• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.252-255
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• 2004

반도체는 high integrated, high speed, low power를 위하여 design 뿐만 아니라 재료 측면에서도 많은 변화를 가져오고 있으며, RC delay time을 줄이기 위하여 Al 배선보다 비저항이 낮은 Cu와 low-k material 적용이 그 대표적인 예이다. 그러나, Cu 배선의 경우 dry etching이 어려우므로, 기존의 공정으로는 그 한계를 가지므로 damascene 또는 dual damascene 공정이 소개, 적용되고 있다. Damascene 공정은 절연막에 photo와 RIE 공정을 이용하여 trench를 형성시킨 후 electrochemical plating 공정을 이용하여 trench에 Cu를 filling 시킨다. 이후 CMP 공정을 이용하여 절연막 위의 Cu와 barrier material을 제거함으로서 Cu 배선을 형성하게 된다. Dual damascene 공정은 trench와 via를 동시에 형성시키는 기술로 현재 대부분의 Cu 배선 공정에 적용되고 있다. Cu CMP는 기존의 metal CMP와 마찬가지로 oxidizer를 이용한 Cu film의 화학반응과 연마 입자의 기계가공이 기본 메커니즘이다. Cu CMP에서 backside pressure 영향이 uniformity에 미치는 영향을 살펴보았으며, electrochemical plating 공정에서 발생하는 hump가 CMP 결과에 미치는 영향과 dishing 결과를 통하여 그 영향을 평가하였다.

• Archives of Plastic Surgery
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• v.37 no.4
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• pp.499-530
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• 2010

Purpose: Lateral osteotomy is an essential step in the correction of nasal bony asymmetry. Direct visualization allows accurate repositioning of the nasal bones compared to blind techniques, which require precision and manual dexterity. We propose direct visualization procedures in open corrective rhinoplasty. Methods: The technique was used on 16 patients. All patients underwent open rhinoplasty with a columellar incision. The marginal incisions were extended on either side to allow access to the piriform aperture. A double hook was used to caudally retract the lower lateral cartilages and the fibrous connections between the upper and lower lateral cartilages were released until the piriform aperture was visualized. Through the incision, lateral osteotomy was performed using a reciprocating saw at that time with direct visualization. Additional procedures including augmentation rhinoplasty, hump resection, septoplasty and tip plasty were performed simultaneously. Results: This method provided excellent exposure to the lateral nasal bones and allowed the lateral osteotomy to be carried out precisely using the reciprocating saw. Conclusion: This extended open rhinoplasty method is suitable for most individuals, allowing a wide surgical field.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.243.1-243.1
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• 2013

본 연구에서는 산소 분압과 열처리 온도에 따른 ITZO 박막 트랜지스터의 전기적 특성 향상을 목적으로 실험을 진행하였다. 1) ITZO 박막 증착 시 산소 분압 가변($O_2/(Ar+O_2)$ 30~40%), 열처리 온도 고정($350^{\circ}C$)과 2) ITZO 박막 증착 시 산소 분압 고정(30%), 열처리 온도($200{\sim}400^{\circ}C$)를 가변하여 실험을 진행하였다. 두 실험 모두 특성향상을 위해 산소 분위기에서 열처리를 진행하였다. 산소의 분압이 증가할수록 산소 빈자리를 채우면서 전자 농도가 감소하여 채널 전도 효과가 줄어들면서 Hump 현상이 발생하였고, 스윙이 증가, 문턱 전압이 음의 방향으로 이동하였다. 이에 $O_2/(Ar+O_2)$)의 30%에서 30%일때, 문턱전압은 1.98 V, 전계 효과 이동도는 28.97 $cm2/V{\cdot}s$, sub-threshold swing은 280 mv/dec, on-off 비율은 ~107로 가장 우수한 전기적 특성을 보였다. 또한 열처리 온도 가변 시 $400^{\circ}C$에서 전계 효과 이동도는 28.97 $cm^2/V{\cdot}s$로 $200^{\circ}C$의 전계 효과 이동도는 11.59 $cm^2/V{\cdot}s$에 비해 약 3배 증가하였고, 소자의 스위칭 척도인 sub-threshold swing은 약 180 mv/dec 감소하였다. 문턱 전압은 0.97V, on-off ratio는 약 107을 보였다. 동일한 산소 분압의 분위기에서 $400^{\circ}C$ 열처리 시 가장 우수한 전기적 특성을 보였고, 저온 공정으로 인한 플렉서블 디스플레이 투명 디스플레이 적용 가능성을 확인하였다.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.21 no.5
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• pp.700-712
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• 1997

The flowfield generated by a 2-D rotating cylinder on a plane moving at freestream velocity was experimentally investigated in a wind tunnel to simulate aerodynamic characteristics of rotating wheels of an automobile. In the flowfield around a rotating cylinder at 3*10$^{3}$ < Re$_{d}$<8*10$^{3}$, unique mean flow and turbulence characteristics were confirmed by hot-wire measurements as well as frequency analysis, which was supported by flow visualization. In the vicinity of a rotating cylinder, a unique turbulence structure on .root.over bar u'$^{2}$ profiles was formed in hump-like shape at 1 < y/d < 3. A peak frequency which characterized the effect of a rotating cylinder had the same value of the rotation rate of a cylinder. In case of cylinder rotation, the depths of mean velocity -defect and turbulent-shear regions were thickened by 20-40% at 0 < x/d < 10 compared with the case of cylinder stationary. Far downstream beyond x/d > 10, the flowfield generated by a rotating cylinder showed self-similarity in the profiles of mean velocity and turbulence quantities. The effect of a rotating cylinder was independent of its rotation rate and Reynolds number in the measurement range.

