• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.30-33
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter-level dielectrics (ILD). Especially, defects like micro-scratch lead to severe circuit failure, and affects yield. CMP slurries can contain particles exceeding $1{\mu}m$ size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particle agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectric(IMD)-CMP. The filter installation in CMP polisher could reduce defect after IMD-CMP. As a result of micro-scratches formation, it shows that slurry filter plays an important role in determining consumable pad lifetime.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.7
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• pp.557-561
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• 2001

Chemical mechanical polishing (CMP) process has been widely used to planarize dielectric layers, which can be applied to the integraded circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of in the defect-free inter-level dielectrics (ILD). Especially, defects such as micro-scratch lead to severe circuit failure which affect yield. CMP slurries can contain particles exceeding 1㎛ in size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particles agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectrics(IMD)-CMP process. The filter installation in CMP polisher could reduce defects after IMD-CMP process. As a result of micro-scratch formation, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. We have concluded that slurry filter lifetime is fixed by the degree of generating defects.

• Journal of Power System Engineering
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• v.17 no.3
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• pp.17-22
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• 2013

Diesel particulate filter has been adopted in new vehicle with diesel engine. Since the flow of exhaust gas was clogged as particulate matters were deposited in the filter, it have bad effects on a fuel consumption and power. It was investigated that a particulate filtering system with vacuum pump in the exhaust gas line could be free from clogging in previous research. In this study, the effects of water injection and position of inlet port in filtering system on reducing in particulate matter were investigated. It was noticed that particulate matter were decreased remarkable by water injection and moving the position of inlet port.

• Membrane and Water Treatment
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• v.7 no.4
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• pp.277-296
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• 2016

The aim of this research was to investigate the ability of nanofiltration (NF) and ultrafiltration (UF) membranes as a filtration unit for groundwater treatment for drinking water resources. Commercial membranes denoted as TS40, TFC-SR3 and GHSP were used to study the performance based on rejections and fluxes. The investigation has been conducted using natural groundwater obtained from a deep tube well with initial concentration of iron (Fe) and manganese (Mn) at 7.15 mg/L and 0.87 mg/L, respectively. Experimental results showed that NF membranes exhibited higher fluxes than UF membrane with pure water permeability at 4.68, 3.99 and $3.15L.m^{-2}.h^{-1}.bar^{-1}$, respectively. For metal rejection, these membranes have performed higher removal on Fe with TS40, TFC-SR3 and GHSP membranes having more than 82%, 92% and 86% respectively. Whereas, removal on Mn only achieved up to 60%, 80% and 30%, for TS40, TFC-SR3 and GHSP membranes respectively. In order to achieve drinking water standard, the membranes were efficient in removing Fe ion at 1 and 2 bar in contrast with Mn ion at 4 and 5 bar. Higher rejection of Fe and Mn were achieved when pH of feed solution was increased to more than 7 as TFC-SR3 membrane was negatively charged in basic solution. This effect could be attributed to the electrostatic effect interaction between membrane material and rejected ions. In conclusion, this study proved that NF membrane especially the TFC-SR3 membrane successfully treated local groundwater sources for public drinking water supply in line with the WHO standard.

• Applied Chemistry for Engineering
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• v.19 no.1
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• pp.80-85
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• 2008

Catalytic filter is capable of performing shallow bed dust filtration plus a catalytic reaction, promoted by a catalyst deposited in its inner structure. Such a feature may allow potential cost and space reduction in several environmental applications. Dust filtration and halogenated volatile organic compound (1,2-dichlorobenzene) destruction were carried out in a lab-scale reactor. $WO_3-V_2O_5/TiO_2$ supplied by MaGreen, which showed high catalytic acitivity at low temperature, was used as a catalyst. P-84 that can be operated under $250^{\circ}C$ was used as a felt. The catalytic activity and filtration efficiency of catalytic filters were investigated under the operating conditions, including temperature, face velocity, and dust concentration. The catalytic activity of catalytic filter increased with increasing temperature and the amount of catalyst loaded. The test results showed that the filtration efficiency was primarily affected by the face velocity. Pressure drop variations as a function of time were investigated for a variety of conditions. In case of virgin filter, a dramatic decrease in the pulse interval and a slightly increase in the base line pressure drop were observed. A relatively slow pressure drop build-up was recorded for the catalytic filter due to smooth and slippery surface characteristics of nanofiber. The catalytic filter indicated that high filtration efficiency over 99.98% and high catalytic activity over 90% at 1 m/min and $210^{\circ}C$.

