Chonbuk National University 60kW and 200kw ICP(RF) Plasma systems for Advance Material processing (전북대학교 소재공정용 60kW 및 200kW ICP(RF) 플라즈마 발생 장치 구축 현황)
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- Proceedings of the Korean Society of Propulsion Engineers Conference
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- 2010.11a
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- pp.781-783
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- 2010