• Journal of Korea Planning Association
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• v.53 no.7
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• pp.49-66
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• 2018

The purpose of this study is to analyze neighborhood environmental factors affecting bicycle accidents and accidental severity in Seoul, Korea. The use of bicycles has increased rapidly as daily transportation means in recent years. As a result, bicycle accidents are also steadily increasing. Using Traffic Accident Analysis System (TAAS) data from 2015 to 2017, this study uses negative binomial regression analysis to identify neighborhood environmental factors affecting bicycle accidents and accidential severity. The main results are as follows. First, bicycle accidents are more likely to occur in commercial and mixed land use areas where pedestrians, bicycle and vehicles are moving together. Second, bicycle accidents are positively associated with road structures such as four-way intersection. In contrast, three-way intersection is negatively associated with serious bicycle accidents. The density of speed hump or street tree is negatively associated with bicycle accidents and accidential severity. This finding indicates the effect of speed limit or street trees on bicycle safety. Fourth, bicycle infrastructures are also important factors affecting bicycle accidents and accidential severity. Bicycle-exclusive roads or bicycle-pedestrian mixed roads are positively associated with bicycle accidents and accidential severity. Finally, this study suggests policy implications to improve bicycle safety.

• International Journal of Naval Architecture and Ocean Engineering
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• v.12 no.1
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• pp.38-47
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• 2020

The partial air cushion supported catamaran (PACSCAT) is a novel Surface Effect Ship (SES) and possesses distinctive resistance performance due to the presence of planing bottom. In this paper, the design of PACSCAT and air cushion system are described in detail. Model tests were carried out for Froude numbers ranging from 0.1 to 1.11, the focus is on the influence of air cushion system on resistance characteristics. Drag-reducing effect of air cushion system was proved by means of contrast tests in cuhionborne and non-cushionborne mode. Wave-making characteristics reflect that the PACSCAT would eventually enter planing regime, in which the air could just escape under the seals and the hull body could operate in a steady state. To acquire different air cushion pressure, air flow rate and leakage height were adjusted during tests. Experimental results show that the resistance performance in planing regime would decrease evidently as the increased air flow rate, however, the scheme with medium leakage height presents the best resistance performance in the hump region.

• Structural Engineering and Mechanics
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• v.84 no.5
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• pp.605-618
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• 2022

Glass fiber reinforced polymer (GFRP) elastic gridshells consist of long continuous GFRP tubes that form elastic deformations. In this paper, a method for the form-finding of gridshell structures is presented based on the interpretable machine learning (ML) approaches. A comparative study is conducted on several ML algorithms, including support vector regression (SVR), K-nearest neighbors (KNN), decision tree (DT), random forest (RF), AdaBoost, XGBoost, category boosting (CatBoost), and light gradient boosting machine (LightGBM). A numerical example is presented using a standard double-hump gridshell considering two characteristics of deformation as objective functions. The combination of the grid search approach and k-fold cross-validation (CV) is implemented for fine-tuning the parameters of ML models. The results of the comparative study indicate that the LightGBM model presents the highest prediction accuracy. Finally, interpretable ML approaches, including Shapely additive explanations (SHAP), partial dependence plot (PDP), and accumulated local effects (ALE), are applied to explain the predictions of the ML model since it is essential to understand the effect of various values of input parameters on objective functions. As a result of interpretability approaches, an optimum gridshell structure is obtained and new opportunities are verified for form-finding investigation of GFRP elastic gridshells during lifting construction.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.5B
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• pp.551-555
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• 2006

In this study, new dispersion-correction terms are added to a leap-frog finite difference scheme for the linear shallow-water equations with the purpose of considering dispersion effects of the linear Boussinesq equations for propagation of tsunamis. The numerical model developed in this study is tested to the problem that the initial free surface displacement is a Gaussian hump over a constant water depth, and the predicted numerical results are compared with analytical solutions. The results of the present numerical model are accurate in comparison with those of existing models.

• International Journal of Highway Engineering
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• v.13 no.3
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• pp.103-110
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• 2011

This study deals with the traffic accidents by type. The objectives are to analyze the characteristics of 2 accident types, and to develop the models by type. In pursuing the above, this paper gives particular attentions to testing the differences between by type two groups, and developing the models (Poisson and negative binomial regressions) using the data of domestic circular intersections. The main results are as follows. First, the number of accidents in vehicle vehicle was analyzed to account for about 73.41% of total and to be higher than vehicle people. Second, two Poisson models and two negative binomial models which were all statistically significant were developed using vehicle people accidents and vehicle vehicle accidents as dependant variables. Finally, the traffic volume as common variable was selected in the models, and right-turn slip lane, speed hump, the number of driveways, the number of pedestrian crossings as specific variables of the models were selected.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.615-618
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• 2005

In this work, the effects of corner transistors in SOI MOSFETs were investigated. We fabricated SOI MOSFETs with various widths and a fixed length and characterized them. The SOI thickness was $4000{\AA}$ and the buried oxide(BOX) thickness was $4000{\AA}$. The isolation of active region was simply done by silicon etching and TEOS sidewall formation. Several undesirable characteristics have been reported for LOCOS isolation in fabrication on SOI wafers so far. Although we used an STI-like process instead of LOCOS, there were still a couple of abnormal phenomena such as kinks and double humps in drain current. Above all, we investigated the location of the parasitic transistors and found that they were at the corners of the SOI in width direction by high-resolution SEM inspection. It turned out that their characteristics are strongly dependent on the channel width. We made a contact pad through which we can control the body potential and figured out the dependency of operation on the body potential. The double humps became more prominent as the body bias went more negative until the full depletion of the channel where the threshold voltage shift did not occur any more. Through these works, we could get insights on the process that can reduce the effects of corner transistors in SOI MOSFETs, and several possible solutions are suggested at the end.