• 제목/요약/키워드: In this paper studied was the piezoelectric properties of the ${\beta}$-PVDF organic thin films prepared by physical vapour deposition method. The molecular orientation of organic thin films was controlled by the application of an electric field and variation of substrate temperature during the evaporation process. Optimum condition of manufacturing ${\beta}$-PVDF organic thin film by physical vapor deposition method is to keep at the substrate temperature of 8$0^{\circ}C$, at the applied electric field of 142.8 kV/cm. The voltage output coefficient increased from 1.39 to 7.04 V increasing the force moment.

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진공증착법을 이용한 최적의 압전성 유기박막의 제조와 스위치 특성에 관한 연구 (A Study on the preparation of optimum piezoelectric organic thin films of PVD method and switch characteristic)

  • 박수홍;이선우;이희규
    • 한국진공학회지
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    • 제8권3A호
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    • pp.194-200
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    • 1999

  • In this paper studied was the piezoelectric properties of the $\beta$-PVDF organic thin films prepared by physical vapour deposition method. The molecular orientation of organic thin films was controlled by the application of an electric field and variation of substrate temperature during the evaporation process. Optimum conditions of manufacturing $\beta$-PVDF organic thin film by physical vapor deposition method is to keep at the substrate temperature of $80^{\circ}C$, at the applied electric field of 142.8 kV/cm. The voltage output coefficient increased from 1.39 to 7.04V increasing the force moment.

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