• 제목/요약/키워드: Hole space

검색결과 384건 처리시간 0.023초

Refilled mask structure for Minimizing Shadowing Effect on EUV Lithography

  • Ahn, Jin-Ho;Shin, Hyun-Duck;Jeong, Chang-Young
    • 반도체디스플레이기술학회지
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    • 제9권4호
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    • pp.13-18
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    • 2010
  • Extreme ultraviolet (EUV) lithography using 13.5 nm wavelengths is expected to be adopted as a mass production technology for 32 nm half pitch and below. One of the new issues introduced by EUV lithography is the shadowing effect. Mask shadowing is a unique phenomenon caused by using mirror-based mask with an oblique incident angle of light. This results in a horizontal-vertical (H-V) biasing effect and ellipticity in the contact hole pattern. To minimize the shadowing effect, a refilled mask is an available option. The concept of refilled mask structure can be implemented by partial etching into the multilayer and then refilling the trench with an absorber material. The simulations were carried out to confirm the possibility of application of refilled mask in 32 nm line-and-space pattern under the condition of preproduction tool. The effect of sidewall angle in refilled mask is evaluated on image contrast and critical dimension (CD) on the wafer. We also simulated the effect of refilled absorber thickness on aerial image, H-V CD bias, and overlapping process window. Finally, we concluded that the refilled absorber thickness for minimizing shadowing effect should be thinner than etched depth.

다중 불법콘텐츠 복제자 추적 기술 개발 (Development of Forensic Marking technology for tracing multiple users)

  • 김종안;김진한;김종흠
    • 한국정보통신설비학회:학술대회논문집
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    • 한국정보통신설비학회 2008년도 정보통신설비 학술대회
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    • pp.102-106
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    • 2008
  • Forensic Marking is the technology that enables the service providers (SP) to identify the illegal digital contents distributors by first inserting markings (data indicating the user information and playback time) in realtime into the digital contents at time of playback of digital contents, and then later by extracting inserted markings from the contents which are illegally captured from the multimedia device such as IPTV STBs and distributed over the Internet. Digital Rights Management (DRM), which is a very popular content protection technology, has the security hole that can be vulnerable because the encrypted digital contents are transformed into their original plaintext forms after the decrypting process on the STBs. Therefore Forensic Marking (FM) has now become a companion content protection solution to DRM. This article describes a new way of tracking up to 4 illegal content users in FM implementation using the blue-difference chroma component of YCbCr color space. This FM technology has many advantages like fast processing time and easy portability to STB devices compared to that of the traditional watermarking processing in the frequency domain.

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지연시차에 따른 발파진동의 주파수 특성 예측 (Prediction of Principal Frequency of Ground Vibration from Delayed Blasting)

  • 정두성;강추원;고진석;장호민;류복현
    • 터널과지하공간
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    • 제20권2호
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    • pp.112-118
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    • 2010
  • 도심지 발파와 같이 인체나 구조물에 직접적인 영향을 미칠 수 있는 발파 작업 시에는 지반진동의 영향성 평가 작업이 필수적으로 선행되어야 한다. 이로 인해 주파수가 지반진동의 특성에 관하여 미치는 영향과 피해여부를 판단하는 중요한 요소로 인식되고 있다. 주파수의 영향에 대해서 많은 연구가 이뤄지고 있지만, 이러한 연구들은 지반진동의 발생과 전파에 있어서 지연시차에 따른 주파수 특성을 연구한 것은 아니었다. 따라서 본 연구에서는 Langefors의 시차이론에 근거한 단일공 파형에 의한 중첩모델링으로 얻어진 지연시차를 통하여 지반 진동의 간섭에 있어 보강과 상쇄간섭이 반복되는 각각의 지연시차에 따른 주파수의 관계를 고찰하였다.

