• Title/Summary/Keyword: High reactive substrate

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Characteristics of AlN Thin Films by Magnetron Sputtering System Using Reactive Gases of N2 and NH3 (N2와 NH3 반응성가스를 사용하여 마그네트론 스퍼터링법으로 제작한 AlN박막의 특성)

  • Han, Chang-Suk
    • Korean Journal of Materials Research
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    • v.25 no.3
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    • pp.138-143
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    • 2015
  • Aluminum nitride, a compound semiconductor, has a Wurtzite structure; good material properties such as high thermal conductivity, great electric conductivity, high dielectric breakdown strength, a wide energy band gap (6.2eV), a fast elastic wave speed; and excellent in thermal and chemical stability. Furthermore, the thermal expansion coefficient of the aluminum nitride is similar to those of Si and GaAs. Due to these characteristics, aluminum nitride can be applied to electric packaging components, dielectric materials, SAW (surface acoustic wave) devices, and photoelectric devices. In this study, we surveyed the crystallization and preferred orientation of AlN thin films with an X-ray diffractometer. To fabricate the AlN thin film, we used the magnetron sputtering method with $N_2$, NH3 and Ar. According to an increase in the partial pressures of $N_2$ and $NH_3$, Al was nitrified and deposited onto a substrate in a molecular form. When AlN was fabricated with $N_2$, it showed a c-axis orientation and tended toward a high orientation with an increase in the temperature. On the other hand, when AlN was fabricated with $NH_3$, it showed a-axis orientation. This result is coincident with the proposed mechanism. We fabricated AlN thin films with an a-axis orientation by controlling the sputtering electric power, $NH_3$ pressure, deposition speed, and substrate temperature. According to the proposed mechanism, we also fabricated AlN thin films which demonstrated high a-axis and c-axis orientations.

Holographic phase gratings in back- and frontlights for LCD's

  • Bastiaansen, C.W.M.;Heesch, C. van;Broer, D.J.
    • 한국정보디스플레이학회:학술대회논문집
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    • 2006.08a
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    • pp.421-421
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    • 2006
  • The light and energy-efficiency of classical liquid crystal displays is notoriously poor due to the use of absorption-based linear polarisers and colour filters. For instance, the light efficiency of PVAL polarisers is typically between 40 and 45 % and the colour filters have a typical efficiency below 35 % which results in a total light and energy-efficiency of the display below 10 %. In the past, a variety of polarizers were developed with an enhanced efficiency in generating linearly polarized light. Typically, these polarizers are based on the polarisationselective reflection, scattering or refraction of light i.e. one polarisation direction of light is directly transmitted to the LCD/viewer and the other polarization direction of light is depolarised and recycled which results in a typical efficiency for generating linearly polarized light of 70-85 %. Also, special colour filters have been proposed based on chiral-nematic reactive mesogens which increase the efficiency of generating colour. Despite the enormous progress in this field, a need persists for improved methods for generating polarized light and colour based on low cost optical components with a high efficiency. Here, the use of holographic phase gratings is reported for the generation of polarized light and colour. The phase grating are recorded in a photopolymer which is coated onto a backor frontlight for LCDs. Typically the recording is performed in the transmisson mode or in the waveguiding mode and slanted phase gratings are generated with their refractive index modulation at an angle between 20o and 45o with the normal of the substrate. It is shown that phase gratings with a high refractive index modulation and a high efficiency can be generated by a proper selection of the photopolymer and illumination conditions. These phase gratings coupleout linearly polarized light with a high contrast (> 100) and the light is directed directly to the LCD/viewer without the need for redirection foils. Dependent on the type of phase grating, the different colours are coupled-out at a slightly different angle which potentially increases the efficiency of classical colour filters. Moreover, the phase gratings are completely transparent in direct view which opens the possibility to use them in frontlights for LCDs. Holographic polarization gratings posses a periodic pattern in the polarization state of light (and not in the intensity of light). A periodic pattern in the polarization direction of linearly polarized light is obtained upon interference of two circularly polarized laser beams. In the second part of the lecture, it is shown that these periodic polarization patterns can be recorded in a linear photo-polymerizable polymer (LPP) and that such an alignment layer induces a period rotation in the director of (reactive and non-reactive) liquid crystals. By a proper design, optical components can be produced with only first order diffraction and with a very high efficiency (>0.98). It is shown that these diffraction gratings are potentially useful in projection displays with a high brightness and energy efficiency

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Empirical modeling and statistical analysis of the adsorption of reactive dye on nylon fibers (나일론섬유에 대한 반응성 염료 흡착의 실험적 모델링 및 통계적 분석)

