Effect of the Neutral Beam Energy on Low Temperature Silicon Oxide Thin Film Grown by Neutral Beam Assisted Chemical Vapor Deposition
-
- Proceedings of the Korean Vacuum Society Conference
- /
- 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
- /
- pp.253-253
- /
- 2012