How to Treat Chronic Subdural Hematoma? Past and Now

  • Lee, Kyeong-Seok
    • Journal of Korean Neurosurgical Society
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    • 제62권2호
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    • pp.144-152
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    • 2019
  • Treatment of chronic subdural hematoma (CSDH) is relatively straightforward, however, there is still some debate regarding the best strategy for treatment. The most practical recommendations of up to date were identified by a review of literature. The author reviewed the literature on CSDH management from the past to now to identify the best methods. Till 1970s, craniotomy was the most commonly used method. Burr hole (BH) became the most preferred method from 1980s. In 1977, twist drill (TD) craniostomy was introduced. Closed system drainage after a BH or a TD became the most frequently used surgical method. Although nonsurgical treatment is often successful, trephination has more advantages, such as rapid resolution of the symptoms and short period of hospitalization. Nonsurgical treatment is possible in asymptomatic patients with a small CSDH. For the symptomatic patients with CSDH, trephination is the treatment of choice, either by BH or TD. In gray zone between surgery and medical treatment, shared decision making can be an ideal approach. For the recurrent CSDHs, repeated trephination is still effective for patients with a low risk of recurrence. If the risk of recurrence is high, additional management would be helpful. For the refractory CSDHs, it is necessary to obliterate the subdural space.

An observed link between AGN Eddington ratio and [NII] λ6583/Hα at 0.6

  • Oh, Kyuseok;Ueda, Yoshihiro;Akiyama, Masayuki;Suh, Hyewon;Koss, Michael;Mushotzky, Richard;Hasinger, Guenther;Kashino, Daichi;Silverman, John
    • 천문학회보
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    • 제44권1호
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    • pp.36.1-36.1
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    • 2019
  • We present the observed relationship between Eddington ratio (${\lambda}Edd$) and optical narrow-emission-line ratio ([NII] ${\lambda}6583/H{\alpha}$) of X-ray-selected unobscured active galactic nuclei (AGN) at 0.6 < z < 1.7 using 27 near-infrared spectra from the Fiber Multi-Object Spectrograph mounted on the Subaru telescope along with 26 additional sources from the literature. We show that the ${\lambda}Edd$ and [NII] ${\lambda}6583/H{\alpha}$ ratio at 0.6 < z < 1.7 exhibits a similar distribution of ${\lambda}Edd$-[NII] ${\lambda}6583/H{\alpha}$ anti-correlation that has been found for local ( = 0.036), hard X-ray selected AGN. The observed anti-correlation suggests that [N II] ${\lambda}6583/H{\alpha}$ optical narrow-line ratio in the AGN host galaxy may carry important information about the accretion state of the central supermassive black hole, suggesting the observational hint of consistent relationship from local to z ~ 1.7. Further study is necessary to determine whether the ${\lambda}Edd$-[N II] ${\lambda}6583/H{\alpha}$ correlation in high-redshift still holds at ${\log}{\lambda}Edd$ < -2 compared to local AGN.

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AT2018cow : Photometric Analysis of Fast-evolving, Luminous and Bluish Transient

  • Paek, Gregory SungHak;Im, Myungshin;Choi, Changsu;Lim, Gu;Kim, Sophia;Paek, Insu;Hwang, Sungyong;Kim, Taewoo
    • 천문학회보
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    • 제43권2호
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    • pp.53.3-54
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    • 2018
  • On June 16 AT2018cow (ATLAS 18qqn) was discovered as a bright and fast-evolving transient in nearby universe z ~ 0.01. It brightened by more than 4 mag within a day, and its light curve was decayed rapidly and has a high luminous peak which is more luminous than most of core-collapse supernova. It also overall showed a blue color in an unprecedented case of transients. There have been attempts to explain this behavior with existing models, but most of them have been insufficient except for one - tidal disruption by intermediate-mass black hole. We began to monitor this transient from about 4 days after the discovery until August 21 in the optical bands with 1m-class telescopes over the world. Here, we present a light curve of AT2018cow in the B, V, R and I bands, and analyze its photometric properties and compare to other transients and models.