  • Kim, Byung-Soon;Ravikumar, K.;Son, Young-A
    • Textile Coloration and Finishing
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    • v.18 no.4
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    • pp.43-48
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    • 2006
  • A phthalocyanine reactive dye was applied to nylon fibers to study the effects of the temperature and pH on % exhaustion and fixation. In addition, appropriate predictable empirical models, relatively new approaches in dyeing process, were developed incorporating interactions effects of temperature and pH for predicting the both % exhaustion and fixation. The significance of the mathematical model developed was ascertained using Excel regression (solver) analysis module. A very high correlation coefficient was obtained ($R^2=0.9895$ for % exhaustion, $R^2=0.9932$ for fixation) for the model which shows prominent prediction capacity of the model for the unknown conditions. The predictable polynomial equations developed from the Experimental results were thoroughly analyzed by ANOVA (Analysis of Variance) statistical concepts.

Fabrication of Tantalum Nitride Thin-Film as High-temperature Strain Gauges (고온 스트레인 게이지용 질화탄탈박막의 제작)

  • Kim, Jae-Min;Choi, Sung-Kyu;Nam, Hyo-Duk;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.97-100
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    • 2001
  • This paper presents the characteristics of Ta-N thin-film strain gauges as high-temperature strain gauges, which were deposited on Si substrate by DC reactive magnetron sputtering in an argon-nitrogen atmosphere(Ar-(4~16%)$N_2$). These films were annealed for 1 hour in $2{\times}10^{-6}$ Torr vaccum furnace range $500\sim1000^{\circ}C$. The optimized conditions of Ta-N thin-film strain gauges were annealing condition($900^{\circ}C$, 1 hr.) in 8% $N_2$ gas flow ratio deposition atmosphere. Under optimum conditions, the Ta-N thin-films for strain gauges is obtained a high resistivity, $\rho=768.93$ ${\mu}{\Omega}cm$, a low temperature coefficient of resistance, TCR=-84 ppm/$^{\circ}C$ and a high temporal stability with a good longitudinal gauge factor, GF=4.12.

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Effects of Silicon on Galvanizing Coating Characteristics in Dual Phase High Strength Steel (복합조직형 고강도 용융아연 도금강판의 도금특성에 미치는 강중 Si의 영향)

  • Jeon, Sun-Ho;Chin, Kwang-Geun;Shin, Kwang-Soo;Lee, Joon-Ho;Sohn, Ho-Sang
    • Korean Journal of Metals and Materials
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    • v.47 no.7
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    • pp.423-432
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    • 2009
  • In the galvanizing coating process, the effects of the silicon content on the coatability and wettability of molten zinc were investigated on Dual-Phase High Strength Steels (DP-HSS) with various Si contents using the galvanizing simulator and dynamic reactive wetting systems. DP-HSS showed good coatability and a well-developed inhibition layer in the range of Si content below 0.5 wt%. Good coatability was the results of the mixed oxide $Mn_{2}SiO_{4}$, being formed by the selective oxidation on the surface, with a low contact angle in molten zinc and a large fraction of oxide free surface that provided a sufficient site for the molten zinc to wet and react with the substrate. On the other hand, with more than 0.5 wt%, DP-HSS exhibited poor coatability and an irregularly developed inhibition layer. The poor coatability was due to the poor wettability that resulted from the development of network-type layers of amorphous ${SiO}_{2}$, leading to a high contact angle in molten zinc, on the surface.

Surface properties of Nb oxide thin films prepared by rf sputtering

  • Park, Ju-Yeon;Gang, Yong-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.306.2-306.2
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    • 2016
  • Niobium oxide thin films were synthesized by reactive rf magnetron sputtering. The target was metallic niobium with 2 inch in diameter and the substrate was n-type Si wafer. To control the surface properties of the films, Nb oxide thin films were obtained at various mixing ratios of argon and oxygen gases. Nb oxide thin films were analyzed with alpha step, scanning electron microscopy (SEM), X-ray diffraction (XRD), and X-ray photoelectron spectroscopy (XPS). The result of alpha step showed that the thickness of Nb oxide thin films were decreased with increasing the oxygen gas ratios. SEM images showed that the granular morphology was formed at 0% of oxygen gas ratio and then disappeared at 20 and 75% of oxygen gas ratio. The amorphous Nb oxide was observed by XRD at all films. The oxidation state of Nb and O were studied with high resolution Ni 2p and O 1s XPS spectra. And the change in the chemical environment of Nb oxide thin films was investigated by XPS with Ar+ sputtering.

