• 제목/요약/키워드: High RPM

검색결과 1,182건 처리시간 0.034초

CMP 공정에서 Diamond Disk와 Pad PCR 상관관계 연구 (Interrelation of the Diamond Disk and pad PCR in the CMP Process)

  • 윤영은;노용한;윤보언;배성훈
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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    • pp.359-361
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    • 2006
  • As circuits become increasingly complex and devices sizes shrinks, the demands placed on global planarization of higher level. Chemical Mechanical Polishing (CMP) is an indispensable manufacturing process used to achieve global planarity. In the CMP process, Diamond Disk (DD) plays an important role in the maintenance of removal rate. According to studies, the cause of removal rate decrease in the early or end stage of diamond disk lifetime comes from pad surface change. We also presented pad cutting rate (PCR) as a useful cutting ability index of DD and studied PCR trend about variable parameters that including size, hardness, shape of DD and RPM, pressure of conditioner It has been shown that PCR control ability of pressure and shape is superior to RPM and size. High pressure leads to a decrease of cell open ratio of pad surface because polyurethane of pad is destroyed by pressure. So low pressure high RPM condition is a proper removal rate sustain. By examining correlations between RPM and pressure of conditioner, it has been shown that PCR safe zoneto satisfy proper removal rate has the range 0.06mm/hr to 0.12mm/hr.

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Development of threshing cylinder simulation model of combine harvester for high-speed harvesting operation

  • Min Jong Park;Hyeon Ho Jeon;Seung Yun Baek;Seung Min Baek;Su Young Yoon;Jang Young Choi;Ryu Gap Lim;Yong Joo Kim
    • 농업과학연구
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    • 제50권3호
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    • pp.457-468
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    • 2023
  • The purpose of this study is to develop a high-speed combine harvester. The performance was evaluated by composing a dynamic simulation model of a threshing cylinder and analyzing the amount of threshed rice grain during threshing operations. The rotational speed of the threshing cylinder was set at 10 rpm intervals from 500 rpm until 540 rpm, based on the rated rotational speed of 507 rpm. The rice stem model was developed using the EDEM software using measured rice stem properties. Multibody dynamics software was utilized to model the threshing cylinder and tank comprising five sections below the threshing cylinder, and the threshing performance was evaluated by weighing the grain collected in the threshing tank during threshing simulations. The simulation results showed that section 1 and 2 threshed more grains compared to section 3 and 4. It was also found that when the threshing speed was higher, the larger number of grains were threshed. Only simulation was conducted in this study. Therefore, the validation of the simulation model is required. A comparative analysis to validate the simulation model by field experiment will be conducted in the future.

디이젤 기관 연료분사계의 시뮬레이션 (simulation of the fuel-injection system in a diesel engine)

  • 채재우;오신규
    • 오토저널
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    • 제7권2호
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    • pp.45-54
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    • 1985
  • Recently, the problem of exhaust gas pollution is increasingly being aggravated by the active use of the Diesel engine. For the fuel-injection system which affects the composition of exhaust gas from the Bosch type single-hole nozzle in the Diesel engine, a mathematical model was set up to study pressure variations in the high pressure pipe, the injection rate, and the needle lift. The fundamental equations of the mathematical model have been solved by the Newton Raphson Method applying the Finite Diffrence Method. The effective stroke of the injection pump plunger due to a change in engine rpm was calculated by the measurement of Control Rack, Pinion, and Plunger sizes and by the use of Characteristic Curve of Governor. The computed results for the pressure variations in the high pressure pipe and needle lift at 800 rpm and 1000 rpm are in good agreement with experimental ones in general. By a developed program, the effects of other various parameters will by calculated for the performance of the fuel-injection system.

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소경 엔드밀에 의한 STS 304의 가공특성 (Machining characteristics of STS 304 by micro-endmill)

  • 김상진;함승덕;김형철;김기수
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1261-1264
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    • 2005
  • Recently, as researches and developments for milli-structure and micro machine are actively progressing, manufacturing technologies and skills for tiny small machine parts are getting more important. So, we have been trying to cut using high revolution air bearing spindle and micro-endmill, and studying for magnitude of cutting force, cutting force wave form and surface roughness. We figured out that in 60,000rpm is so slow that cutting is not perfact. Chatter occured to $2\mu{m}/rev\;at\;80,000rpm\;and\;4.4\mu{m}/rev$ at 100,000rpm. We confirmed that spindle run out increased surface roughness at high revolution.

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공기 포일 베어링으로 지지되는 초고속 마이크로 터보차져의 구동 안정성 향상에 관한 연구 (Stability Improvement of the Ultra-High Speed Micro Turbocharger Supported by Air Foil Bearings)

  • 곽용석;김창호;정진택;이용복
    • 대한기계학회논문집A
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    • 제32권7호
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    • pp.541-548
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    • 2008
  • To improve the operational stability of the 100 Watts class Micro Gas Turbine, the air foil bearing with additional damping material has been investigated. The key of structure is that a viscoelastic material is coated under the top foil. The compliant foil journal bearing and thrust bearing are designed to withstand high load of vibrations at the operational speed 870,000 rpm. Test is executed in room temperature. Rotor has stably operated above 480,000 rpm. It is over 55% of the designed speed 870,000 rpm. Synchronous and subsynchronous vibrations are both well controlled. Vibration amplitude diminished over 50%. With the help of increased damping resulting from the viscoelasticity, the rotor stability of Micro turbocharger has been improved.

