• 한국표면공학회지
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• 제44권6호
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• pp.269-276
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• 2011

Phase evolution and tribological behavior of Cr-Mo-N multi compositional films with different interlayer were investigated. The films were deposited by hybrid PVD (Physical Vapor Deposition) system consisted of dc unbalanced magnetron (UBM) sputtering and arc ion plating (AIP) sources. A pure molybdenum (Mo) was used as sputtering target and also a pure Cr was used as AIP target to form the Cr-Mo-N films. Various growth planes were found, no textured surface, in all of the multi composition films. Maximum value of microhardness was measured in Cr-Mo-N film with Mo interlayer as 29 GPa. Composition film was mainly showed the aspect of the adhesive wear than CrN film. The friction coefficient was decreased from 0.6 for pure CrN coating to 0.35 for Cr-Mo-N film with Mo interlayer. This result may come from the formation of metal oxide tribo-layer which is known as solid lubricant during the wear test.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2014년도 추계학술대회 논문집
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• pp.304-304
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• 2014

Quaternary Ti-Al-Si-N films were deposited on WC-Co substrates by a hybrid deposition system of arc ion plating (AIP) method for Ti-Al source and DC magnetron sputtering technique for Si incorporation. The synthesized Ti-Al-Si-N films were revealed to be composites of solid-solution (Ti,Al)N crystallites and amorphous $Si_3N_4$ by instrumental analyses. The Si addition in Ti-Al-N films affected the refinement and uniform distribution of crystallites by percolation phenomenon of amorphous silicon nitride, similarly to Si effect in TiN film. As the Si content increased up to about 9 at.%, the hardness of Ti-Al-N film steeply increased from 30 GPa to about 50 GPa. The highest microhardness value (~50 GPa) was obtained from the Ti-Al-Si-N film having the Si content of 9 at.%, the microstructure of which was characterized by a nanocomposite of $nc-(Ti,Al)N/a-Si_3N_4$.

• 한국고분자학회:학술대회논문집
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• 한국고분자학회 2006년도 IUPAC International Symposium on Advanced Polymers for Emerging Technologies
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• pp.309-309
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• 2006

Latest developments on hybrid nanostructured materials fabricated by applying self-assembly strategies on organic/inorganic nanotemplates are discussed. Within this frame, numerous functional nanomaterials including arrays of composite metal/semiconductor nanoparticles, planar waveguides and functional multilayer thin films are generated using self-assembled polymers as templates or building blocks. In particular, surface plasmon resonance based optical sensing is employed to investigate nanofabrication processes occurring in nanoscale dimention. We also suggest unprecedented pathways to hybrid supramolecular multilayer nanoarchitectures in 1D or 2D geometry via layer-by-layer self-assembly.

• Macromolecular Research
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• 제12권3호
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• pp.290-292
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• 2004

Multimode channel waveguides were fabricated using a direct UV patterning technology from thick films deposited by the one-step dip-coating of an organic/inorganic hybrid material (ORMOCER(equation omitted). The core size of the covered ridge waveguide was 43${\times}$51 $\mu\textrm{m}$$^2$; the waveguides can be readily prepared for multimode applications by direct UV patterning. The waveguides exhibited smooth surface profiles and a low optical loss of 0.07 ㏈/cm at the most important wavelength (850nm) used for optical interconnects.

• Bulletin of the Korean Chemical Society
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• 제35권9호
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• pp.2689-2693
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• 2014

The control over microstructure in block copolymer thin films using external electric fields has become an interesting research topic. In this article, the effect of nanoparticle on the microdomain alignments in block copolymer (polystyrene-b-poly(2-vinylpyridine)/nanoparticle (Au) thin films under electric fields has been examined with transmission electron microscopy. The homogeneous dispersion of Au nanoparticles into the block copolymer matrix was achieved by surface modification of nanoparticles with compatible ligands. Compared with the phenomenon seen in the pristine block copolymer thin films, a peculiar alignment behavior was observed in the block copolymer/nanoparticle hybrid thin films under electric fields. In addition, the different pathways observed in the pristine and nanoparticle incorporated block copolymer thin films were also monitored as a function of exposure time. This work can provide the fundamental information for understanding microdomain alignment in block copolymer/nanoparticle thin films under external electric fields.

• Korean Chemical Engineering Research
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• 제49권3호
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• pp.277-284
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• 2011

본 연구에서는 알루미나 졸과 아크릴레이트 단량체를 이용하여 UV 경화형 유-무기 하이브리드 하드코팅 용액을 제조하였다. Aluminum isopropoxide로부터 얻어진 알루미나 졸에 실란커플링제인 methacryloxypropyl trimethoxysilane(MPTMS)을 첨가하여 제조된 졸을 무기물 성분으로 사용하였다. 유기물 성분으로는 다양한 아크릴레이트 단량체인 pentaerythritol triacrylate(PETA), 1,6-hexanediol diacrylate(HDDA), dipentaerythritol hexaacrylate(DPEHA)를 혼합하여 사용하였다. 이후 무기물 성분과 유기물 성분을 혼합하여 유-무기 하이브리드 코팅 용액을 제조한 후, 이를 polycarbonate 기판 위에 스핀 코팅 후 UV 경화를 실시하여 도막을 형성하였다. 이때 무기물 성분 중의 MPTMS의 첨가량과 UV 경화 시간 변화가 코팅 막의 물성에 미치는 영향을 연구하였다. 그 결과 MPTMS가 0.20 mole 첨가 될 경우 코팅 막은 3H의 우수한 연필경도를 나타내었으며 haze값이 2%로 내마모성도 우수하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.136.1-136.1
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• 2015

