• Title/Summary/Keyword: IT TCO

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Strain evolution in Tin Oxide thin films deposited by powder sputtering method

  • Cha, Su-Yeon;Gang, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.283.1-283.1
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    • 2016
  • Tin Oxide(SnO2) has been widely investigated as a transparent conducting oxide (TCO) and can be used in optoelectronic devices such as solar cell and flat-panel displays. It would be applicable to fabricating the wide bandgap semiconductor because of its bandgap of 3.6 eV. In addition, SnO2 is commonly used as gas sensors. To fabricate high quality epitaxial SnO2 thin films, a powder sputtering method was used, in contrast to typical sputtering technique with sintered target. Single crystalline sapphire(0001) substrates were used. The samples were prepared with varying the growth parameters such as gas environment and film thickness. Then, the samples were characterized by using X-ray diffraction, scanning electron microscopy, and atomic force microscopy measurements. We found that the strain evolution of the samples was highly affected by gas environment and growth rate, resulted in the delamination under O2 environment.

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ITO 박막 증착 공정시 발생하는 실시간 플라즈마 광 측정 및 산소가스유량제어

  • Park, Hye-Jin;Choe, Jin-U;Jo, Tae-Hun;Hwang, Sang-Hyeok;Park, Jong-In;Yun, Myeong-Su;Gwon, Gi-Cheong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.99.2-99.2
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    • 2015
  • 현재 투명전극(Transparent Conductive Oxide: TCO)은 평판 디스플레이, 태양전지, 터치패널, 투명 트렌지스터의 전극 등 여러 분야에서 연구되어지고 있으며, 주로 IT 산업의 핵심재료로 ITO (Indium Tin Oxide)가 사용되고 있다. ITO 박막은 주로 스퍼터 공정을 통해 제작이 되며, 전기전도도가 우수하며 높은 Optical Band Gap을 가지고 있어 투명전극으로 많이 사용되고 연구되어지고 있다. 산화물 박막을 증착할 때 산소유량에 따라 박막의 물성이 변하거나 박막의 특성이 저하되는 현상 등을 가지고 있어 공정시 산소유량이 중요한 변수로 작용하게 된다. 본 연구에서는 증착 공정 중 발생하는 플라즈마의 방출광을 가지고 산소의 대표적인 파장의 방출광을 관찰하여 방출광이 변화함에 따라 실시간으로 산소가스유량이 제어됨을 확인하였으며, 또한 산소유량제어를 통해 생성된 박막의 전기적 특성 및 광학적 특성 등 박막의 물성을 비교하였다.

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Effect of TiO2 buffer layer on the electrical and optical properties of IGZO/TiO2 bi-layered films

  • Gong, Tae-Kyung;joo, Moon hyun;Choi, Dong-Hyuk;Son, Dong-Il;Kim, Daeil
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.178.1-178.1
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    • 2015
  • In and Ga doped ZnO (IGZO) thin films were prepared by radio frequency magnetron sputtering without intentional substrate heating on glass substrate and TiO2-deposited glass substrates to consider the effect of a thin TiO2 buffer layer on the optical and electrical properties of the films. The thicknesses of the TiO2 buffer layer and IGZO films were kept constant at 5 and 100 nm, respectively. Since the IGZO/TiO2 bi-layered films show the higher FOM value than that of the IGZO single layer films, it is supposed that the IGZO/TiO2 bi-layered films will likely perform better in TCO applications than IGZO single layer films.

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Epitaxial growth of Tin Oxide thin films deposited by powder sputtering method

  • Baek, Eun-Ha;Kim, So-Jin;Gang, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.185.2-185.2
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    • 2015
  • Tin Oxide (SnO2) has been widely investigated as a transparent conducting oxide (TCO) and can be used in optoelectronic devices such as solar cell and flat-panel displays. In addition, it would be applicable to fabricating the wide bandgap semiconductor because of its bandgap of 3.6 eV. There have been concentrated on the improvement of optical properties, such as conductivity and transparency, by doping Indium Oxide and Gallium Oxide. Recently, with development of fabrication techniques, high-qulaity SnO2 epitaxial thin films have been studied and received much attention to produce the electronic devices such as sensor and light-emitting diode. In this study, powder sputtering method was employed to deposit epitaxial thin films on sapphire (0001) substrates. A commercial SnO2 powder was sputtered. The samples were prepared with varying the growth parameters such as gas environment and film thickness. Then, the samples were characterized by using XRD, SEM, AFM, and Raman spectroscopy measurements. The details of physical properties of epitaxial SnO2 thin films will be presented.

