• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.475-480
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• 2006

Vanadium oxide thin films (VOx) have been deposited by RF magnetron sputtering from $V_2O_5$ target under different oxygen partial pressure ratios(0%, 10%) and substrate temperatures$(27^{\circ}C,\;400^{\circ}C)$. Crystallographic structure and morphology of the films are studied by XRD and SEM. Humidity-sensing properties of resistive sensors having interdigitated electrode structure are characterized through electrical conduction measurements. The films deposited at room temperature are amorphous whereas the ones deposited above foot are polycrystalline. The sensors show good response to humidity over 20%RH to 80%RH. Vanadium oxide thin films deposited with $0%O_2$ partial pressure at $400^{\circ}C$ exhibit greater sensitivity to humidity change than others.

• Journal of Sensor Science and Technology
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• v.5 no.3
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• pp.33-40
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• 1996

$(Ba_{0.5}\;Ca_{0.5})TiO_{3}$ humidity-sensitive devices were fabricated by a solid reaction method, and their electrical properties were investigated. The specimens exhibited good humidity sensitivity, in which the impedance changes linearly. It is shown that electrical conduction with moisture adsorption is dominated by the ions through characteristics of charging and discharing current, and electrical conductivity increases as rasing the temperature and relative humidity. It is realized that relative permittivity increases and activation energy decreases with increasing relative humidity.

• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.97-103
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• 2007

Crystallized carbon nitride film that has many stable physical and/or chemical properties has been expected potentially by a new electrical material. However, one of the most significant problems degrading the quality of carbon nitride films is an existence of N-H and C-H bonds from the deposition environment. The possibility of these reactions with hydroxyl group in carbon nitride films, caused by a hydrogen attack, was suggested and proved in our previous reports that this undesired effect could be applied for fabricating micro-humidity sensors. In this study, MIS capacitor and MIM capacitor with $5{\mu}m{\times}5{\mu}m$ meshes were fabricated. As an insulator, carbon nitride film was deposited on a $Si_{3}N_{4}/SiO_{2}/Si$ substrate using reactive magnetron sputtering system, and its dielectric constant, C-V characteristics and humidity sensing properties were investigated. The fabricated humidity sensors showed a linearity in the humidity range of 0 %RH to 80 %RH. These results reveal that MIS and MIM $CN_{X}$ capacitive humidity sensors can be used for Si based micro-humidity sensors.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.26 no.1
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• pp.146-152
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• 2022

Information collected from temperature, humidity, inclination, and pressure sensors using Raspberry Pi or Arduino is used in automatic constant temperature and constant humidity systems. In addition, by using it in the agricultural and livestock industry to remotely control the system with only a smartphone, workers in the agricultural and livestock industry can use it conveniently. In general, temperature and humidity are expressed in a line graph, etc., and the change is monitored in real time. The technology to visually express the temperature has recently been used intuitively by using an infrared device to test the fever of Corona 19. In this paper, the information collected from the Raspberry Pi and the DHT11 sensor is used to predict the temperature change in space through intuitive visualization and to make a immediate response. To this end, an algorithm was created to effectively visualize temperature and humidity, and data representation is possible even if some sensors are defective.

• Journal of the Microelectronics and Packaging Society
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• v.16 no.1
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• pp.13-19
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• 2009

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed on a $41^{\circ}YX\;LiNbO_3$ piezoelectric substrate for simultaneous measurement of $CO_2$ gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line is composed of an interdigital transducer (IDT) and several shorted grating reflectors. A Teflon AF 2400 and a hydrophilic $SiO_2$ layer were used as $CO_2$ and water vapor sensitive films. The coupling of mode (COM) modeling was conducted to determine optimal device parameters prior to fabrication. According to simulation results, the device was fabricated and then wirelessly measured using the network analyzer. The measured reflective coefficient $S_{11}$ in the time domain showed high signal/noise (S/N) ratio, small signal attenuation, and few spurious peaks. In the $CO_2$ and humidity testing, high sensitivity ($2^{\circ}/ppm$ for $CO_2$ detection and $7.45^{\circ}/%$RH for humidity sensing), good linearity and repeatability were observed in the $CO_2$ concentration ranges of $75{\sim}375ppm$ and humidity levels of $20{\sim}80%$RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of Korea Multimedia Society
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• v.12 no.10
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• pp.1478-1485
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• 2009

A sensor network which is composed of a large number of sensors that perform various sensing is applied in a variety of fields. The sensor networks can be widely used for various application area like as home automation, fire detection and security area. Development of new sensor to have appropriate functions and deployment of networks for suitable application are served actively. In this paper, we design and implement a system that monitors various factory facilities by deploying sensor network at a working place which threatens the worker's safety. A sensor node reports its sensing data like as temperature and humidity to monitor facilities to a sink node. And the server which is connect to the sink node gathers and provides information by user interface. In addition, digital data which are generated at a work place can be transferred via the sensor network to increase the efficiency of works. The proposed sensor network provides the convenience of working, since it is deployed at a garbage collection company to monitor a temperature and humidity of garbage and to transmit data about the weight of trucks which enters the company.

• Journal of the Semiconductor & Display Technology
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• v.20 no.4
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• pp.177-181
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• 2021

Scaffolds protect the sensor in the body. Scaffolds are made of a bioabsorbable polymer. The polymer process is sensitive to humidity. Inside of the 3D printer has been improved to control the humidity. Specimens were produced by injection molding and 3D printer. 3D printed specimens were printed under various humidity conditions. We measured tensile strength of the injection-molded specimen and tensile strength of the 3d printing specimen. We compared tensile strength of the injection-molded specimen and tensile strength of the 3d printing specimen. Tensile strength of the injection-molded specimen is 557 kgf/cm². We confirmed tensile strength of the specimen was highest at 741 kgf/cm² when the humidity was 10 %. We confirmed lower the humidity, higher tensile strength of the polymer product.

• Journal of the Microelectronics and Packaging Society
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• v.13 no.4
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• pp.65-70
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• 2006

Carbon nanotubes (CNT) grown by chemical vapor deposition (CVD) and plasma enhanced chemical vapor deposition (PECVD), and followed by annealing at $400{\sim}500^{\circ}C$ were investigated for gas sensing under 1.5ppm $NO_{2}$ concentration at an operating temperature of $200^{\circ}C$. The electrical resistance of CNT sensor decreased with temperature, indicating a semiconductor type. The resistance of CNT sensor decreased with $NO_{2}$ adsorption. It was found that the sensitivity of sensor was affected by humidity and decreased under microwave irradiation for 3 minutes. The CNT sensor grown by PECVD had a higher sensitivity than that of CVD.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.419-422
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• 1998

There are lots of researches which are using quratz crystal in order to apply it to sensors, for example, mass detect sensor, humidity sensor, gas sensor, etc. We tried to apply quartz crystal to the sensor using the resonant frequency and the resistance properties. Four kinds of fatty acid which are having the same head group are coated at the surface of quartz crystal, the shift of the resonant frequency and the resistance are observed according to length of the tail group. Myristic acid$(C_{14})$, palmitic acid$(C_16)$, stearic acid$(C_{18})$, and arachidic acid$(C_{20})$ were coated by Langmuir-Blodgett(LB) technique. As results, the resonant frequency shift was observed linearly. However, there are some difference compared with Sauerbrey's equation. It can be explained by the effect of the temperature property and/or humidity. On the other hand, the shift of the resistance was observed nonlinearly.