Fabrication of High-Tc Superconducting $YBa_2Cu_3O_{7-x}$ Thin Films by Off-Axis RF Magnetron Sputtering
(Off-Axis RF 마그네트론 스퍼터링에 의한 $YBa_2Cu_3O_{7-x}$ 고온 초전도 박막의 제조)
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- Journal of the Korean Ceramic Society
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- v.28 no.3
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- pp.243-251
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- 1991