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디지털 아카이브 시스템

  • 홍성추
    • Broadcasting and Media Magazine
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    • v.8 no.2
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    • pp.84-104
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    • 2003
  • 방송 인프라도 드디어 ENG VCR시대를 넘어 컴퓨터시대로 점차 마이그레이션 하고 있다. 이같은 IT기반의 환경은 워크플로우 개선을 통한 회사 경쟁력 향상를 도모함과 아울러 조직의 리엔지니어링을 가속화하여 조직의 최적화(Optimization)를 구현한다. 예를 들면 워크플로우 개선 측면으로는 콘텐츠 입력$\cdot$검색$\cdot$모니터(Acquisition & Searching & Browsing), 자료의 복사$\cdot$편집(Copying & Editing), 프로그램의 배달$\cdot$송출$\cdot$출력(Delivery & Transmission & Retrieval)등이 새롭게 나타나거나 변하여 시간비용을 대폭 절감하고, 업무의 정형화 및 리소스 공유로 효율적 비용관리와 분배구조를 구축하며, 작업과 승인 프로세스의 원활화로 생산성이 크게 향상된다. 또한 하루 24시간, 1년 365일 상시 운용이 가능하며, 테이프 구입비, 시스템 보수.유지비(TCO)등 각종 비용이 크게 절감된다. 디지털 아카이브 구축으로 콘텐츠 재활용의 극대화, 콘텐츠의 효율적인 관리, 효율적 콘텐츠 가공, 다양한 메체로 전환가능, 지적 재산권의 확보가 가능하다. 이밖에 원소스 멀티유즈 환경 구축을 통해 다양한 수의 창출 채널이 확보되고, 새로운 상품 개발이 가능하며, 고객의 니즈에 더욱 충실해 질 수 있다. 이같이 방송 인프라의 펀더멘탈 변화에 의해 방송제작$\cdot$편집$\cdot$송출에 관련된 환경이 크게 바뀐다.

Comparison of Temperature Characteristics Between Single and Poly-crystalline Silicon Pressure Sensor (단결정 및 다결정 실리콘 압력센서의 온도특성 비교)

  • Park, Sung-June;Park, Se-Kwang
    • Proceedings of the KIEE Conference
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    • 1995.11a
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    • pp.342-344
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    • 1995
  • Using piezoresistive effects of single-crystal and poly-crystalline silicon, pressure sensors of the same pattern were fabricated for comparison of temperature characteristics. Optimum size and aspect ratio of rectangular sensor diaphragm were calculated by FEM. For polsilicon pressure sensor, polysilicon resistors of Wheatstone bridge were deposited by LPCVD to be used in a wide' temperature range. Polysilicon pressure sensors showed more stable temperature characteristics than single-crysta1 silicon in the range of $-20\sim125[^{\circ}C]$. To get low TCO (Temperature Coefficient of Offset), below $\pm$3 [${\mu}V/V/^{\circ}C$], it is needed for each TCR of piezoresistors to have a deviation within $\pm25[ppm/^{\circ}C]$ less than $\pm500[ppm/^{\circ}C]$ of resistors for polysilicon pressure sensor can result in low TCS(Temperature Coefficient of Sensitivity) of -0.1[%FS/$^{\circ}C$].

