• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.299-300
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• 2012

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2013년도 춘계학술대회 논문집
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• pp.113-114
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• 2013

• 한국정밀공학회지
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• 제30권12호
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• International Journal of Precision Engineering and Manufacturing
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• 제5권3호
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• pp.62-68
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• 2004

Effectiveness of a corrective machining algorithm, which can construct the proper machining information to improve motion errors utilizing measured motion errors, is verified experimentally in this paper, Corrective machining process is practically applied to single and double side hydrostatic bearing tables. Lapping process is applied as a machining method. The machining information is obtained from the measured motion errors by applying the algorithm, without any information on the rail profile. In the case of the single-side table, after 3 times of corrective remachining, linear and angular motion errors are improved up to 0.13 $\mu\textrm{m}$ and 1.40 arcsec from initial error of 1.04 $\mu\textrm{m}$ and 22.71 arcsec, respectively. In the case of the double-side table, linear and angular motion error are improved up to 0.07 /$\mu\textrm{m}$ and 1.42 arcsec from the initial error of 0.32 $\mu\textrm{m}$ and 4.14 arcsec. The practical machining process is performed by an unskilled person after he received a preliminary training in machining. Experimental results show that the corrective machining algorithm is very effective and easy to use to improve the accuracy of hydrostatic tables.

• 한국정밀공학회지
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• 제19권1호
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• pp.65-70
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• 2002

An analysis method for calculating motion accuarcy of double sides hydrostatic table is proposed in this paper. In this method, profiles of each rails are assumed as periodic function, therefore it is represented as the sum of spacial frequencies. Bearing clearance at any position rail is depended on the variation of linear, angular motion error of table and the form errors of both sides of a rail. Finite element method is applied to calculate pressure distributions in bearing clearance. In order to simplify the analyzing process, double sides table model is converted into equivalent single side table model. Results calculated by the proposed modeling method agree well with the results directly caculated by double sides modeling method, and also agree well with experimental results. From the theoretical and experimental analysis, it is verified that the proposed analysis method is very effective to analyze the motion accuracy of double sides hydrostatic table.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 1989년도 제10회 학술강연회초록집
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• pp.94-99
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• 1989

This paper analyzes file stiffness, damping coefficient, friction force and flow coefficient of externally pressurized oil journal beating, including the effect of journal rotation according to the Sommerfeld number. This paper assumed that the oil in the whole pocket has constant pressure, and that the oil in the whole bearing region has constant viscosity, temperature and density. Reynolds equation is derived from Nuvier - Stokes equation and continuity equation. And solved bearing pressure by ADI method for whole bearing region and fitted with out flow rate of pocket region. The model for numerical simulation is hydro - static oil journal bearing for high-speed, high-accuracy lathe spindle.

• International Journal of Precision Engineering and Manufacturing
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• 제4권2호
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• pp.57-63
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• 2003

A new method using a transfer function was proposed in the previous paper for analyzing motion errors of hydrostatic tables. The calculated motion errors by the new method, named as the transfer (unction method (TFM), were compared with the results by the conventional multi pad method, and the validity of the proposed method was theoretically verified. In this paper, the relationship between rail form error and motion errors of a hydrostatic table is examined theoretically in order to comprehand so-called 'the averaging effect of an oil film', and the characteristics of the motion errors in a hydrostatic table is tested. The tested hydrostatic table has three single-side pads in the vertical direction and three pairs of double-sides pads in the horizontal direction. The motion errors are tested for three rails which have different form errors. The experimental results are compared with the theoretical results calculated by the TFM, and both results show good agreement. From the results, it is shown that the TFM is very effective to analyze the motion errors of hydrostatic tables.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.188-192
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• 2000

An analysjs model for calculation the motion accuarcy of double sides hydrostatic table is proposed in thn paper. For the analysis of motion accuracy, profiles of each rails are assumed as periodic function, and represented using Fourier coefficients. Variahon of bearing clearance is represented as the vanation of linear, angular displacement of table and profiles of rails. Motion accuracy is calculated in the basis of finite element analysis on the pressure dutributmn of table. In order to improve calculating time in the analysis of motion accuracy, The proposed modeling method converts double sides table to single side table equivalently Results by the proposed method 1s compared with directly caculated results mdyhcally, and also compared wlth experimental results. From the theoretical and experimental analysis, it is confirmed that the proposed modeling mothod is very effective to analyze the motion accuracy of dauble sides hydrostatic table.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2010년 춘계학술대회논문집
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• pp.258-262
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• 2010

Since MEMS based micro actuators or generating devices showed high efficiency per volume, plenty of research are ongoing. Among them, MEMS based millimeter-scale micro gas turbine is one of the most powerful item for replacing chemical batteries. However, due to MEMS manufacturing technique, it is very difficult that makes wide turbine bearing area. It causes low DN number, so sufficient bearing force is hard to achieve. Thus, the most important issue on micro gas turbine is to design the proper bearing which can keep rotor stable during operation. In order to that, micro-scale gas-lubricated bearing is generally used. In this paper, basic feasibility study of thrust bearing of 10mm diameter turbine is described. Thrust bearing is hydrostatic gas-lubricated type. Numerical simulation is performed with ANSYS CFX 11.0 which is commercial numerical tool. Relationship between bearing inlet pressure and mass flow rate and bearing force is figured while changing bearing gap and number of capillaries. The simulation results will be used for further design of micro gas turbine.

• 한국정밀공학회지
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• 제29권2호
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• pp.139-146
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• 2012

A multi-tasking machine tool for large scale marine engine crankshafts has been developed together with design technologies for its special devices. Since work pieces, that is, crankshafts to be machined are big and heavy; weight of over 100 tons, length of 10 m long, and diameter of over 3.5 m, several special purpose core devices are necessarily developed such as PTD (Pin Turning Device) for machining eccentric pin parts, face place and steady rest for chucking and resting heavy work pieces. PTD is a unique special purpose device of open-and-close ring typed structure equipped with revolving ring spindle for machining eccentric pins apart from journal. In order to achieve high rigidity of the machine tool, structural design optimization using TMSA (Taguch Method based Sequential Algorithm) has been completed with FEM structural analysis, and a hydrostatic bearing system for the PTD has been developed with theoretical hydrostatic analysis.