• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.3
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• pp.230-234
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• 2009

Hydrogen and Oxygen plasma treatments have been done on sonochemical grow ZnO nanorods by varying treatment temperature and time, The changes(position and intensity) in ultraviolet(UV) peaks and green peaks of photoluminescence(PL) spectroscopy have been measured, Experimental results showed; i) in the case of hydrogen plasma treatment, the blue shift of UV peak and the increase of PL intensity of the UV peak were observed as the increase of the process time and temperature, ii) in the case of oxygen plasma treatment, the red shift of green peak was observed and the ratio of $I_{Green}/I_{UV}$ was also increased, as the increase of the process time and the temperature.

• 한국연소학회:학술대회논문집
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• 2013.06a
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• pp.99-101
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• 2013

The equivalence ratio is measured by LIBS(Laser-induced Breakdown spectroscopy) in hydrocarbon flame and high temperature (${\sim}3200^{\circ}C$) oxyhydrogen flame, where a stoichiometric mixture of hydrogen and oxygen is produced from water through electrolysis. The ratio of the hydrogen and oxygen (H/O) atomic lines intensities is used for quantitatively determining the quivalence ratio. laser energy is evaluated for determining the optimal condition for plasma diagnostics. The minimum laser energy for generating plasma in a laminar premixed hydrocarbon flame was about 70 mJ, whereas oxyhydrogen flame. consequently the irradiated spot of a lower density in high temperature oxyhydrogen flame gave rise to bigger plasma in size, thus limiting the spatial resolution of the LIBS measurement.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.249-249
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• 2010

The effect of forming a passivation layer was investigated in superconformal Cu gap-filling of the nano-scale trench with atomic-layer deposited (ALD)-Ru glue layer. It was discovered that the nucleation and growth of Cu during metal-organic chemical vapor deposition (MOCVD) were affected by hydrogen plasma treatments. Specifically, as the plasma pretreatment time increased, Cu nucleation was suppressed proportionally. XPS and Thermal Desorption Spectroscopy indicated that hydrogen atoms passivate the Ru surface, which leads to suppression of Cu nucleation owing to prevention of adsorption of Cu precursor molecules. For gap-fill property, sub 60-nm ALD Ru trenches without the plasma pretreatment was blocked by overgrown Cu after the Cu deposition. With the plasma pretreatment, superconformal gap filling of the nano-scale trenches was achieved due to the suppression of Cu nucleation near the entrances of the trenches. Even the plasma pretreatment with bottom bias leads to the superconformal gap-filling.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.563-566
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• 2002

We investigated to decrease the leakage current of SiNx film by employing $N_2$ plasma treatment. The insulator layers were prepared by two step process; the $N_2$ plasma treatment and then PECVD SiNx deposition with $SiH_4$, $N_2$ gases. To prove the influence of the $N_2$ plasma treatment, the Si substrate was exposed to the plasma, which was generated in Ne gas ambient. Without plasma treatment SiNx film grow at the rate of 7. 03 nm/min, has a refractive index n = 1.77 and hydrogen content of $2.16{\times}10^{22}cm^{-3}$ for $N_2/SiH_4$ gas flow ratio of 20. The obtained films were analyzed in terms of deposition rates, refractive index, hydrogen concentration, and electrical properties. By employing $N_2$ plasma treatment, interface traps such as mobile charges and injected charges were removed, hysteresis of capacitance-voltage (C-V) disappeared. We observed plasma treated sample were decreased the leakage current density reduces by 2 orders with respect to the sample having no plasma treatment.

• Journal of the Korean institute of surface engineering
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• v.40 no.6
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• pp.250-253
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• 2007

Plasma nitrocarburizing and plasma oxidizing treatments were performed to improve the wear and corrosion resistance of SKD 11 steel. Plasma nitrocarburizing was conducted for 12 h at $520^{\circ}C$ in the nitrogen, hydrogen and methane atmosphere to produce the $\varepsilon-Fe_{2-3}(N,C)$ phase. It was found that the compound layer produced by plasma nitrocarburising was predominantly composed of $\varepsilon-phase$, with a small proportion of $\gamma'-Fe_4(N,C)$ phase. The thickness of the compound layer was about $5{\mu}m$ and the diffusion layer was about $150{\mu}m$ in thickness, respectively. Plasma post oxidation was performed on the nitrocarburized samples with various oxygen/hydrogen ratio at constant temperature of $500^{\circ}C$ for 1 hour. The very thin magnetite($Fe_3O_4$) layer $1-2{\mu}m$ in thickness on top of the compound layer was obtained by plasma post oxidation. It was confirmed that the corrosion characteristics of the nitrocarburized compound layer could be further improved by the application of the superficial magnetite layer.

