• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.7
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• pp.484-490
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• 2018

This paper describes an algorithm for calculating load impedance by measuring voltage and current components using a VI sensor in a 13.56 MHz impedance automatic matching system. We propose an algorithm that improves the error rate by using an arbitrary complex calibration load instead of the conventional $50{\Omega}$ calibration load. The error rate is targeted to attain average values of $R_{IN}$ and $X_{IN}$ at 1% and 20% or less, respectively. First, the IF frequency is calculated using a mixer to reduce the error rate. Second, when the arbitrary complex load is used as the calibration load, the error rate $R_{IN}$ decreased from 4.7 % to 0.3 % on average, and $X_{IN}$ decreased from 102 % to 18.3 % on average.