• Title/Summary/Keyword: Impurity-Removal

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A Study on the Removal of Cu Impurity on Si Substrate and Mechanism Using Remote Hydrogen Plasma (리모트 수소 플라즈마를 이용한 Si 기판 위의 Cu 불순물 제거)

  • Lee, Jong-Mu;Jeon, Hyeong-Tak;Park, Myeong-Gu;An, Tae-Hang
    • Korean Journal of Materials Research
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    • v.6 no.8
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    • pp.817-824
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    • 1996
  • Removal of Cu impurities on Si substrates using remote H-plasma was investigated. Si substrates were intentionally contaminated by 1ppm ${CuCI}_{2}$, standard chemical solution. To determine the optimal process condition, remote H-plasma cleaning was conducted varying the parameters of rf power, cleaning time and remoteness(the distance between the center of plasma and the surface of Si substrate). After remote H-plasma cleaning was conducted, Si surfaces were analysed by TXRF(total x-ray reflection fluorescence) and AFM(atomic force microscope). The concentration of Cu impurity was reduced by more than a factor of 10 and its RMS roughness was improved by more than 30% after remote H-plasma cleaning. TXRF analysis results show that remote H-plasma cleaning is effective in eliminating Cu impurity on Si surface when it is performed under the optimal process condition. AFM analysis results also verifies that remote H-plasma cleaning makes no damage to the Si surface. The deposition mechanism of Cu impurity may be explained by the redox potential(oxidation-reduction reaction potential) theory. Based on the XPS analysis results we could draw a conclusion that Cu impurities on the Si substrate are removed together with the oxide by a "lift-off" mechanism when the chemical oxide( which forms when Cu ions are adsorbed on the Si surface) is etched off by reactive hydrogen atoms.gen atoms.

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Impurity variation in high purity silica mineral with different leaching methods (실리카광물의 산침출 정제방법에 따른 불순물 변화 연구)

  • Yoon, Yoon Yeol;Lee, Kil Yong;Cho, Soo Young;Chung, Soo Bok;Chae, Young Bae
    • Analytical Science and Technology
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    • v.21 no.4
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    • pp.332-337
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    • 2008
  • Purification of silica mineral was compared with various leaching methods such as shaking, stirring, ultrasonic with 2.5% HF/HCl solution. Among them, ultrasonic method showed a best leaching effect. From the leaching experiment, Na, K, Fe, Al exist as the major impurity elements. The removal rate of Al, Fe showed little difference with various leaching methods but Ca, Mn, Na were very different. Four kinds of silica mineral (>99% purity) after physical purification treatment were used for ultrasonic leaching experiment. Among them IN-Si had a highest impurity removal rate. Ca, Cr, K, Zn were removed above 80% using ultrasonic leaching method and Fe was also removed above 60%. But Al showed 10~60% removal rate with different samples.

A Study on the Design of Compression Air Hole in Front of Spindle for Chip Removal (주축 전면부 칩 제거를 위한 압축공기 구멍 설계에 관한 연구)

  • Kang, Dong Wi;Lee, Choon Man
    • Journal of the Korean Society for Precision Engineering
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    • v.30 no.3
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    • pp.278-283
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    • 2013
  • While Built-in Spindle is working in machining center, the tool is changed by ATC(Automatic Tool Changer) automatically. However, impurities could be stacked in front of spindle because of chips formation while machining, and positional error between spindle and tool could be generated. Compressed air holes are necessary for removal of the impurities. But, the diameter and number of compressed air hole are different for each built-in spindle in market. In this paper, flow analysis is carried out to find out the efficient figuration of the compressed air hole by using velocity and pressure distributions.

