• 제목/요약/키워드: Hydrogen Plasma

검색결과 568건 처리시간 0.028초

불소 도핑 이산화주석 박막의 수소플라즈마 내구성 (HYDROGEN PLASMA DURABILITY OF $SnO_2$:F FILMS)

  • 윤경훈;송진수;강기환
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 B
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    • pp.847-849
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    • 1992
  • Fluorine-doped ($SnO_2$:F) thin films obtained by pyrosol deposition method have been exposed to R.F. excited pure hydrogen plasma under the following conditions; substrate temperature of 200$^{\circ}C$, $H_2$ pressure of 1 Torr, R.F. input power of 50 mW/$\textrm{cm}^{2}$, $H_2$ flow rate of 30cc/min and exposure time of 15-600 seconds. It is found that the sheet resistance of the films remains unchanged or rather slightly reduces for initial exposure time of 30-60 seconds, but increases sharply with further increasing the exposure time. The optical transmittance of $SnO_2$:F films slows a rapid fall with increasing exposure time except for a film obtained with a solution having $CH_3OH/H_2O$ mol ratio of 2.65, its degradations at the exposure time of 30-60 seconds are about 7-15%. In addition, the exposure of the films to hydrogen plasma atmosphere leads to remarkable changes in the microstructure and chemical composition, which should be attributed to the reduction of $SnO_2$ to SnO and to elemental Sn.

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아크성 스트리머방전을 이용한 플라즈마 반응기의 수소발생 특성 (The characteristic of Hydrogen generation by Plasma reactor using arc like streamer discharge)

  • 김종석;박재윤;정장근;한상보;고희석;박상현;이현우
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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    • pp.2109-2111
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    • 2005
  • The effect of arc like streamer discharge is investigated on the hydrogen generation in the plasma reactor with multineedle - plate electrode geometry and SDR (Plasma reactor using the surface discharge). An additive of the two type (the saw type and the pellet type) was placed under the water surface to investigate the effect of the water surface conditions. The experimental results are compared in case of the reactor with and without an additive on the water surface. The generation of arc streamer discharge is more powerful with increasing applied voltage in the saw type. The maximum hydrogen Production concentration is about 4300 ppm at 74W in the SDR with additive of the saw type. Also, the Energy yield of the SDR (28990 g/kWh, 4300ppm, 74W) is higher than of the multineedle - plate electrode geometry (20892g/kWh, 3300ppm, 77W).

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Analysis on an Oxidation-Reduction Reaction of Photocatalytic Plasma Complex Module

  • KIM, Young-Do;KWON, Woo-Taeg
    • 웰빙융합연구
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    • 제5권2호
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    • pp.21-27
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    • 2022
  • Purpose: This study is about photocatalytic technology and plasma oxidation-reduction technology. To the main cause of exposure to odor pollution, two deodorization techniques were applied to develop a module with higher removal efficiency and ozone reduction effect. Research design, data and methodology: A composite module was constructed by arranging two types of dry deodorization equipment (catalyst, adsorbent) in one module. This method was designed to increase the responsiveness to the components of complex odors and the environment. standard, unity, two types of oxidizing photo-catalyst technology and plasma dry deodorization device installed in one module to increase the potential by reduction to 76% of ozone, 100%, and 82%. Results: The complex odor disposal efficiency was 92%. Ammonia was processed with 50% hydrogen sulfide and 100% hydrogen sulfide, and ozone was 0.01ppm, achieving a target value of 0.07ppm or less. The combined odor showed a disposal efficiency of 93%, ammonia was 82% and hydrogen sulfide was 100% processed, and ozone achieved a target value of 0.07 ppm or less. Conclusions: Ozone removal efficiency was 76% by increasing Oxidation-Reduction Reaction(ORR). The H2S removal efficiency of the deodorizer was higher than that of the biofilter system currently used in sewage disposal plants.

Formation of a thin nitrided GaAs layer

  • Park, Y.J.;Kim, S.I.;Kim, E.K.;Han, I.K.;Min, S.K.;O'Keeffe, P.;Mutoh, H.;Hirose, S.;Hara, K.;Munekata, H.;Kukimoto, H.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 1996년도 제11회 학술발표회 논문개요집
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    • pp.40-41
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    • 1996
  • Nitridation technique has been receiving much attention for the formation of a thin nitrided buffer layer on which high quality nitride films can be formedl. Particularly, gallium nitride (GaN) has been considered as a promising material for blue-and ultraviolet-emitting devices. It can also be used for in situ formed and stable passivation layers for selective growth of $GaAs_2$. In this work, formation of a thin nitrided layer is investigated. Nitrogen electron cyclotron resonance(ECR)-plasma is employed for the formation of thin nitrided layer. The plasma source used in this work is a compact ECR plasma gun3 which is specifically designed to enhance control, and to provide in-situ monitoring of plasma parameters during plasma-assisted processing. Microwave power of 100-200 W was used to excite the plasma which was emitted from an orifice of 25 rnm in diameter. The substrate were positioned 15 em away from the orifice of plasma source. Prior to nitridation is performed, the surface of n-type (001)GaAs was exposed to hydrogen plasma for 20 min at $300{\;}^{\circ}C$ in order to eliminate a native oxide formed on GaAs surface. Change from ring to streak in RHEED pattern can be obtained through the irradiation of hydrogen plasma, indicating a clean surface. Nitridation was carried out for 5-40 min at $RT-600{\;}^{\circ}C$ in a ECR plasma-assisted molecular beam epitaxy system. Typical chamber pressure was $7.5{\times}lO^{-4}$ Torr during the nitridations at $N_2$ flow rate of 10 seem.(omitted)mitted)