수급식탈곡기(穗給式脫穀機)의 공급율제어(供給率制御)(III) -제어(制御)시스템의 응답실험(應答實驗)- (Feed Rate Control for the Head-Feed Thresher)

  • 최영수;정창주
    • Journal of Biosystems Engineering
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    • 제16권2호
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    • pp.148-158
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    • 1991
  • This study was undertaken to develop the feed rate control system for the head feed thresher by making use of the microprocessor and to evaluate the response of the system to a various threshing conditions. It was verified the performance of the control system through experiments. Control conditions were determined based on the simulation results of control system. The control system set at RH=500rpm, RL=480rpm for the bundle feed was considered optimum to give a high threshing capability and still to stabilize the feeding seed regardless of the bundle size. The control system for the continuous spread feed set at the range of LH=15mm, and LL=12mm gave a high control performance for the feeding mass of 1.1Kg/m and lower tested. In addition, the feed rate proportionality constant should be set lower than one in order to keep the rotational speed of threshing cylinder within the range of 500~520rpm.

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슬링거 연소기의 연소특성 (Combustion Characteristics of the Slinger Combustor)

  • 이강엽;이동훈;최성만;박정배;박영일;김형모;한영민
    • 한국추진공학회지
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    • 제8권1호
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    • pp.38-43
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    • 2004
  • 슬링거 연소기의 연소특성을 파악하기 위한 연구를 수행하였다. 연료는 고속으로 회전하는 축의 연료노즐을 통하여 연소기내로 분사된다. 회전분무시스템의 분무특성을 파악하기 위하여 PDPA를 이용하여 연료노즐의 회전속도 변화에 따른 분무입자의 크기를 측정하였다. 연구결과 SMD는 회전수가 5,000RPM일 때 약 70$\mu\textrm{m}$ , 10,000RPM일 때 60$\mu\textrm{m}$ , 20,000RPM일 때 40$\mu\textrm{m}$ 이었으며 SMD의 크기가 연료 노즐의 회전수가 증가할수록 작아짐을 알 수 있었다. 연소기 시험리그를 제작하여 한국항공우주연구원의 연소시험설비에서 점화 및 연소시험을 수행하였다. 시험결과 점화성능 및 연소효율은 연료노즐 회전수에 따라 증가하는 경향을 나타내고 있었으며, 연소기출구온도는 매우 균일한 온도분포를 나타내었다.

Derivation of Cubic and Hexagonal Mesoporous Silica Films by Spin-coating

  • Pan, Jia-Hong;Lee, Wan-In
    • Bulletin of the Korean Chemical Society
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    • 제26권3호
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    • pp.418-422
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    • 2005
  • By introducing spin-coating method to the evaporation induced self-assembly (EISA) process, a simple and reproducible route in controlling the mesophase of silica thin films has been developed for the first time in this work. When a comparatively solvent-rich Si-sol (The atomic ratio of TEOS : F127 : HCl : $H_2O$ : EtOH = 1 : 0.006 : 0.2 : 9.2 : 30) was used as coating solution, the mesophase of resultant silica films was selectively controlled by adjusting the spin-on speed. The cubic mesophase has been obtained from the coating at a low rpm, such as 600 rpm, while the 2-D hexagonal mesophase is formed at a high rpm, such as 2,500 rpm. At a medium coating speed, a mixture of cubic and hexagonal mesophase has been found in the fabricated films. The present results confirm that the evaporation rate of volatile components at initial step is critical for the determination of mesopore structures during the EISA process.

30,000rpm 고속 주축의 열특성 분석 (Thermal Characteristics Analysis of 30,000rpm High Speed Spindle)

  • 임정숙;유기한;정원지;김수태;이정환;이춘만
    • 한국정밀공학회지
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    • 제26권7호
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    • pp.120-126
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    • 2009
  • Thermal displacement of high speed spindle is very important problem to be solved. To solve heat generation and thermal displacement problems that influence on the product accuracy, it is very important to predict thermal characteristics of the spindle and it is positively necessary to select the conditions of cooling, flow rate and preload of bearings. In this paper, 30,000rpm($1.455{\times}10^6DmN$) spindle was designed and produced. The analysis of thermal deformation for heat generation of inner spindle was carried out using commercial program $ANSYS^{(R)}$ and the result was compared with measured data using $LabVIEW^{(R)}$ and SGXI-1600, 1125 and 1126 module. Temperature distribution and thermal displacement according to spindle speed are measured. Using this method, it is possible to predict and to improve thermal characteristic of high speed spindle by control spindle speed, bearing preload and cooling rate.

직접 구동방식 터보 압축기를 위한 통합 제어기 개발 (Development of An Integrated Controller for a Direct Drive Turbo Compressor)

  • 권정혁;변지섭;최중경
    • 전자공학회논문지SC
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    • 제40권4호
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    • pp.225-234
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    • 2003
  • 터보 압축기는 구조적으로 임펠러를 고속회전 시켜야한다. 범용전동기에 높은 기어비를 가진 기어박스를 이용하여 구현하였는데, 이는 관성 모멘트, 마찰손 및 압축기의 크기를 증가시켰다. 최근 터보 압축기의 연구는 초고속 동기전동기를 장착하고 있고 기어박스를 제거하여 크기와 마찰손을 최소화하는 방향으로 진행되고 있다. 본 연구에서는 150마력 70,000rpm 직접 구동방식의 터보 압축기를 개발하기 위하여 초고속 동기전동기용 인버터제어기, 공압제어기 및 MMI 기능을 통합한 단일 DSP(Digital Signal Processor) 구조의 통합제어기를 구현하였다. 이는 하드웨어적인 부분만 아니라 소프트웨어적인 측면에서도 역시 통합 작업이 필요하였다. 이러한 통합으로 하드웨어적으로는 제어 시스템이 간략화 되었으며, 소프트웨어적으로도 동일한 개발환경에서 각 제어기가 구현되고 통합되었다. 이를 개발 및 제작하여 150마력 70,000rpm 직접 구동 방식의 터보 압축기에 적용하였다.