Characterization and Microstructure of an Extruded Flat-Tubular-Type Alumina Filter (압출공정에 의한 수 처리용 평관형알루미나 필터의 미세구조와 특성평가)

  • Bae, Byung-Seo;Ha, Jang-Hoon;Song, In-Hyuck
    • Journal of the Korean Ceramic Society
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    • v.51 no.5
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    • pp.406-412
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    • 2014
  • In this study, flat-tubular-type alumina filters were manufactured using alumina powder of two sizes ($2.4{\mu}m$ ALM-44 and $0.4{\mu}m$ AP 400) by an extrusion process. The manufactured alumina filter was sintered at $1200-1600^{\circ}C$ for 1 h. As particle size increased, the largest pore size, average pore size and porosity increased; but density and linear shrinkage decreased. The alumina filter fabricated using ALM-44 powder sintered at $1500^{\circ}C$ was confirmed as the best water treatment filter after investigation of the bending strength, water permeability and impurity-removal efficiency of the experimental filters. This flat-tubular-type alumina filter is expected to be useful not only for direct water treatment, but also for use as a support filter during coating processes, to control pore size.

Study on Recycling of Scraps from Process of Silicon-single-crystal for Semiconductor

  • Lee, Sang-Hoon;Lee, Kwan-Hee;Hiroshi Okamoto
    • Proceedings of the IEEK Conference
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    • 2001.10a
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    • pp.705-710
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    • 2001
  • So for the quartz-glassy crucible wastes which was used for pulling up silicon-single-crystal ingot have simply reused for refractory raw-materials, or exhausted. This study is concerned on the advanced recycling-technology that is obtained by the proper micro-particle preparation process in order to fabricate fine amorphous silica filler for EMC (Epoxy Molding Compound). Therefore, this paper will deal with the physical, chemical and thermal pre-treatment process for efficient impurity removal and with the proper micro-particle process for producing the amorphous silicafiller. In view of the results, if the chemical, physical and thermal pre-treatment process for efficient elimination of impurity was passed, the purity of wasted fused glassy crucible is almost equal to the its of first anhydrous quartz glass. Thus, it was understood that this wasted fused glassy crucible was sufficient value of recycling, though it was damaged. When the ingot was fabricated, Phase transformation of crystallization by heat treatment (heat hysteresis phenomenon) was not changed. So, it was understood that as fused silica in the amorphous state, as It is, recycling possibility was very high

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The Performance Estimation of Pressure-Type Rapid Automatic Filter (압력식 급속 자동 여과장치의 여과성능 평가)

  • Kim, Deok-Jin;Ryu, Hea-Seong;Shin, Sang-Yoon
    • Proceedings of the SAREK Conference
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    • 2006.06a
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    • pp.607-612
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    • 2006
  • A pressure-type rapid automatic filter of 2000mm diameter and 170 ton/h filtering capacity was fabricated. In case of no external impurity inflow, the turbidity removal efficiency on raw water was experimented and the numbers of impurities of each sizes were analyzed by particle counter. As the result of circulated filtering, the raw water of 40 NTU was filtered to 0.44 NTU and the numbers of impurities above $1{\mu}m$ were removed by approximately 95%. With the filtering efficiency experimented and the mathematical method, the turbidity change of circulation water were calculated according to the inflow rate of external impurity and water treatment method of blow-down or filtering. The cost of blow-down water was calculated from above results. And simple payback period for this filter is calculated as about one year. Nowadays, as the cost of water is continuously increasing and environment regulations will be more strict, the water quality control using this filter will be expected to satisfy the user requirement.

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Cationic Dye (Methylene Blue) Removal from Aqueous Solution by Montmorillonite

  • Fil, Baybars Ali;Ozmetin, Cengiz;Korkmaz, Mustafa
    • Bulletin of the Korean Chemical Society
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    • v.33 no.10
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    • pp.3184-3190
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    • 2012
  • Color impurity in industrial effluents pose a significant risk to human health and the environment, so much effort has been expended to degrade them using various methods, including the use of clay minerals as adsorbent. The purpose of this study was to advance understanding of the mechanisms for the removal of methylene blue (MB) from aqueous solutions onto montmorillonite as an adsorbent. Preliminary experiments showed that montmorillonite was effective for this purpose and adsorption equilibrium could be reached in about 24 h. Adsorption capacity of the clay decreased with increase in temperature and ionic strength, and increased with in pH. The fitness of equilibrium data to common isotherm equations such as the Langmuir, Freundlich, Elovich, Temkin and Dubinin-Radushkevich were tested. The Langmuir equation fitted to equilibrium data better than all tested isotherm models. Thermodynamic activation parameters such as ${\Delta}G^0$, ${\Delta}S^0$ and ${\Delta}H^0$ were also calculated and results were evaluated. As result montmorillonite clay was found as effective low cost adsorbent for removal of cationic dyes from waste waters.

