• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.472-472
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• 2011

The capacitive coupled plasma (CCP) has been extensively used in the semiconductor industry because it has not only good uniformity, but also low electron temperature. But CCP source has some problems, such as difficulty in varying the ion bombardment energy separately, low plasma density, and high processing pressure, etc. In this reason, dual frequency CCP has been investigated with a separate substrate biasing to control the plasma parameters and to obtain high etch rate with high etch selectivity. Especially, in this study, we studied on the etching of $SiO_2$ by using the pulse-time modulation in the dual-frequency CCP source composed of 60 MHz/ 2 MHz rf power. By using the combination of high /low rf powers, the differences in the gas dissociation, plasma density, and etch characteristics were investigated. Also, as the size of the semiconductor device is decreased to nano-scale, the etching of contact hole which has nano-scale higher aspect ratio is required. For the nano-scale contact hole etching by using continuous plasma, several etch problems such as bowing, sidewall taper, twist, mask faceting, erosion, distortions etc. occurs. To resolve these problems, etching in low process pressure, more sidewall passivation by using fluorocarbon-based plasma with high carbon ratio, low temperature processing, charge effect breaking, power modulation are needed. Therefore, in this study, to resolve these problems, we used the pulse-time modulated dual-frequency CCP system. Pulse plasma is generated by periodical turning the RF power On and Off state. We measured the etch rate, etch selectivity and etch profile by using a step profilometer and SEM. Also the X-ray photoelectron spectroscopic analysis on the surfaces etched by different duty ratio conditions correlate with the results above.

• Journal of the Korean institute of surface engineering
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• v.34 no.5
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• pp.395-402
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• 2001

An induction thermal plasma system have been newly designed for advanced operation with a pulse modulated mode to control the plasma power in time domain and to create non-equilibrium effects such as fast quenching of the plasma to produce new functional materials in high rate. The system consists of MOSFET power supply with a maximum power of 50 kW with a frequency of 460 kHz, an induction plasma torch with a 10-turns coil of 80 mm diameter and 150 mm length and a vacuum chamber. The pulse modulated plasma was successfully generated at a plasma power of 30 kW and a high pressure of 100 kPa, with taking the on and off time as 10 ms, respectively. Measurements were carried out on the time-dependent spectral lines emitted from Ar species. The dynamic behavior of plasma temperature in a pulse cycle was estimated by the Boltzmann plot and the excitation temperature of Ar atom was found to be changed periodically from around 0.5 to 1.7 eV during the cycle. Two application regions of the induction thermal plasma newly generated were introduced to material processing with high rate synthesis based on non equilibrium effects, and to the finding of new arc quenching gases coming necessary for power circuit breaker, which is friendly with earth circumstance alternative to SF6 gas.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 1999.04a
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• pp.343-344
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• 1999

• Transactions of The Korea Fluid Power Systems Society
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• v.2 no.2
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• pp.8-13
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• 2005

This paper investigates a fast, accurate and inexpensive hydraulic motor speed control system using high speed on-off solenoid valves. In order to retain the advantages of the two position valve and obtain better performance, the valves are operated by pulse width modulation(PWM) control. PWM signal is generated from a LabWIEW program in microcomputer in order to set up various duty ratio and frequency of carrier wave in PWM signal with varying system parameters. As the results of experiments, the speed control of a hydraulic motor was successfully implemented using on-off solenoid valves. In order to attenuate the pressure ripple and speed variation due to discontinuously controlled flow through the on-off valves, a resonator hose fabricated for automobile power steering system was connected between the valve and a hydraulic motor. From experimental results obtained in the hydraulic motor system with a resonator hose, it was ascertained that the resonator hose showed excellent performances in reducing pressure ripple and motor speed variation.

• Journal of the Korean Society for Precision Engineering
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• v.7 no.2
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• pp.14-27
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• 1990

Electromagnetic Pulse Forming is the one of the high velocity forming method. When the electric energy which is charged in the capacitor bank is suddenly discharged into the electromagnetic coil, the high magnetic field occurs at the airgap between the electromagnetic coil and workpiece. Thus we can obtain the high electromagnetic pressure, which is proportional to the square of magnetic flux density. This is the basic principle of the electromagnetic pulse forming. In this paper, the equivalent L-R-C circuit is derived by computing the magnetic field and its loss of the total system. Thus, the values of the magnetic flux density and pressure can be obtained from the equation of this circuit. As a result, the computed and measured values of the maximum magnetic flux density and pressure are compared and the characteristics of the tapered field shaper are further discussed as follows; 1) The strength of magnetic flux density and pressure can be controlled by the charged energy and the size of the airgap between the inner field shaper and the workpiece. 2) During the design of the tapered field shaper, the penetration of the magnetic flux through the sharp edge should be considered.

• Journal of Advanced Marine Engineering and Technology
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• v.23 no.1
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• pp.69-78
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• 1999

In this study a new pattern of pressure control of hydraulic cylinder using high speed On-Off solenoid valve in the electro-hydraulic system has been suggested. The control valve is 3-way high speed On-Off solenoid valve which is operated by PWM(Pulse Width Modulation)control signal. The high speed On-Off solenoid valve has a tendency to induce severe pressure fluctuation in the hydraulic actuator so it has not been used for the purpose of closed loop control with direct pres-sure feedback. In this study closed loop control with direct pressure feedback is enabled by using a digital filter which has linear minimum mean square filter algorithm. Through some experiments it is confirmed that stable pressure control can be realized by the proposed control technique.

