• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.11a
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• pp.185-188
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• 2001

Chemical mechanical polishing(CMP) process is widely used for global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP Process, deionized water (DIW) pressure, purified $N_2$ (P$N_2$) gas, slurry filter and high spray bar were installed. Our experimental results show that DIW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter. Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.3
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• pp.28-36
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• 2000

Spray characteristics of diesel fuel injection is one of the most important factors in diesel combustion and pollutant emissions especially in HSDI (High Speed Direct Injection) diesel engines where the interval between the onset of combustion and the evaporation of atomized fuel is relatively short, An investigation into various spray characteristics from different holes of VCO(Valve Covered Orifice) nozzles was performed and its results were compared to standard sac nozzle. The global characteristics of spray, including spray angle, spray tip penetration, and spray pattern were measured from the spray images which were frozen by an instantaneous photography with a spark light source. For better understanding of spray behavior, SMD of the fuel sprays from multi hole nozzles were measured with back light imaging while the sprays from the other holes are covered by a purpose-built nozzle cap. The investigation manifestly reveals the different spray patterns at the beginning of injection produced by VCO nozzles can be identified as three distinct types with their own macroscopic and microscopic characteristics, while macroscopic non-uniformity disappears at 0.9∼1.0ms from the start of injection.

• Progress in Superconductivity
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• v.8 no.1
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• pp.71-74
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• 2006

High $J_c$ over 1 $MA/cm^2$ YBCO film has been successfully prepared using nitrate precursors by spray pyrolysis method. Aerosol drolpets generated using a concentric spray nozzle were directly sprayed on a $LaAlO_3$(100) single crystal substrate. The cation ratio of precursor solution was Y:Ba:Cu=1:2.65:1.35. The distance between nozzle and substrate was 15 cm. Deposition temperature was ranging from $750^{\circ}C\;to\;800^{\circ}C$. Deposition pressure was 100 Torr, and oxygen partial pressure was varied from 10 Torr to 50 Torr. The microstructure, phase formation, texture development and superconducting properties of deposited films were largely changed with oxygen partial pressure. Deposited films showed a texture with(001) planes parallel to substrate plane. High quality film was obtained when film was deposited at $760^{\circ}C$ with an oxygen partial pressure of 30 Torr. The critical current density($J_c$) of the YBCO film was 1.75 $MA/cm^2$ at 77 K and self-field.

• Transactions of the Korean Society of Automotive Engineers
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• v.9 no.6
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• pp.16-23
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• 2001

Spray dispersion in high pressure diesel engines have been simulated experimentally with a special emphasis on the effect of swirl by using a liquid injection technique. A constant volume chamber was designed to be rotatable in order to generate a continuous swirl and to have the flow field closely resembling a solid body rotation. Emulsified fuel was injected into the chamber and the developing process of fuel sprays was visualized. The effect of swirl on the spray dispersion was quantified by calculating non-dimensionalized dispersion area according to the spray tip penetration length. The results show that the effect of swirl on the spray dispersion is different between short and long spray penetrations. For short range of spray tip penetration, the effect of swirl on spray dispersion is quite small. However, as the spray tip is penetrated into longer distance in spray chamber, the effect of swirl on spray dispersion becomes larger. These results can be used as a basic data for designing combustion chamber and injection system of direct injection diesel engine.

• Transactions of the Korean Society of Automotive Engineers
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• v.16 no.2
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• pp.143-149
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• 2008

The present study is mainly motivated to investigate the vaporization, auto-ignition and spray combustion processes in DI diesel engine using DME and n-heptane. In order to realistically simulate the dimethyl ether (DME) spray dynamics and vaporization characteristics in high-pressure and high-temperature environment, the high-pressure vaporization model has been utilized. The interaction between chemistry and turbulence is treated by employing the Representative Interaction Flamelet (RIF) model. The detailed chemistry of 336 elementary steps and 78 chemical species is used for the DME/air reaction. Based on numerical results, the detailed discussion has been made for the distinctly different combustion characteristics of DME diesel engine in term of vaporization, ignition delay, pollutant formation, and heat release rate.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.33 no.6
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• pp.454-460
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• 2009

To analyze the mixture formation process of evaporating diesel spray is important for emissions reduction in actual engines. Then the effects of change in density of ambient gas on spray structure in high temperature and pressure field have been investigated in this study. The ambient gas density was changed from ${\rho}_a=5.0kg/m^3$ to ${\rho}_a=12.3kg/m^3$ with CVC(Constant Volume Chamber). Also, simulation study by modified KIVA-II code was conducted and compared with experimental results. The ambient temperature and injection pressure are kept as 700K and 72MPa, respectively. The images of liquid and vapor phase in the evaporating free spray were simultaneously taken by exciplex fluorescence method. As experimental results, with increasing ambient gas density, the tip penetration of the evaporating free spray decreases due to the increase in the drag force from ambient gas. The spatial structure of a diesel spray can be verified as 2-regions consisted of liquid with momentum decrease and vapor with large-scale vortex. The calculated results obtained by modified KIVA-II code show good agreements with experimental results.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.22 no.5
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• pp.661-671
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• 1998