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Numerical nonlinear bending analysis of FG-GPLRC plates with arbitrary shape including cutout

  • Reza, Ansari;Ramtin, Hassani;Yousef, Gholami;Hessam, Rouhi
    • Structural Engineering and Mechanics
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    • 제85권2호
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    • pp.147-161
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    • 2023
  • Based on the ideas of variational differential quadrature (VDQ) and finite element method (FEM), a numerical approach named as VDQFEM is applied herein to study the large deformations of plate-type structures under static loading with arbitrary shape hole made of functionally graded graphene platelet-reinforced composite (FG-GPLRC) in the context of higher-order shear deformation theory (HSDT). The material properties of composite are approximated based upon the modified Halpin-Tsai model and rule of mixture. Furthermore, various FG distribution patterns are considered along the thickness direction of plate for GPLs. Using novel vector/matrix relations, the governing equations are derived through a variational approach. The matricized formulation can be efficiently employed in the coding process of numerical methods. In VDQFEM, the space domain of structure is first transformed into a number of finite elements. Then, the VDQ discretization technique is implemented within each element. As the last step, the assemblage procedure is performed to derive the set of governing equations which is solved via the pseudo arc-length continuation algorithm. Also, since HSDT is used herein, the mixed formulation approach is proposed to accommodate the continuity of first-order derivatives on the common boundaries of elements. Rectangular and circular plates under various boundary conditions with circular/rectangular/elliptical cutout are selected to generate the numerical results. In the numerical examples, the effects of geometrical properties and reinforcement with GPL on the nonlinear maximum deflection-transverse load amplitude curve are studied.

차폐막을 이용한 치주조직 및 골조직 유도재생술의 실패요인에 대한 고찰 (The factors related with the failure in GBR and GTR technique)

  • 염혜리;구영;정종평
    • Journal of Periodontal and Implant Science
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    • 제27권1호
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    • pp.117-128
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    • 1997
  • Using barrier membrane, guided bone regeneration(GBR) and guided tissue regeneration(GTR) of periodontal tissue are now widely studied and good results were reported. In bone regeneration, not all cases gained good results and in some cases using GTR, bone were less regenerated than that of control. The purpose of this study is to search for the method to improve the success rate of GBR and GTR by examination of the cause of the failure. For these study, rats and beagle dogs were used. In rat study, 5mm diameter round hole was made on parietal bone of the rat and 10mm diameter of bioresorbable membrane was placed on the bone defects and sutured. In 1 ,2, 4 weeks later, the rats were sacrificed and Masson-Trichrome staining was done and inspected under light microscope for guided bone regeneration. In dog study, $3{\times}4mm^2$ Grade III furcation defect was made at the 3rd and 1th premolar on mandible of 6 beagle dogs. The defects were covered by bioresorbable membrane extending 2-3mm from the defect margin. The membrane was sutured and buccal flap was covered the defect perfectly. In 2, 4. 8 weeks later. the animals were sacrificed and undecalcified specimens were made and stained by multiple staining method. In rats. there was much amount of new bone formation at 2 weeks. and in 4 weeks specimen, bony defect was perfectly dosed and plenty amount of new bone marrow was developed. In some cases, there were failures of guided bone regeneration. In beagle dogs, guided tissue regeneration was incomplete when the defect was collapsed by the membrane itself and when the rate of resorption was so rapid than expected. The cause of the failure in GBR and GTR procedure is that 1) the membrane was not tightly seal the bony defects. If the sealing was not perfect, fibrous connective tissue infiltrate into the defect and inhibit the new bone formation and regeneration. 2) the membrane was too tightly attached to the tissue and then there was no space to be regenerated. In conclusion, the requirements of the membrane for periodontal tissue and bone regeneration are the biocompatibility, degree of sealingness, malleability. space making and manipulation. In this animal study. space making for new bone and periodontal ligament, and sealing the space might be the most important point for successful accomplishment of GBR and GTR.

