• Economic and Environmental Geology
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• v.44 no.1
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• pp.71-82
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• 2011

The unsaturated soil column tests were carried out for weathered gneiss soil and weathered granite soil in order to obtain the relationship between rainfall intensity and infiltration velocity of rainfall on the basis of different unit weight conditions of soil. In this study, volumetric water content and pore water pressure were measured using TDR sensors and tensiometers at constant time interval. For the column test, three different unit weights were used as in-situ condition, loose condition and dense condition, and rainfall intensities were selected as 20 mm/h and 50 mm/h. In 20 mm/h rainfall intensity condition, average rainfall infiltration velocities for both gneiss and weathered granite soils were obtained as $2.854{\times}10^{-3}$ cm/s ~ $1.297{\times}10^{-3}$ cm/s for different unit weight values and $2.734{\times}10^{-3}$ cm/s ~ $1.707{\times}10^{-3}$ cm/s, respectively. In 50 mm/h rainfall intensity condition, rainfall infiltration velocities were obtained as $4.509{\times}10^{-3}$ cm/s ~ $2.016{\times}10^{-3}$ cm/s and $4.265{\times}10^{-3}$ cm/s ~ $3.764{\times}10^{-3}$ cm/s respectively. The test results showed that the higher rainfall intensity and the lower unit weight of soil, the faster average infiltration velocity. In addition, the weathered granite soils had faster rainfall infiltration velocities than those of the weathered gneiss soils except for the looser unit weight conditions. This is due to the fact that the weathered granite soil had more homogeneous particle size, smaller unit weight condition and larger porosity.

• Applied Science and Convergence Technology
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• v.27 no.1
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• pp.9-13
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• 2018

Samples of anodic oxide film used in semiconductor and display manufacturing processes were prepared at different electrolyte temperatures to investigate the corrosion resistance. The anodic oxide film was grown on aluminum alloy 6061 by using a sulfuric acid ($H_2SO_4$) electrolyte of 1.5 M at $0^{\circ}C$, $5^{\circ}C$, $10^{\circ}C$, $15^{\circ}C$, and $20^{\circ}C$. The insulating properties of the samples were evaluated by measuring the breakdown voltage, which gradually increased from 0.43 kV ($0^{\circ}C$) to 0.52 kV ($5^{\circ}C$), 1.02 kV ($10^{\circ}C$), and 1.46 kV ($15^{\circ}C$) as the electrolyte temperature was increased from $0^{\circ}C$ to $15^{\circ}C$, but then decreased to 1.24 kV ($20^{\circ}C$). To evaluate the erosion of the film by fluorine plasma, the plasma erosion and the contamination particles were measured. The plasma erosion was evaluated by measuring the breakdown voltage after exposing the film to $CF_4/O_2/Ar$ and $NF_3/O_2/Ar$ plasmas. With exposure to $CF_4/O_2/Ar$ plasma, the breakdown voltage of the film slightly decreased at $0^{\circ}C$, by 0.41 kV; however, the breakdown voltage significantly decreased at $20^{\circ}C$, by 0.83 kV. With exposure to $NF_3/O_2/Ar$ plasma, the breakdown voltage of the film slightly decreased at $0^{\circ}C$, by 0.38 kV; however, the breakdown voltage significantly decreased at $20^{\circ}C$, by 0. 77 kV. In addition, for the entire temperature range, the breakdown voltage decreased more when sample was exposed to $NF_3/O_2/Ar$ plasma than to $CF_4/O_2/Ar$ plasma. The decrease of the breakdown voltage was lower in the anodic oxide film samples that were grown slowly at lower temperatures. The rate of breakdown voltage decrease after exposure to fluorine plasma was highest at $20^{\circ}C$, indicating that the anodic oxide film was most vulnerable to erosion by fluorine plasma at that temperature. Contamination particles generated by exposure to the $CF_4/O_2/Ar$ and $NF_3/O_2/Ar$ plasmas were measured on a real-time basis. The number of contamination particles generated after the exposure to the respective plasmas was lower at $5^{\circ}C$ and higher at $0^{\circ}C$. In particular, for the entire temperature range, about five times more contamination particles were generated with exposure to $NF_3/O_2/Ar$ plasma than for exposure to $CF_4/O_2/Ar$ plasma. Observation of the surface of the anodic oxide film showed that the pore size and density of the non-treated film sample increased with the increase of the temperature. The change of the surface after exposure to fluorine plasma was greatest at $0^{\circ}C$. The generation of contamination particles by fluorine plasma exposure for the anodic oxide film prepared in the present study was different from that of previous aluminum anodic oxide films.