• Korean Journal of Materials Research
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• v.3 no.6
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• pp.565-574
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• 1993

The Ar/Ar- $H_{2}$ plasma method Lvas applied to reduce and refine high purity Nb metal. Inaddition, the reaction between molten Nb metal and hydrogen were also analyzed in the Ar-(20%)$H_{2}$plasma. The metallic Nb of 99.5wt% was obtained at the ratio of $C/Nb_{2}O_{5}$=5.00 in the Ar plasma reductionand the $O_2$ loss from the thermal decomposition of niobium oxides did not take place. In the Ar-(20%)Hi plasma the metallic Nb of 99.8wt% was produced at the ratio of $C/Nb_{2}O_{5}$=4.80. It was observedthat a major reaction of the deoxidation was the reaction with H, Hi, and a deoxidation by the evaporationof $NbO_x$ did not occur but a mass loss of Nb did by a "splash" effect. The deoxidation reaction rateobeyed the 1st order reaction kinetics and the reaction rate constant(k') of deoxidation was $7.8 \times 10_{-7}$(m/sec).The solubility of hydrogen in Nb metal was 60ppm and it was larger than the solubility of molecularstate hydrogen by 40ppm in the Ar-(20%)$H_{2}$ plasma method. A saturation was within 60sec anda hydrogen content was reduced below lOppm by a Ar plasma re-treatment.by a Ar plasma re-treatment.

• Journal of Korea Foundry Society
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• v.15 no.2
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• pp.175-183
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• 1995

It is difficult to remove such interstitial impurities as sulfur, oxygen, hydrogen and carbon in Fe-Ni alloys. Thermodynamic and kinetic studies were carried out on the behavior of hydrogen gas, oxygen gas, Si, Al and slag, and the reaction time by the $Ar/Ar-H_2$ plasma and electron beam melting. After the addition of Al, Si, they were melted by Ar plasma with reaction time changed. 80%Ni-Fe alloys showed a better deoxidation than 36%Ni-Fe alloys. At $Ar-H_2$ plasma melting, the deoxidation was significant. In the case of the electron beam melting, the residual oxygen was higher than in Ar plasma melting because electron beam melting temperature was lower than that of Ar plasma. For the decaburization, it was melted by $Ar-O_2$ plasma melting, which could remove effectively carbon by activated oxygen in plasma. We added slag to Fe-Ni alloys for the desulfurization. As the result of this experiments, the amount of residual sulfur was not changed according to the slag ratio and reaction time.

• Journal of the Korean Institute of Gas
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• v.5 no.1
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• pp.15-20
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• 2001

The microwave plasma and catalytic reaction have been employed to investigate the activation of methane to hydrogen and higher hydrocarbons at low gas temperature. The catalytic activity of Fe, Ni, Pt Pd metal catalysts were also studied in this reaction system. With increasing plasma power at a $CH_{4}$ flow rate of 20 ml/min, C2+ products increased from 29 to $42\%$, whereas hydrogen from 60 to $65\%$. When catalysts were loaded below the plasma region, the selectivitity of ethylene md acetylene increased but the yield of C2+ products remained constant. The usage of ECR electric fie3d and Pd-Ni bimetal catalyst produced a minimum C2+ yield of $64\%$.

• Journal of the Korean institute of surface engineering
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• v.29 no.6
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• pp.695-702
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• 1996

Plasma spraying process was employed to produce HA coating on Ti6A14V alloy for the development of a dental implant. The goal of this research was to find optimum spraying conditions for HA coating on Ti6Al4V. This study was thus designed carefully to evaluate how spraying parameters affect various physical properties of a HA coating layer, such as phase composition and bond strength. In plasma spraying, spraying parameters such as hydrogen flow rates and spraying distances were varied systematically to change the degree of the melting of starting HA powder in plasma jet. It was revealed that the deposition efficiency increased with increasing a hydrogen flow rate, and the bond strength between the HA-coated layer and Ti-alloy substrate increased with hydrogen flow rate, but decreased with spraying distance. Therefore, the hydrogen flow rate and the spraying distance should be carefully controlled to obtain the reasonable bond strength simultaneously.

• Journal of Powder Materials
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• v.14 no.1 s.60
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• pp.63-69
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• 2007

The present study was focused on the synthesis of a zirconium-based alloyed nanopowder by the plasma arc discharge process. The chemical composition, phase structure, particle size and hydrogen sorption property of the synthesized powders under various synthesis conditions were analyzed using XRF, XRD, SEM, XPS and the ASTM-F798 method. The chemical composition of the synthesized Zr-V-Fe-based powders approached that of the raw material with an increasing hydrogen fraction in the powder synthesis atmosphere. The synthesized $Zr_{55}V_{29}Fe_{16}$ powder consist of a mixed phase structure of the $Zr,\;ZrH_2,\;FeV\;and\;Zr(V_{1-x}Fe_{x})_2$ phases. This powder has an average particle size of about 20 nm. The synthesized $Zr_{55}V_{29}Fe_{16}$ nanopowder showed getter characteristics, even though it had a lower hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder. However, the synthesized Zr nanopowder with an average particle size of 20 nm showed higher hydrogen sorption speed than the $Zr_{57}\;V{36}\;Fe_7$ getter powder.