• The Transactions of the Korean Institute of Electrical Engineers P
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• v.61 no.3
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• pp.116-121
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• 2012

Recently, in the field of renewable energy such as solar cells including the semiconductor and display industries, thin film deposition process is being diversified. Furthermore, to deal with trend of making high-quality and fast, the high-capacity and output plasma power supply which can control high density plasma is required. The biggest problem is arc discharge caused by using high voltage power supply. Thus, the key function of plasma power supply is to prevent arc discharge and there is a need to maintain the possible minimum arc energy. In DC sputtering power supply, on a periodic basis (-)voltage powering up is able to significantly reduce arcing, as well as arc discharge prevention, and maintaining uniform charge density. This conventional method for powering up (-)voltage requires heavy mutual inductance of the transformer to avoid distortion problem of the output voltage. This study is about energy recovery circuit for arc discharge prevention in sputtering plasma power supply. By using energy recovery circuit, it is possible to reduce the mutual inductance and size of the transformer dramatically, prevent distortion of the output voltage and has a stable output waveform. This work was proved through simulation and experimental study.

• The Transactions of the Korean Institute of Power Electronics
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• v.25 no.6
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• pp.469-476
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• 2020

This study presents the results of the research on power supplies for welding machine using MOSFET switches in high frequency switching for ease of design and use a 100 kHz switching frequency for high power density. The topology of the proposed power supplies for welding machine is ZVS-PWM full-bridge converter. The proposed converter is designed on a distributed transformer for ease of design and be used in a 100 kHz switching frequency for high power density. The problem of power imbalance of transformers occurring in parallel operation of transformers can be improved by applying common mode coupled inductor and the corresponding contents are experimented and verified in this paper to present conclusions.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.08a
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• pp.271-271
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• 2012

Many studies have been investigated on high density plasma source (Electron Cyclotron Resonance, Inductively Coupled Plasma, Helicon plasma) for large area source after It is announced that productivity of plasma process depends on plasma density. In this presentation, we will propose the new concept of the multiple source, which consists of a parallel connection of ICP sources and helicon plasma sources. For plasma uniformity, equivalent power (especially, equivalent current in ICP & Helicon) should distribute on each source. We design power feeding line as coaxial transmission line with same length of ground line in each source for equivalent power distribution. And we confirm the equivalent power distribution with simulation and experimental result. Based on basic study, we develop the plasma source for oxidation in semiconductor process. we will discuss the relationship between the processing parameters (With or WithOut magnet, operating pressure, input power ). In ICP, plasma density uniformity is uniform. In ICP with magnet (or Helicon) plasma density is not uniform. As a result, new design (magnet arrangement and gas distributor and etc..) are needed for uniform plasma density in ICP with magnet and Helicon.

• Journal of Biomedical Engineering Research
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• v.6 no.1
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• pp.19-30
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• 1985

This paper describes the EMG signals in frequency domain using power spectral density, The changes in the moan frequency can represent the energy distribution which results from changing in load before and during fatigue. Most of EMG signal power spectrum is located between 10 and 200Hz. Shifts of the high-energy regions of the power spectra can be inferred from the changes in the mean frequency. If the load is increased without fatigue-ocurring, the high frequency regions have more energy than the low frequency regions. And if load is increased during fatigue, the low frequency regions have more energy than the high frequency regions.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.11 no.5
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• pp.35-41
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• 2012

Liquified hydrogen peroxide as a monopropellant is drawing an attention as a power generating energy source for a machine requiring simple and light weight structure. The liquified hydrogen peroxide is attracted due to its outstanding applicability because it doesn't require an oxidizer and discharge a hazardous product. For the further industrial applications, however, a feasibility study should be carried out carefully in the aspect of the specific power density. In this study, a prototype of vane motor driven by the liquified hydrogen peroxide with high density of upper 95% was developed and its performance characteristic such as a specific power density was estimated via measuring pressure and rotation speed of the vane motor. The specific power density obtained by numerical simulation using FSI analysis supported by experimental results was up to $0.02kW/kg_{f}$, which reaches at the level of the latest developed fuel cell.

• KIEE International Transactions on Electrophysics and Applications
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• v.11C no.4
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• pp.99-106
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• 2001

An overview of Silicon Carbide (SiC) Static Induction Transistor (SIT) development is presented. Basic conduction mechanisms are introduced and discussed, including ohmic, exponential, and space charge limited conduction (SCLC) mechanisms. Additionally, the impact of velocity saturation and temperature effects on SCLC are reviewed. The small-signal model, breakdown voltage, power density, and different gate structures are also discussed, before a final review of published SiC SIT results. Published S-band (3-4 GHz) results include 9.5 dB of gain and output power of 120 W, and L-band (1.3 GHz) results include 400 W output power, 7.7 dB of gain, and power density of 16.7 W/cm.

• Journal of Power Electronics
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• v.2 no.3
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• pp.206-211
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• 2002

Silent gas discharge method has been widely applied fur ozone production, ultraviolet light and UV laser generation. Since ozone and ultraviolet applications have tendency to spread widely in industry, the development of efficient and low - cost power supply for such systems is an important task at present. This paper introduces high-frequency inverter type mode power supply designed fur ozone generation tube and ultraviolet generation excimer lamp and considerations on the design of the inverter and pulse density modulation control strategy applied in it.

• Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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• 2002.02a
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• pp.43-45
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• 2002

High current density Bi-2223 tapes have recently become commercially available. There are some important characteristics of the tapes, e.g. critical current, ac loss, fault current characteristics, for an application such as a power cable or a power transformer. They have been investigated experimentally and discussed in this paper.

• Proceedings of the KIEE Conference
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• 2002.11d
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• pp.67-69
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• 2002

This paper present increasing of Power density of slotless PMLSM by inserting core between phase winding. PM width is changed and PM is divided into two part to reduce and eliminate high order space harmonics affecting torque ripple. Flux density, back EMF, inductance, thrust, normal and detent force are computed by 2D FEM, and analysis values are compared with each other.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.95.1-95.1
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• 2005