxial techniques under different growth conditions such as diffusion temperature, diffusion time and dopants, have been obtained. The surface contaminations of In Ga As have been investigated. We found that the samples with Zn diffusion exhibit significant interface grading phenomena including In depletion, Ga richness and P richness at the In Ga As P/In P interface, and In outdiffusion at the surface. The main surface contamination was found to be due to carbon and oxygen species. It can be suggested that Zn gettering takes a major role in such phenomena as interface grading, in depletion, and Ga and P richness at the interface.

  • PDF

Fabrication of InP-Based Microstructures for III- V Compound Semiconductor Micromachining (III-V 화합물 반도체 마이크로머시닝을 위한 InP를 기반으로 한 미세구조의 제조에 관한 연구)

  • 심준환;노기영;이종현;황상구;홍창희
    • Journal of the Korea Institute of Information and Communication Engineering
    • /
    • v.4 no.5
    • /
    • pp.1151-1156
    • /
    • 2000
  • In this paper, we report a fabrication of InP-based microstructurs for III-V compound semiconductor micromachining. Vertical liquid phase epitaxy(LPE) system was used in order to grow the InP/lnGaAsP/InP layers. The thicknesses of InP top-layer and InGaAsP were $1\mum \;and \;0.4\mum$, respectively. The fabrication of InGaAsP microstructures involves front-side bulk micromachining. The experimental result showed the beams must be carefully aligned in the <100> direction since the etching of the beam in the <100> direction is more faster than that of the beam in the <110> and <110> direction.

  • PDF

Comparative Analysis of Lighting Intensity, Leaf Temperature, Transpiration Rate, and Vapor Pressure Deficit between the Top and Branching Point of Stem during Growing Period of Paprika Plant (파프리카 생장에 따른 줄기의 정부와 하부 간 광량, 엽온, 증산속도 및 수증기압포차 비교 분석)

  • Seung Mi Woo;Ho Cheol Kim
    • The Journal of the Convergence on Culture Technology
    • /
    • v.9 no.6
    • /
    • pp.1097-1101
    • /
    • 2023
  • As paprika plants grew in a glass greenhouse from November 2022 to March 2023, the amount of light at each plant height, leaf temperature, transpiration rate, and water vapor pressure were measured. Accumulated leaf temperature was higher at the top of the plant than at the bottom. Over time, the leaf temperature measured around 11-13 AM changed from 26.55→23.21→22.80→26.67℃ in the lower part (pL), and from 26.52→24.48→24.55→27.78℃ in the upper part (pAs). And VPD changed from 1.45→0.94→0.74→1.46kPa in pL and from 1.11→0.86→0.71→1.28kPa in pAs. Accordingly, the transpiration rate changed from 4.25→0.17→4.08→0.52mmol·m-2·s-1 in pL, 7.61→2.45→1.94→4.39→0.52mmol·m-2·s-1 in pAs, and from pAs to pL. It was significantly higher than The difference between the lower and upper parts (pL-pAs) was higher in pAs than pL in leaf temperature, light intensity, and transpiration rate, but the water vapor pressure difference was higher in pL. In this way, paprika shows differences in the environment and photosynthetic factors between the upper and lower parts during the cultivation period, so it is judged that this needs to be taken into consideration in future research.