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Characteristics of Bovine Teeth Whitening in Accordance with Gas Environments of Atmospheric Pressure Nonthermal Plasma Jet

  • Sim, Geon Bo;Kim, Yong Hee;Kwon, Jae Sung;Park, Daehoon;Hong, Seok Jun;Kim, Young Seok;Lee, Jae Lyun;Lee, Gwang Jin;Lim, Hwan Uk;Kim, Kyung Nam;Jung, Gye Dong;Choi, Eun Ha
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.250.2-250.2
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    • 2014
  • Currently, teeth whitening method which is applicable to dental surgery is that physician expertises give medical treatment to teeth directly dealed with a high concentration of hydrogen peroxide and carbamide peroxide. If hydrogen peroxide concentration is too high for treatment of maximized teeth whitening effect [1], it is harmful to the human body [2]. To the maximum effective and no harmful teeth whitening effect in a short period of time at home, we have observed the whitening effect using carbamide peroxide (15%) and a low-temperature atmospheric pressure plasma jet which is regulated by the Food and Drug Administration. The gas supplied conditions of the non-thermal atmospheric pressure plasma jet was with the humidified (0.6%) gas in nitrogen or air at gas flow rate of 1000 sccm. Also, the measurement of chemical species from the jet was carried out using the optical emission spectroscopy (OES), the evidence of increased reactive oxygen species compared to non-humidified plasma jet. We have found that the whitening effect of the plasma is very excellent through this experiment, when bovine teeth are treated in carbamide peroxide (15%) and water vapor (0.2 to 1%). The brightness of whitening teeth was increased up to 2 times longer in the CIE chromaticity coordinates. The colorimetric spectrometer (CM-3500d) can measure color degree of whitening effect.

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알루미늄 합금의 레이저 용접시 유기하는 플라즈마의 스펙트럼 분석 (Spectral Analyses of Plasma Induced by Laser Welding of Aluminum Alloys)

  • 김종도;최영국;김영식
    • 한국해양공학회:학술대회논문집
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    • 한국해양공학회 2001년도 추계학술대회 논문집
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    • pp.292-300
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    • 2001
  • The paper describes spectroscopic characteristics of plasma induces in the pulsed YAG laser welding of alloys containing a large amount of volatile elements. The authors have conducted the spectroscopic analyses of laser induced Al-Mg alloys plasma in the air and argon atmosphere. In the air environment, the identified spectra were atomic lines of Al, Mg, Cr, Mn, Cu, Fe and Zn, and singly ionized Mg lines, as well as the intense molecular spectra of A10 and Mg0 formed by chemical reactions of evaporated Al and Mg atoms from the pool surface with oxygen in the air. In argon atmosphere, Mg0 and AI0 spectra vanished, but AIH spectrum was detected. The hydrogen source was presumably hydrogen dissolved in the base metals, water absorbed on the surface oxide layer, or $H_2$ and $H_2O$ in the shielding gas. The resonant 1ines of Al and Mg were strongly self-absorbed, in particular, self-absorption of the Mg 1ine was predominant. These results show that the laser induced plasma was made of metal1ic vapor with relatively low temperature and high density.

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플라즈마를 이용한 LPG연료 개질 특성연구 (Characteristics of LPG Fuel Reforming using Plasma Technology)

  • 김창업
    • 한국수소및신에너지학회논문집
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    • 제26권1호
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    • pp.1-7
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    • 2015
  • In this study, characteristics of reforming process of automotive liquefied petroleum gas (LPG) fuel using plasma reactor are investigated. Because plasma reformer technology has advantages of a fast start-up and wide fuel/oxidizer ratio of operation, and reactor size is smaller and more simple compared to typical combustor and catalytic reactor, plasma reforming is suitable to the on-board vehicle reformer. To evaluate the characteristics of the reforming process, parametric effect of $O_2/C$ ratios, reactant flow rate and metal form on the process were investigated. In the test of varying $O_2/C$ ratio from partial oxidation to stoichiometry combustion, conversion of LPG was increased but selectivity of $H_2$ decreased. The optimum condition of $O_2/C$ ratio for the highest $H_2$ yield was determined to be around 1.0 for 20~50 lpm, and 1.35 for 100 lpm. Specific energy density (SED) was major factor in reforming process and higher SED leads to higher $H_2$ yield. And metal form in the reformer increased $H_2$ yield of about 34 % as compared to the case of no metal form. The result can be a guide to map optimal condition of reforming process.