It is unavoidable that the fuel spray impinges on the wall of piston cavity in a compact high-pressure D.I. diesel engine. Therefore the characteristics of impinging spray are the very significant information on the consideration and the simulation of its combustion processes including the formation mechanism of exhaust emission and the design of the combustion chamber. In this paper, the numerical simulation was performed to study the characteristics of impinging spray. The spray-wall impingement model used is Watkins and Park's model. Calculation parameters are the inclination angles and the ambient pressures. As the inclination angle increases, the impinging spray develops mainly to the direction of the downstream and scarcely flows to that of the upstream. The shape on the wall of the impinging spray is the circle in the case of the normal impingement, while it is the ellipse in that of the oblique impingement. As the ambient pressure increases, the growth of impinging spray on the wall in the radial direction decreases owing to the increase in the resistance of the ambient.

• Transactions of the Korean hydrogen and new energy society
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• v.26 no.3
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• pp.287-293
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• 2015

The current study has investigated the effects of biodiesel blended with gasoline on the spray characteristics in a Constant Volume Combustion Chamber (CVCC). With the concentration of 5, 10, 15 and 20% by volume, biodiesel was blended with commercial gasoline and performed on the macroscopic visualization test. Pure gasoline and biodiesel were also tested as the reference. The shadowgraph technique was conducted in the constant volume chamber. The spray images were recorded by a high speed video camera with frame speed 10,000 frame per second. Fuel injection was set at 800, 1000 and 1,350 bar with the simulated speed 1,500 and 2,000 rpm. The back pressure was controlled at 20 bar. The spray angle and penetration tip were measured and analyzed by using the image processing. At the high injection pressure, the spray penetration length with the simulated speed 1,500 rpm showed that B100 was lower than GB00-20 whereas the spray penetration length with the simulated speed 2,000 rpm exhibited that GB blends and B100 were insignificantly different. Due to biodiesel concentration, its effects on spray angles were observed throughout injection periods (T1, T2 and T3). At the simulated speed 1,500 rpm, the spray angle of GB blends and B100 presented the same pattern following injection timing. In addition, when the simulated speed increased to 2,000 rpm the different spray angle of all blends disappeared at main injection (T3).

• Transactions of the Korean Society of Automotive Engineers
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• v.12 no.6
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• pp.60-65
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• 2004

Numerical simulations and experiments have been carried out to investigate the effect of fuel injection nozzles on the combustion and NOx formation processes in a medium-speed marine diesel engine. Spray visualization experiment was performed in the constant-volume high-pressure chamber to verify the numerical results on the spray characteristics such as spray angle and spray tip penetration. Time-resolved spray behaviors were captured by high-speed digital camera and analyzed to extract the information on the spray parameters. Spray and combustion phenomena were examined numerically using FIRE code. Wave breakup and Zeldovich models were adopted to describe the atomization characteristics and NOx formation processes. Numerical results were verified with experimental data such as cylinder pressure, heat release rate and NOx emission. Finally, the effects of fuel injection nozzles on the engine performance were investigated numerically to find the optimum nozzle parameters such as fuel injection angle, nozzle hole diameter and number of nozzle holes. From this study, the optimum fuel injection nozzle (nozzle hole diameter, 0.32 mm, number of nozzle holes, 8 and fuel injection angle, $148^{\circ}$) was selected to reduce both the fuel consumption and NOx emission. The reason for this selection could be explained from the highest fuel-air mixing in the early phase of injection due to the longest spray tip penetration and the highest heat release rate after $19^{\circ}$ ATDC due to the increased injection duration.

• Journal of ILASS-Korea
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• v.22 no.1
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• pp.29-35
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• 2017

This paper describes the effects of spray breakup model constants on spray and combustion characteristics in single cylinder compression engine. KIVA-3V code coupled with a CHEMKIN chemistry solver was used for numerical analysis. In this study, spray simulations and combustion simulations are studied simultaneously. Spray simulation was conducted in constant volume to reduce the effects of air-flow as swirl or tumble. The model validation was conducted and there are little difference between experiments and simulation, this differences were reasonable. In spray simulation, the effects of model constants on spray tip penetration, spray patter and SMD were studied. Furthermore, the analysis of effects of breakup variables on combustion and emissions characteristics was conducted. The results show the KH-RT breakup model constants affects spray and combustion characteristics strongly. Increasing KH model variable (B1) and RT model constants ($C_{\tau}$, $C_{RT}$) induced slower breakup time.