• Journal of Powder Materials
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• v.19 no.5
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• pp.367-372
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• 2012

Single crystalline Cu nanowires with controlled diameters and aspect ratios have been synthesized using electrochemical deposition within confined nanochannels of a porous anodic aluminium oxide(AAO) template. The diameters of nano-sized cylindrical pores in AAO template were adjusted by controlling the anodization conditions. Cu nanowires with diameters of approximately 38, 99, 274 nm were synthesized by the electrodeposition using the AAO templates. The crystal structure, morphology and microstructure of the Cu nanowires were systematically investigated using XRD, FE-SEM, TEM and SAED. Investigation results revealed that the Cu nanowires had the controlled diameter, high aspect ratio and single crystalline nature.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.133-134
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• 2007

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.24-29
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• 2005

Fm (Focused ion beam) system is one of the most important equipments for the nano-scale machining. Various researches have been performed, since it can etch the material and deposit 3-D structure with high-aspect-ratio in the nanometer scale. In spite of those researches, the definite method for the reliability of FIB system has not been reported. In this paper, we proposed the reliability assessment method through nano-pattern fabrication. In the fabricated nano-pattern, the characteristics of FIB system are included. Using this effect, we tried to assess the FIB reliability. First, we suggested reliability assessment items and nano-patterns. And, to know the suitableness of the proposed method, we fabricated several nano-patterns using Nova200(FEI Company) and SMI2050(SEIKO) which are FIB apparatuses. The fabricated nano-patterns are measured with SEM (Scanning Electron Microscope) and compared with designed dimensions. And the compared results showed that the proposed method is suitable for the assessment of FIB system reliability.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1825-1828
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• 2008

A simple method for the fabrication of porous nano-master for antireflective surface is presented. In conventional fabrication methods for antireflective surface, coating method with low refractive index has usually been used. However, it is required to have high cost and long times for mass production. In this paper, we suggested the fabrication method of antireflective surface by the hot embossing process using the porous nano patterned master on silicon wafer fabricated by low-temperature anodic aluminum oxidation. Through multi-AAO and etching processes, nano patterned master with high aspect ratio was fabricated at the large area. Pore diameter and inter-pore distance are about 150nm and from 150 to 200nm. In order to replicate anti-reflective structure, hot embossing process was performed by varying the processing parameters such as temperature, pressure and embossing time etc. Finally, antireflective surface can be successfully obtained after etching process to remove selectively silicon layer of AAO master.

• Korean Journal of Materials Research
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• v.21 no.12
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• pp.660-665
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• 2011

1-D ZnO nanowires have been attractive for their peculiar properties and easy growth at relatively low temperature. The length, diameter, and density of ZnO nanowires were determined by the several synthetic parameters, such as PEI concentration, growth time, temperature, and zinc salt concentration. The ZnO nanowires were grown on the <001> oriented seed layer using the hydrothermal process with zinc nitrate and HMTA (hexamethylenetetramine) and their structure and optical properties were characterized. The morphology, length and diameter of the nanowires were strongly affected by the relative and/or absolute concentration of $Zn^{2+}$ and $OH^{-1}$ and the hydrothermal temperature. When the concentrations of the zinc nitrate HMTA were the same as 0.015 M, the length and diameter of the nanowires were $1.97{\mu}m$ and $0.07{\mu}m$, respectively, and the aspect ratio was 28.1 with the preferred orientation along the <001> direction. XRD and TEM results showed a high crystallinity of the ZnO nanowires. Optical measurement revealed that ZnO nanowires emitted intensive stimulated UV at 376 nm without showing visible emission related to oxygen defects.

• Steel and Composite Structures
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• v.32 no.3
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• pp.293-304
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• 2019

In the present paper, the element free Galerkin (EFG) method is developed for geometrically nonlinear analysis of deep beams considering small scale effect. To interpret the behavior of structure at the nano scale, the higher-order gradient elasticity nonlocal theory is taken into account. The radial point interpolation method with high order of continuity is used to construct the shape functions. The nonlinear equation of motion is derived using the principle of the minimization of total potential energy based on total Lagrangian approach. The Newmark method with the small time steps is used to solve the time dependent equations. At each time step, the iterative Newton-Raphson technique is applied to minimize the residential forces caused by the nonlinearity of the equations. The effects of nonlocal parameter and aspect ratio on stiffness and dynamic parameters are discussed by numerical examples. This paper furnishes a ground to develop the EFG method for large deformation analysis of structures considering small scale effects.