Synthesis of nano-crystalline Si films on polymer and glass by ICP-assisted RF magnetron sputtering

  • Shin, Kyung-S.;Choi, Yoon-S.;Choi, In-S.;Han, Jeon-G.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.203-203
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    • 2010
  • Nano-crystalline Si thin films were deposited on polymer and glass by inductively coupled plasma (ICP) - assisted RF magnetron sputtering at low temperature in an argon and hydrogen atmosphere. Internal ICP coil was installed to increase hydrogen atoms dissociated by the induced magnetic field near the inlet of the working gases. The microstructure of deposited films was investigated with XRD, Raman spectroscopy and TEM. The crystalline volume fraction of the deposited films on polymer was about 70% at magnetron RF power of 600W and ICP RF power of 500W. Crystalline volume fraction was decreased slightly with increasing magnetron RF power due to thermal damage by ion bombardment. The diffraction peak consists of two peaks at $28.18^{\circ}$ and $47.10^{\circ}\;2{\theta}$ at magnetron RF power of 600W and ICP RF power of 500W, which correspond to the (111), (220) planes of crystalline Si, respectively. As magnetron power increase, (220) peak disappeared and a dominant diffraction plane was (111). In case of deposited films on glass, the diffraction peak consists of three peaks, which correspond to the (111), (220) and (311). As the substrate temperature increase, dominant diffraction plane was (220) and the thickness of incubation (amorphous) layer was decreased.

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진공 열 플라즈마 용사공정을 통한 NiTiZrSiSn 벌크 비정질 코팅 형성 (Vacuum Plasma Sprayed NiTiZrSiSn Coating)

  • 윤상훈;김준섭;김수기;이창희
    • Journal of Welding and Joining
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    • 제25권4호
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    • pp.42-48
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    • 2007
  • An inert gas atomized NiTiZrSiSn bulk metallic glass feedstock was sprayed onto the copper plate using vacuum plasma spraying process. In order to change the in-flight particle energy, that is, thermal energy, the hydrogen gas flow rate in plasma gas mixture was increased at the constant flow rate of argon gas. Coating and single pass spraying bead were produced with the least feeding rate. Regardless of the plasma gas composition, fully melted through unmelted particle could be observed on the overlay coating. However, the frequency of the unmelted particle number density was increased with the decrease of the hydrogen gas flow rate. The amorphous phase fraction within coating was also affected by the number density of the unmelted particle.

혈액과 조직의 $CO_2$완충능 및 세포막을 통한 $H^+$농도 경사 ($CO_2$ Buffering and Hydrogen Ion Concentration Gradient across Cell Membrane in Acute Acid-Base Disturbances in Dogs)

  • 황상익;박영배;민병구;김우겸
    • The Korean Journal of Physiology
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    • 제17권2호
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    • pp.119-124
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    • 1983
  • The in vivo and in vitro buffer capacities of true plasma and tissue buffer capaciies were compared on dogs. Intracellular pH was determined on skeletal muscle by a modification of the method of Schloerb and Grantham using $C^{14}$ DMO. The in vivo curve for plasma or extracellular fluid has a much lower slope than the in vitro curve. The in vivo slope of skeletal muscle in the dog is approximately 20 sl. The slope for skeletal muscle in vivo falls between the in vitro and in vivo slopes of true plasma. It appears that intracellular hydrogen ion varies linearly with extracellular hydrogen ion when $CO_2$ tension is changed. Both hydrogen ion gradient and Hi/He ratio vary in skeletal muscle, with an increase in $CO_2$ tension. Infusion of 0.3N HCl gave two distinct patterns, the $H_i-H_e$ gradient decreased; and it would appear that very little hydrogen ion as such penetrated to the inside of the cells during the time of observation. Although lactic acid presumably enters the cell and the same of larger load was given as was used for hydrochloric acid, only very mild intracellular acidosis resulted, ostensibly due to metabolism of this substrate. Gluconic acid produced a more severe acidosis, both intracellularly and extracellularly, but with both of these acids the hydrogen ion gradient decreased and the $H_i/H_e$ ratio also decreased. The experiments on the dogs with hemorrhagic shock the hydrogen ion increase producing the acidosis originates inside the cells. Even so, the hydrogen ion gradient increased only very slightly in the acute experiments. This may suggest that even over short intervals of time skeletal muscle cells have a capacity to pump out hydrogen ions at a rate which maintains approximately the normal $H_i/H_e$ gradient when the source of the hydrogen ion is in the interior of the cell.

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