• Journal of Korean Society of Water and Wastewater
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• v.18 no.6
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• pp.785-793
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• 2004

Coagulation has been investigated for pretreatment of low-pressure membrane systems such as microfiltration and ultrafiltration. Coagulation pretreatment can reduce foulants (particles and organic matter) prior to membrane filtration. However, when in-line coagulation or submerged type of filtration is used, flocculent aggregates could act as a foulant depending on concentrations and specific properties of floc. A natural water and three synthetic waters were used to investigate effects of coagulation pretreatment and presence of flocculent aggregates on membrane fouling. Coagulation pretreatment shows that foul ants were effectively removed during coagulation and the formed cake layer on the membrane surface had less resistances compared to raw natural water. In addition, little difference in membrane fouling was found by flocculent aggregates from the natural water. Interestingly, however, the results by three synthetic waters indicated that flocculent aggregates could have adverse effects on membrane fouling in a specific condition.

• Medical Lasers
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• v.8 no.2
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• pp.43-49
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• 2019

The plume produced by vaporizing tissue with a laser contains a variety of contaminants called laser-generated air pollutants (LGACs). LGACs consist of a mixture of toxic gas components, biomicroparticles, dead and living cells, and viruses. Toxic odors and thick smoke from surgical incisions and the coagulation of tissues can irritate eyes and airways, as well as cause bronchial and pulmonary congestion. Because of the potential risk of the smoke, it is advisable to appropriately remove it from the surgical site. We recommend using a smoke evacuator to remove the smoke. Suction nozzles should be placed as close as possible to the surgical site in a range of 2 cm or less. In-line filters should be used between the inlet and outlet of the surgical site. All air filtration devices should be capable of removing particles below 0.1 microns in size. The filter pack should be handled according to infection control procedures in the operating room. The laser mask can be an auxiliary protective device if it is properly worn. Some smoke inhaled under the nose wrap or over the side of the mask will not be filtered. As in electrosurgical operations, a suitable mask should be worn while smoke is present.

• Journal of Korean Society of Water and Wastewater
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• v.19 no.2
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• pp.214-220
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• 2005

Errors may occur due to analysis methods and water quality during the application of the on-line particle counter In water treatment process. Errors caused by analysis methods include particle destruction by shear force due to inflow speed and tube friction, as well as interruption by screening, bubbles and contaminants. Since errors happen frequently because of these factors, it is necessary to examine and evaluate such errors during the application of a particle counter. Errors can be large due to screening and bubbles. Measurement values are effective for water analysis after filtration process. However, because of screening, only measurement values for particles above $7{\mu}m$ are valid for water with a turbidity between 3-10NTU. As particle numbers around $10{\mu}m$ increase a lot after ozone treatment, sufficient pretreatment process is necessary. Physical conditions should keep stable for inflow to decrease errors caused by shear force.

• Journal of Environmental Science International
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• v.21 no.12
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• pp.1523-1528
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• 2012

This study was carried out to develop pilot plant Net3FM(Net Fit Fiber Filter Module) system and to suggest optimum operating condition for municipal wastewater reuse. SS concentration of biologically treated sewage effluent was reduced from 1.5~5.4mg/L to 0.4~1.0mg/L without coagulant injection in Net3FM system, and the SS removal efficiency was average 84.7%. And also, the removal efficiencies of COD and T-P were decreased slightly due to the SS removal by filtration. Coagulation-Filtration test was conducted to enhance the removal efficiencies of SS and T-P. The optimum dosage of coagulant was injected automatically by auto-controlling system, which is controlled by detecting value of turbidity of secondary sewage effluent. SS, COD and T-P concentrations in filtrated effluent were 0.21~0.57, 1.6~6.2 and 0.137~0.392mg/L with coagulant injection by in-line mixer in Net3FM system, respectively. The removal efficiencies of SS and T-P were highly increased to 92.8% and 89.8%, respectively. It was due to the combined the processes of coagulation and filtration. Net3FM system was evaluated that the removal efficiency of pollutants in secondary sewage effluent and the utilization potential as reclaimed water technology were very high.

• Journal of Soil and Groundwater Environment
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• v.14 no.1
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• pp.1-10
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• 2009

Groundwater flow due to intake of horizontal collector well in riverbank filtration site was analyzed by use of numerical groundwater modeling program (FEFLOW 5.1). Drawdowns of groundwater table nearby collector well were evaluated according to variations of several conditions; pumping rate, thickness of aquifer, offset distance from well to shore line of stream, conductance of streambed. It is observed that the drawdowns of groundwater table are clearly changed according to the variations of these conditions. The results of sensitive analysis shows that the thickness of alluvial aquifer and the offset distance are more sensitive than the conductance of streambed in evaluation of drawdown. This result implies that hydrogeological conditions, as like thickness of aquifer and its distribution in the site are important factors in site selection and evaluating the availability of riverbank filtration intake using horizontal collector well system. It is also revealed that numerical modeling using FEFLOW with 1-D discrete element feature can give efficient quantitative evaluation of horizontal collector well and estimation of availability of riverbank filtration site.