• Carbon letters
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• v.12 no.4
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• pp.185-193
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• 2011

Carbon nanotubes (CNTs) have developed into one of the most competitively researched nano-materials of this decade because of their structural uniqueness and excellent physical properties such as nanoscale one dimensionality, high aspect ratio, high mechanical strength, thermal conductivity and excellent electrical conductivity. Mass production and structure control of CNTs are key factors for a feasible CNT industry. Water and ethanol vapor enhance the catalytic activity for massive growth of vertically aligned CNTs. A shower system for gas flow improves the growth of vertically aligned single walled CNTs (SWCNTs) by controlling the gas flow direction. Delivery of gases from the top of the nanotubes enables direct and precise supply of carbon source and water vapor to the catalysts. High quality vertically aligned SWCNTs synthesized using plasma enhance the chemical vapor deposition technique on substrate with suitable metal catalyst particles. This review provides an introduction to the concept of the growth of vertically aligned SWCNTs and covers advanced topics on the controlled synthesis of vertically aligned SWCNTs.

• Advances in nano research
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• v.10 no.5
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• pp.449-460
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• 2021

Flexoelectricity is an interesting materials' property that is more touchable in small scales. This property beside the sandwich structures placed in the center of scientists' attention due to their extraordinary effects on the mechanical properties. Furthermore, in the passage of decades, more elaborated sandwich structures took into consideration results from using honeycomb core. This kind of structure, inspiring from honeycomb core, provides more stiffness to weight ratio, which plays a crucial role in different industries. In this paper, based on the Love-Kirchhoff's hypothesis, Hamilton's principle, modified couple stress theory and Fourier series analytical method, equations of motion for a sandwich plate containing a honeycomb core integrated by two face-sheets have derived and solved analytically. The equations of both face sheets have derived by flexoelectricity consideration. Moreover, it should be noticed that the whole structure rests on the visco-Pasternak foundation. Conducting current research provided an acceptable and throughout study based on flexoelectricity to address the effect of materials' characteristics, length-scale parameter, aspect, and thickness ratios and boundary conditions on the natural frequency of honeycomb sandwich plates. Also, based on the presented figures and tables, there is a close agreement between previous studies and recent work. Due to the high ratio of strength to weight, current model analyzing is capable of taking into account for different vehicles' manufacturing in a high range of industries.

• Composites Research
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• v.19 no.6
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• pp.23-31
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• 2006

We measured mechanical properties, including Young's modulus, effective bending modulus and nominal fracture strength of nanohoneycomb structures using an Atomic Force Microscope(AFM) and a Nano-Universal Testing Machine(UTM). Anodic aluminum oxide(AAO) films are well suited as nanohoneycomb structures because of the simple fabrication process, high aspect ratio, self-ordered hexagonal pore structure, and simple control of pore dimensions. Bending tests were carried out for cantilever structures by pressing AFM tips, and the results were compared with three-point bending tests and tensile tests using a Nano-UTM. One side of the AAO films is clogged by harrier layers, and looks like a face material of conventional sandwich structures. Analysis of this layer showed that it did not influence the bending rigidity, and was just a crack tip. The present results can act as a design guideline in applications of nanohoneycomb structures.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.78-78
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• 2013

Recently, many platinoid metals like platinum and ruthenium have been used as an electrode of microelectronic devices because of their low resistivity and high work-function. However the material cost of Ru is very expensive and it usually takes long initial nucleation time on SiO2 during chemical deposition. Therefore many researchers have focused on how to enhance the initial growth rate on SiO2 surface. There are two methods to deposit Ru film with atomic layer deposition (ALD); the one is thermal ALD using dilute oxygen gas as a reactant, and the other is plasma enhanced ALD (PEALD) using NH3 plasma as a reactant. Generally, the film roughness of Ru film deposited by PEALD is smoother than that deposited by thermal ALD. However, the plasma is not favorable in the application of high aspect ratio structure. In this study, we used a bis(ethylcyclopentadienyl)ruthenium [Ru(EtCp)2] as a metal organic precursor for both thermal and plasma enhanced ALDs. In order to reduce initial nucleation time, we use several methods such as Ar plasma pre-treatment for PEALD and usage of sacrificial RuO2 under layer for thermal ALD. In case of PEALD, some of surface hydroxyls were removed from SiO2 substrate during the Ar plasma treatment. And relatively high surface nitrogen concentration after first NH3 plasma exposure step in ALD process was observed with in-situ Auger electron spectroscopy (AES). This means that surface amine filled the hydroxyl removed sites by the NH3 plasma. Surface amine played a role as a reduction site but not a nucleation site. Therefore, the precursor reduction was enhanced but the adhesion property was degraded. In case of thermal ALD, a Ru film was deposited from Ru precursors on the surface of RuO2 and the RuO2 film was reduced from RuO2/SiO2 interface to Ru during the deposition. The reduction process was controlled by oxygen partial pressure in ambient. Under high oxygen partial pressure, RuO2 was deposited on RuO2/SiO2, and under medium oxygen partial pressure, RuO2 was partially reduced and oxygen concentration in RuO2 film was decreased. Under low oxygen partial pressure, finally RuO2 was disappeared and about 3% of oxygen was remained. Usually rough surface was observed with longer initial nucleation time. However, the Ru deposited with reduction of RuO2 exhibits smooth surface and was deposited quickly because the sacrificial RuO2 has no initial nucleation time on SiO2 and played a role as a buffer layer between Ru and SiO2.