• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.6
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• pp.734-743
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• 1999

The local Nusselt numbers have been measured for a round turbulent jet impinging on the concave surface with and without rib. Liquid crystal/transient method was used to determine the Nusselt number distributions along the surface. The temperature on the surface was measured using liquid crystal and a digital color image processing system. The experiments were made for the jet Reynolds number (Re) 23,000, the dimensionless nozzle-to-surface distance (L/d) from 4 to 10, the dimensionless surface curvature (d/D) 0.056, and the rib type (height ($d_1$) 0.2 cm, pitch (p) from 1.2 to 3.2 cm). It was founded that only when $L/d{\geq}6$, the average Nusselt numbers on the concave surface with rib are higher than those without rib, mainly due to an increase in the turbulent intensity caused by the effect of rib attached to the wall surface. It was realized that the rib attached to the concave surface may no longer enhance the heat transfer rate or even lowers it depending on the rib type and flow conditions. In addition, the results by the steady-state method using the gold-film Intrex were in good agreement with those by the transient shroud method.

• International Journal of Aeronautical and Space Sciences
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• v.16 no.2
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• pp.123-136
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• 2015

The present study numerically investigates the effect of shield on the flow characteristics of Hartmann whistle. The flow characteristics of un-shielded Hartmann whistle are compared with whistles of different shield heights 15 mm, 17 mm, 20 mm, 25 mm and 30 mm. The comparison of Mach number contours and transient velocity vectors of shielded Hartmann whistles with un-shielded ones for the same conditions reveal that the presence of shield causes the exiting jet to stick to the wall of the shield without causing spill-over around the cavity inlet, thus sustaining the shock oscillation as seen in the unshielded Hartmann whistle, which has intense flow/shock oscillation and spill-over around the cavity mouth. The velocity vectors indicate jet regurgitance in shielded whistles showing inflow and outflow phases like un-shielded ones with different regurgitant phases. The sinusoidal variation of mass flow rate at the cavity inlet in un-shielded Hartmann whistle indicates jet regurgitance as the primary operating mode with large flow diversion around the cavity mouth whereas the non-sinusoidal behavior in shielded ones represent that the jet regurgitance is not the dominant operating mode. Thus, this paper sufficiently demonstrates the effect of shield in modifying the flow/shock oscillations in the vicinity of the cavity mouth.

• Proceedings of the SAREK Conference
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• 2007.06a
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• pp.75-75
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• 2007

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.2
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• pp.195-203
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• 2000

The local heat/mass transfer coefficients for arrays of impinging circular air jets on a plane surface are determined by means of the naphthalene sublimation method. Fluid from the spent jets is constrained to flow out of the system in one direction. Therefore, the spent fluid makes a crossflow in the confined space. The present study investigates effects of jet-orifice-plate to impingement-surface spacing and jet Reynolds number. The spanwise- and overall-averaged heat/mass transfer coefficients are obtained by numerical integrating the local heat transfer coefficients. The local maximum heat/mass transfer coefficients move further in the downstream direction due to the increase of crossflow velocity. At the mid-way between adjacent jets, the heat/mass transfer coefficients have a small peak owing to the collision of the adjacent wall jets and are affected strongly by the crossflow. The effect of the crossflow occurs strongly at the small orifice-to-impingement surface distance.

• Journal of Energy Engineering
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• v.18 no.2
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• pp.108-113
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• 2009

An experimental study of jet impingement on aluminum foam mounted on the surface with constant heat flux is conducted with the presentation of the heat transfer rate measured when jet impinges normally to a flat plate. Effects of pore density, foam thickness and Reynolds number on the heat transfer are analyzed. Experimental results show that the significant enhancement in Nu is obtained when the aluminum foam is mounted on the heated plate and that the increase in the heat transfer due to the porous material insertion is dominated by both the increase in the heat transfer area and the decrease in the momentum flux resulted from the pressure drop.

• Journal of the Korean Society for Heat Treatment
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• v.23 no.5
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• pp.249-256
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• 2010

Water jet impingement cooling has been widely used in a various engineering applications; especially in cooling of hot steel plate of steelmaking processes and heat treatment in hot metals as an effective method of removing high heat flux. The effects of cooling water temperature on water jet impingement cooling are primarily investigated for hot steel plate cooling applications in this study. The local heat flux measurements are introduced by a novel experimental technique that has a function of high-temperature heat flux gauge in which test block assemblies are used to measure the heat flux distribution during water jet impingement cooling. The experiments are performed at fixed flow rate and fixed nozzle-to-target spacing. The results show that effects of cooling water temperature on the characteristics of jet impingement heat transfer are presented for five different water temperatures ranged from 5 to $45^{\circ}C$. The local heat flux curves and heat transfer coefficients are also provided with respect to different boiling regimes.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.2 no.4
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• pp.295-302
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• 1990

The purpose of this study is augmentation of heat transfer without additional power in two-dimensional impinging air jet. The technique of heat transfer augmentation used in this experiment is to place rod bundles in front of the flat heated surface. The effects of rod diameter, nozzle-to-target plate distance and the nozzle exit velocity on heat transfer have been investigated. The main conclusions obtained from this experiment are as follows. High heat transfer augmentation is achieved by means of flow acceleration and thinning of boundary layer by placing rod bundles in front of the flat plate. Average heat transfer coefficient becomes maximum in the case of H/B=10,D=4mm. For H/B=2,D=4mm, maximum heat transfer augmentation has been determined to be about 1.5 times larger than that of the flat plate. Heat transfer augmentation by placing the rod bundles at 12m/s is to be about 2 times more than increasing nozzle exit velocity from 12m/s to 18m/s.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.8
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• pp.714-721
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• 2005

The water jet impingement cooling with boiling is one of the techniques to remove heat from high heat flux equipments. The configuration of surface roughness is one obvious condition of affecting the performance on heat transfer in nucleate boiling, The present study investigates the water jet impinging single-phase convection and nucleate boiling heat transfer for the effect of surface roughness to enhance the heat transfer in free surface and submerged jet. The distributions of the averaged wall temperature as well as the boiling curves are discussed. Jet velocities are varied from 0.65 to 1.7 m/s. Surface roughness by sand blast and sand paper varies from 0.3 to 2.51 ${\mu}m$ and cavity shapes on surface are semi-circle and v-shape, respectively The results showed that higher velocity of the jet caused the boiling incipience to be delayed more. The incipient boiling and heat transfer increase with increasing surface roughness due to a large number of cavities of uniform size.

• Journal of the Korean Society of Propulsion Engineers
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• v.1 no.2
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• pp.32-40
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• 1997

The velocity and turbulent intensity of the jet core are affected by the vortices around jet. By the control of vortex acoustically, we can expect the changes of the flow and heat transfer characteristics of free and impinging jets. On this paper, we studied the effects of vortex forcing. If vortex pairings are promoted by acoustic excitation, the turbulent intensity is increased and the high heat transfer coefficients are obtained at the small nozzle to plate distance. On the other hand, it has low turbulent intensity at the center of jet. However due to increase of potential core length, it is more effective at the large nozzle to plate distance. Therefore the excited frequency, especially its subharmonic frequency, has an important role to control the jet flows.