In the present study, UHF (320 MHz) in combination with RF (13.56 MHz) plasmas was used for the synthesis of hydrogenated silicon nitride (SiNx:H) films by PECVD process at low temperature. RF/UHF hybrid plasmas were maintained at a fixed pressure of 410 mTorr in the N2/SiH4 and N2/SiH4/NH3 atmospheres. To investigate the radical generation and plasma formation and their control for the growth of the film, plasma diagnostic tools like vacuum ultraviolet absorption spectroscopy (VUVAS), optical emission spectroscopy (OES), and RF compensated Langmuir probe (LP) were utilized. Utilization of RF/UHF hybrid plasmas enables very high plasma densities ~ 1011 cm-3 with low electron temperature. Measurements using VUVAS reveal the UHF source is quite effective in the dissociation of the N2 gas to generate more active atomic N. It results in the enhancement of the Si-N bond concentration in the film. Consequently, the deposition rate has been significantly improved up to 2nm/s for the high rate synthesis of highly transparent (up to 90 %) SiNx:H film. The films properties such as optical transmittance and chemical composition are investigated using different analysis tools.

• Korean Chemical Engineering Research
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• 제49권5호
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• pp.535-540
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• 2011

금속염인 lanthanum nitrate를 증류수에 용해시킨 후 실란커플링제인 ${\gamma}$-glycidyloxypropyl trimethoxysilane과 금속산화물인 colloidal silica를 이 용액에 첨가하여 sol-gel법에 의해 유-무기 혼성 용액을 제조하였다. 또한 spiropyran계 광변색 염료를 용매인 tetrahydrofuran에 용해시킨 후 앞서 제조한 혼성 용액과 혼합하여 광 변색 코팅 용액을 제조하였다. 그 후 기재인 polycarbonate 시트에 코팅시키고 열 경화시켜 광 변색성을 갖는 하드 코팅 막을 제조하였다. 이 과정 중 colloidal silica의 첨가량이 코팅 막의 광변색 특성에 미치는 영향을 조사하였다. Colloidal silica의 첨가량이 증가할수록 코팅 막의 소색속도가 빨라졌으며 연필경도가 증가하였다.

• 한국정보통신학회:학술대회논문집
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• 한국해양정보통신학회 2002년도 추계종합학술대회
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• pp.477-480
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• 2002

ULSI(ultra large scaled integrated circuits)의 고집적화와 고속화를 위한 다층 배선 기술 중에서 층간 절연막의 특성을 향상시켜주는 것은 매우 중요한 요소이다. 소자의 소형화에 따른 절연층의 용량에 의한 신호의 지연을 방지하고 금속배선간의 상호간섭을 막아주기 위해서 현재 요구되는 0.13$\mu\textrm{m}$급 소자의 경우에서는 유전율이 매우 낮은 k$\leq$2.0인 층간 절연막이 필요하게 된다. 이러한 차세대 반도체 소자의 층간 절연물질로서 사용될 유력한 저유전 물질로 Nanoporous silica(k=1.3~2.5)를 적용하려는 연구가 진행되고 있다(1)-(3). 그러한 물질 중에 하나가 organosilicate films이 있는데 carbon-doped oxides, silicon-oxicarbides, carbon-incorporated silicon oxide film, organic-inorganic hybrid type Si-O-C thin films 혹은 organic-inorganic hybrid silica materials 등으로 불린다. 이에 본 연구에서는 nano-pore를 갖는 유무기 하이브리드 구조의 저유전 박막을 BTMSM/O$_2$의 혼합된 precursor를 사용하여 ICPCVD 방법에 의해 형성하였다. 총 유량을 20sccm이 되도록 하여 $O_2$:BTMSM(Ar)의 유량비를 변화시키며, 작업진공도는 300mTorr였다. 기판은 가열하지 않고, p-type Si(100) 위에 Si-O-C-H 박막을 형성하였다. 열적안정성을 조사하기 위하여 30$0^{\circ}C$, 40$0^{\circ}C$, 50$0^{\circ}C$에서 30분간 열처리하여 비교 분석하였다. 형성된 박막의 특성은 XPS로 분석하여 유전상수와의 상관관계를 조사하였다.

• Carbon letters
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• 제14권2호
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• pp.105-109
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• 2013

Effects of the amount of nickel powder (Ni) in Ni-carbon fiber (CF) hybrid filler systems on the conductivity(or resistivity) and thermal coefficient of resistance (TCR) of filled high density polyethylene were studied. Increases of the resistivity and TCR with increasing Ni concentration at a given hybrid filler content were observed. Using the fiber contact model, we showed that the main role of Ni in the hybrid filler system is to decrease the interfiber contact resistance when Ni concentration is less than the threshold point. The formation of structural defects leading to reduced reinforcing effect resulted in both a reduction of strength and an increase of the coefficient of thermal expansion in the composite film; these changes are responsible for the increases of both resistivity and TCR with increasing Ni concentration in the hybrid filler system.