Comparative Study on the Degumming Methods of Hemp Fiber (대마섬유의 정련 방법에 관한 비교 연구)

  • Lim, Hyeong-Gyu;Kim, Hee-Sook
    • Fashion & Textile Research Journal
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    • v.22 no.4
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    • pp.523-533
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    • 2020
  • Previous studies are used to examine cellulose content, degumming period, fiber quality, production yield, production cost, development limit of fiber according to physical, chemical, and microbial degumming methods. Three types of degumming methods are used to measure surface condition after degumming, necessity of additional degumming and degree of impurity removal. First, previous studies confirmed that the microbial degumming method is superior in terms of cellulose content, fiber quality, production yield, production cost, and fiber development possibility. Second, surface condition and the necessity of additional degumming were analyzed by SEM. The black skin binding material was removed in the case of the Sangnangyi and chemical degumming; however, it was insufficient and further degumming was required. Skin fiber binding material was removed in the case of microbial degumming and the surface was cleanest after degumming; in addition, most showed the form of yarn decomposition. The FT-IR spectrum determined the degree of removal of impurities and showed that it can utilize inherent physical properties as the best degumming method. The degree of removal of pectin and lignin by microbial degumming was cleanest with hemicellulose also reduced by microbial degumming.

Removal of Cu impurities in LiBr solution using cyclone electrowinning method (싸이클론 전해환원방법을 이용한 LiBr 용액내의 Cu 불순물 제거에 관한 연구)

  • Da Jung Park;Kyu Hwan Lee
    • Journal of the Korean institute of surface engineering
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    • v.57 no.2
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    • pp.92-97
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    • 2024
  • The LiBr aqueous solution, which is the absorption liquid of absorption refrigerator, must be replaced periodically because the concentration of impurities such as Cu2+, Fe2+, Ca2+, etc., increases due to corrosion of the tubes as the period of use increases, and the refrigeration efficiency decreases significantly. In order to reuse the waste absorption liquid, flocculation-precipitation method is mainly applied to precipitate the impurities, which requires hundreds of times the concentration of impurities and generates additional waste. In this study, a process for removing Cu ion impurities from cyclone electrolyzer by electrolytic reduction is presented in a small-scale facility without additional waste. It was confirmed that Cu ion impurities can be removed down to 1 ppm by electrolytic reduction process, and to further improve the removal rate, the mass transfer rate was increased by using a cyclone electrolyzer. The removal rate of Cu ions increased with the increase of flow rate and current density, and it was confirmed that Cu was removed at a rate of 1.48 ppm/h under the condition of 330 mL/sec and 2.5 mA/cm2.

A Study of Organic Impurity Removal Efficiency for Waste LCD Touch Panel Glass by Solvents Types (폐 LCD 유리 재활용을 위한 용매 별 유기물 제거 효율에 대한 연구)

  • Kang, Yubin;Choi, Jin-Ju;Park, Jae Layng;Lee, Chan Gi
    • Resources Recycling
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    • v.29 no.6
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    • pp.57-64
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    • 2020
  • In this study, removal of OCA and organic impurities for recycling LCD touch panel glass was conducted by mechanical and chemical dissolution methode. Cut mill and oscillation mill were used for mechanical crushing of touch panel, and water, ethanol, dichloromethane were used to remove OCA and organic impurities. As a result of TGA, when applied only dicloromethane in the process, the efficiency of organic removal was to be best. In addition, removal effect of organic impurities increased as the cleaning temperature increased. As a result of zeta potential analysis to confirm the dispersion degree of touch panel glass in the solvent, the absolute value of the zeta potenial of water with the lowest cleaning effect was lower than other solvents, and it was confirmed that efficiency of organic removal is affected not only by the chemical dissolution properties but also the physical dispersion properties in the solvent.