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벤토나이트 완충재 설계 기준 온도에 따른 고효율 처분시스템 처분 간격 및 암반 조건 산정을 위한 수치해석적 연구 (A Numerical Analysis to Estimate Disposal Spacing and Rock Mass Condition for High Efficiency Repository Based on Temperature Criteria of Bentonite Buffer)

  • 김광일;이창수;김진섭;조동건
    • 터널과지하공간
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    • 제31권4호
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    • pp.289-308
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    • 2021
  • 본 연구에서는 열-수리-역학적 복합거동 수치해석을 활용하여 국내 고준위방사성폐기물 처분장의 완충재의 설계 기준 온도가 100℃ 및 125℃인 경우, 처분 간격에 따른 처분시스템의 최고 온도를 계산하고, 역학적 안정성을 확보하기 위한 암반의 조건을 도출하였다. 완충재의 설계 기준 온도를 현재와 같이 100℃로 유지할 때, 처분터널 간격이 40 m, 처분공 간격이 5.5 m인 경우와 처분터널 간격이 30 m, 처분공 간격이 6.5 m인 경우, 처분용기와 완충재가 접하는 점에서 최고 온도가 각각 99.4℃ 및 99.8℃로 계산되었다. 완충재의 설계 기준 온도를 125℃로 향상시킨 경우, 처분터널 간격을 30 m, 처분공 간격을 4.5 m까지 감소시켜 처분 면적을 KRS+ 기반 처분시스템 대비 55%까지 감소시킬 수 있었다. 다양한 처분 간격에 대해 암반에서의 역학적 안정성을 평가한 결과, 암반파괴가 발생하지 않기 위해서는 KRS+ 기반 처분시스템은 암반의 RMR 분류법의 Good rock에 해당하는 RMR 72.4 이상의 조건이어야 했다. 처분 간격이 감소할수록 암반의 RMR이 더 높아야 했으며, 처분터널 간격 30 m, 처분공 간격 4.5 m인 경우에는 RMR 87.3 이상이 되어야 암반의 파괴를 방지할 수 있었다. 그러나, 처분 이후 지하수 유입 시 벤토나이트 완충재 및 뒤채움재의 팽윤에 따른 구속압에 의한 암반 강도의 증가를 고려하면, 해석을 수행한 모든 처분 간격에 대해 암반의 RMR이 75 이상이면 역학적 안정성을 확보할 수 있었다.

고준위폐기물처분장 공학적방벽의 갭채움재 기술현황 (R&D Review on the Gap Fill of an Engineered Barrier for an HLW Repository)

  • 이재완;최영철;김진섭;최희주
    • 터널과지하공간
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    • 제24권6호
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    • pp.405-417
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    • 2014
  • 고준위폐기물처분장에서 갭채움재는 완충재와 뒷채움재의 성능을 좌우하는 중요한 공학적방벽의 구성요소이다. 본 논문에서는 갭채움재에 대한 해외 기술현황을 조사하고, 이를 통하여 갭채움재의 개념, 제조기술, 성형특성, 설치기술에 대한 연구결과들을 정리하였다. 갭채움재 개념은 처분방식과 처분개념에 따라서 나라마다 약간씩 차이가 있었다. 갭채움재 물질로는 대부분 벤토나이트를 사용하였고, 충전제로 점토를 사용하였다. 갭채움재는 펠렛, 과립상, 또는 펠렛-과립상 혼합물의 형태로 사용되었다. 갭채움재 펠렛 제조에는 정압축, 롤러압축, 압출-컷팅 방법 등이 사용되었으며, 이 중, 실험과 실제 현장에서의 펠렛 소요량을 감안하여 많은 나라들이 롤러압축방법과 압출-컷팅방법에 대한 기술 확보에 집중하였다. 펠렛 성형특성 실험결과, 펠렛의 건조밀도와 건전성은 수분함량, 구성물질, 제조방법, 펠렛 크기에 민감하였고, 제작 시 압축하중에는 상대적으로 덜 민감하였다. 갭채움재의 설치방법으로는 수직처분공 완충재 갭에서는 부어넣기(pouring) 방법, 붓고 다지기(pouring and tamping) 방법, 진동을 주며 부어넣기(pouring with vibration) 방법 등이 시도되었으며, 수평처분공 완충재와 처분터널의 뒷채움재 갭에서는 숏크리트 기술을 이용한 불어넣기(blowing by use of shotcrete technology) 방법과 오거를 이용한 정치 및 다지기(auger placement and compaction) 방법 등이 시도되었다. 그러나 이 방법들은 아직 기술적으로 초기단계에 있어 앞으로도 계속적인 연구가 이루어질 것으로 예상되었다.