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Characteristics of ITO/polymeric Films with Change of Oxygen Partial Pressure (산소분압의 변화에 따른 ITO/polymeric 박막의 특성)

  • 신성호;김현후
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.17 no.8
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    • pp.846-851
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    • 2004
  • Transparent conducting indium tin oxide (TC-ITO) thin films on polymeric substrates have been deposited by a dc reactive magnetron sputtering without heat treatments. The polymeric substrates are acryl (AC), poly carbornate (PC), and polyethlene terephthalate (PET) as well as soda lime glass is also used to compare with the polymeric substrates. Sputtering parameters are an important factor for high quality of TC-ITO thin films prepared on polymeric substrates. Furthermore, the material, electrical and optical properties of as-deposited ITO films are dominated by the ratio of oxygen partial pressure. As the experimental results, the surface roughness of ITO films becomes rough as the oxygen partial pressure increases. The electrical resistivity of as-deposited ITO films decreases initially, and then increases with the increase of oxygen partial pressure. The optical transmittance at visible wavelength for all polymeric substrates is above 82 %.

A Study on the double-layered dielectric films of tantalum oxide and silicon nitride formed by in situ process (연속 공정으로 형성된 탄탈륨 산화막 및 실리콘 질화막의 이중유전막에 관한 연구)

  • 송용진;박주욱;주승기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.30A no.1
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    • pp.44-50
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    • 1993
  • In an attempt to improve the electrical characteristics of tantalum pentoxide dielectric film, silicon substrate was reacted with a nitrogen plasma to form a silicon nitride of 50.angs. and then tantalum pentoxide thin films were formed by reactive sputtering in the same chamber. Breakdown field and leakage current density were measured to be 2.9 MV/cm and 9${\times}10^{8}\;A/cm^{2}$ respectively in these films whose thickness was about 180.angs.. With annealing at rectangular waveguides with a slant grid are investigated here. In particular, 900.deg. C in oxygen ambient for 100 minutes, breakdown field and leakage current density were improved to be 4.8 MV/cm and 1.61.6${\times}10^{8}\;A/cm^{2}$ respectively. It turned out that the electrical characteristics could also be improved by oxygen plasma post-treatment and the conduction mechanism at high electric field proved to be Schottky emission in these double-layered films.

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STM Investigation of Methanol Adsorption on Al2O3/NiAl(110) Deposited by Pulsed Injection

  • Lee, Youn-Joo;Choi, E.;Lyo, In-Whan
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.318-318
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    • 2011
  • Etching of an ultrathin aluminum oxide film on NiAl(110) substrate by methanol is studied by home-built scanning tunneling microscopy at room-temperature. We deposited liquid methanol on thin alumina film by using a high speed solenoid valve suitable for deposition of thermally unstable molecules. It is found that only the reflection domain boundary between two domains was preferentially etched by methanol. Since the reflection domain boundary has many oxygen vacancies and irregular structures, judging from the fact, we assume that oxygen vacancies cause the chemically reactive phenomena of methanol in reflection domain boundary on an alumina film. The reactivity of the reflection domain boundary is attributed to the oxygen vacancies due to irregular structures. Similar reactivity is found on the oxygen deficient alumina produced on top of the intact alumina.

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The Application of Perfluorinated Cation-exchange Membrane in the Catalytic Process (촉매공정에서 양이온 교환 분리막의 응용)

  • 변홍식
    • Membrane Journal
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    • v.2 no.1
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    • pp.49-58
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    • 1992
  • Functionalized organic polymers have been used as supports for heterogenized homogeneous catalytic process[1]. Sprcific advantages of using these resins as support reagents have been reviewed[2-4]. These include: -ease of by-product separation from the main reaction product usuallyby simple filtration. -prevention of intermolecular reaction of reactive species or functional groups by simulating high dilution conditions[5]. -utility of the "fish-hook" principle in which a minor component in fished out of a large excess substrate by the insoluble polymer[6]. -the possibility of reusing recovered reagents as well as eliminating the use of volatile or noxious substances[7]. Catalysis by ion-exchange membranes is perhaps one of the latest examples of the use of a polymer-supported species. Conceptually, catalysts on membrane supports offer several possible advantages over traditional powder type systems. They are: (1) Membranes immobilize the catalyst, preventing agglomeration. (2) Filtration is unnecessary for the catalyst separation and so complete catalyst recovery is facilitated. (3) Catalytyic and separation processes can be combined, allowing membrane supported catalysts for the continous flow reactors. reactors.

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