Thin Film Transistor Characteristics with ZnO Channel Grown by RF Magnetron Sputtering (RF Magnetron Sputtering으로 증착된 ZnO의 증착 특성과 이를 이용한 Thin Film Transistor특성)
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- Journal of the Microelectronics and Packaging Society
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- v.14 no.3
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- pp.15-20
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- 2007