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New Transparent Conducting B-doped ZnO Films by Liquid Source Misted Chemical Deposition Method (LSMCD 장비를 이용 Boron 도핑 ZnO 박막제조 및 특성평가)

  • Kim, Gil-Ho;Woo, Seong-Ihl;Bang, Jung-Sik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.307-308
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    • 2008
  • Zinc oxide is a direct band gap wurtzite-type semiconductor with band gap energy of 3.37eV at room temperature. the n-type doped ZnO oxides, B doped ZnO (BZO) is widely studied in TCOs materials as it shows good electrical, optical, and luminescent properties. we focused on the fabrication of B doped ZnO films with glass substrate using the LSMCD at low temperature. And Novel boron-doped ZnO thin films were deposited and characterized from the structural, optical, electrical point of view. The structure, morphology, and optical properties of the films were studied as a function of by employing the XRD, SEM, Hall system and micro Raman system.

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Post-annealing of Al-doped ZnO films in hydrogen atmosphere (Al이 도핑된 투명전극용 ZnO 박막의 수소 열처리에 관한 특성연구)

  • Oh, Byeong-Yun;Jeong, Min-Chang;Lee, Woong;Myoung, Jae-Min
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.05a
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    • pp.58-61
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    • 2005
  • In an effort to improve the electrical properties of ZnO:Al transparent electrode films, post-annealing treatment in hydrogen atmosphere was attempted with varying annealing time at 573 K for compatibility with typical display device fabrication processes. It was observed that carrier concentrations and mobilities increased with longer annealing time with small changes in crystallinity. This resulted in substantial decrease in resistivity from $4.80{\times}10^{-3}$ to $8.30{\times}10^{-4}{\Omega}cm$ due to increased carrier concentration. Such improvements in electrical properties are attributed to the passivation of the grain boundary surfaces. The optical properties of the films, which changed in accordance with the Burstein-Moss effect, were consistent with the observed changes in electrical properties.

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An Analysis of the Effects of Enterprise Computing Environment Integration Using HCI Virtualization Technology (HCI 가상화 기술을 이용한 기업 전산환경 통합효과 분석)

  • Ahn, CJ;Lee, Jong Yun
    • Proceedings of the Korea Information Processing Society Conference
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    • 2020.11a
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    • pp.109-112
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    • 2020
  • 본 논문은 기업의 중요 정보를 내부에 저장하면서도 스토리지, 컴퓨팅 및 네트워크를 단일 시스템으로 통합한 HCI(Hyper-Converged Infrastructure) 기반의 On-premises 가상화 인프라를 기업에 도입했을 때의 효과를 검증한다. 150여 대의 물리 서버를 운영하는 기업에서 신규 시스템에 대해서 HCI 가상화 기반의 인프라를 도입하여 물리 서버 대비 약 35%의 구축비용을 절감하고, 기본 사용 연수인 5년간의 유지보수 비용은 약 59%의 절감효과를 예상할 수 있었다. 이를 통해 HCI 가상화 기술을 통해 정보기술이 기업 비즈니스 성패에 큰 영향을 주는 4차산업 혁명 시대에 기업의 총 IT 소유비용(TCO)을 절감할 수 있음은 물론, 빠른 비즈니스 변화에 유연하게 대응할 수 있는 인프라를 구성할 수 있음을 시사했다. 또한 가상화로 전환을 망설이는 기업에는 실질적인 효과를 제시할 수 있을 것이다.

Economic Analysis for Packaged Software Adoption : Considering the Number of Concurrent Users (동시 사용자수를 고려한 패키지 소프트웨어 구매에 관한 경제성 분석)

  • Yoon, Ho-Jung;Ahn, Jae-Kyoung
    • Journal of Information Technology Services
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    • v.10 no.4
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    • pp.119-131
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    • 2011
  • When your company buys packaged software, the company needs to determine how many software licenses must be purchased. If the quantity is too small, it will be not enough for the users to access the programs at anytime within the company. Conversely, if the quantity is too large, they will waste a lot of money. In this paper, we surveyed several number of researchers of K institute and derived the using pattern of a specific packaged software. We estimated a proper number of packaged software licenses by Erlang Loss Function, the Engset Model, and simulation model. With the results of the three methodologies, we were able to empirically verify economic benefits of packaged software purchase by comparing NPV (Net Present Value) between user licenses and network licenses. Consequently, TCO of user licenses is much higher than that of network licenses. We had probabilistically calculated proper number of licenses based on the using pattern of users. Hence, this paper will be useful for decision makers who are going to determine package software's type and quantity from an economic perspective.