• Korean Journal of Agricultural Science
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• v.51 no.1
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• pp.9-23
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• 2024

This study investigates the physiological and psychological effects of a nature-based outdoor activity program in an environment reflecting the characteristics of forest and coastal areas on 30 firefighters (average age: 40.4 ± 9.8 years) who are frequently exposed to dangerous situations. Blood pressure, pulse pressure, and heart rate variability were used as physiological measurement indicators, and the Korean versions of PANAS (positive affect and negative affect schedule), WEMWBS (Warwick-Edinburgh mental well-being scale), and PRS (perceived restorativeness scale) were used as psychological measurement indicators. For four days and three nights, the participants experienced programs at Hallyeohaesang Nature Center and the surrounding mountains, seas, and islands, utilizing forest resources such as trekking on forest trails, walking barefoot, taking aromatic footbaths, meditating in forest oxygen domes, and lying on relaxation chairs, and programs utilizing marine resources such as taking a boat to an island, walking on forest trails with seascape views, and sailing on a yacht. Participants' systolic blood pressure and pulse pressure decreased, and participants' positive emotions increased and negative emotions decreased after the program. There was a statistically significant increase in mental well-being and perceived restorative environment. Through this study, it was found that nature-based outdoor activity programs based on forest and marine resources are effective in physiological and psychological stability of firefighters. It is hoped that the results of this study will be applied to other high-risk workers for PTSD, who have high stress levels, by combining forest healing and marine healing, and expanding the scope and diversity of programs in more diverse environments and conditions.

• Journal of Acupuncture Research
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• v.25 no.4
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• pp.51-58
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• 2008

Objectives : Sypsun-points are located at the tips of all fingers, 0.1 chon(寸) from the finger nails, totaling 10 points on both hands. These points have been used for emergency care, fainting, epilepsy, cerebrovascular accidents, hypertension, unconsciousness, high fever etc. in oriental medicine. The most common technique is bleeding with a needle at these points. We investigated whether Venesection at the Sybsun-points has effects on blood pressure and body temperature and pulse rate in humans aged from 20 to 30 who had no specific past history and whose vital signs are in normal range. Methods : 67 persons were studied from March to June 2008. They were composed of Sample group(n=36) and Normal group(n=31). Both two groups kept a steady state an hour before venesection. In both group, we checked blood pressure and body temperature and pulse rates 6 times( 30min. before and just before treatment, and just after, 30, 60, 90min after treatment). All study environments were same between sample and normal group. But only, normal group didn't carry out venesection at the Sybsun-points. Results : In a comparison of before and after venesection at the Sybsun-points, any Statistical significance was not evaluated. Though pulse rate in sample group was significantly decreased after venesection(p<0.05), it has no statistical significance because normal group's pulse rate was also significantly decreased and between two groups had no statistical difference. Conclusions : Though further study is needed, our findings suggest that venesection at the Sybsun-points has no significant effect on blood pressure and body temperature, and pulse rate in humans who had no specific past history and whose vital signs are in normal range. Also in that case, we may know that pain and tension result from venesection at the Sybsun-points have no significant effect on blood pressure and body temperature and pulse rate.

• Journal of Biomedical Engineering Research
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• v.27 no.3
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• pp.83-88
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• 2006

A new method of measuring pulse arrival time (PAT), which is usually used for the estimation of systolic blood pressure, in an unconstrained manner using a chair, is proposed. The capacitive-coupled ECG (CC-ECG) measurement system and the air cushion with balancing tubes system were used for unconstrained PAT measurement. Firstly, the correlation between the standard PAT (S-PAT) from the photoplethysmography (PPG) and the PAT measured in an unconstrained manner (U-PAT) was evaluated. It was observed that U-PAT, which is the time delay from the R-peak of ECG to the steepest decent point of air cushion pressure wave, is significantly correlated with the S-PAT. Secondly, systolic blood pressure (SBP) measured by the radial tonometer is compared to the U-PAT. The ten-beat averaged U-PAT removed respiration effects and demonstrated a high intra-subject correlation with SBP in all participants. Finally, the tonometry SBP was estimated from these U-PAT values for one participant intermittently during half a day.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.32 no.9
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• pp.740-753
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• 2008

The conventional Split Hopkinson Pressure Bar (C-SHPB) technique with aluminum pressure bars to achieve a closer impedance match between the pressure bars and the specimen materials such as hot temperature degraded POM (Poly Oxy Methylene) and PP (Poly Propylene) to obtain more distinguishable experimental signals is used to obtain a dynamic behavior of material deformation under a high strain rate loading condition. An experimental modification with Pulse shaper is introduced to reduce the nonequilibrium on the dynamic material response during a short test period to increase the rise time of the incident pulse for two polymeric materials. For the dynamic stress strain curve obtained from SHPB experiment under high strain rate, the Johnson-Cook model is applied as a constitutive equation, and we verify the applicability of this constitutive equation to the probabilistic reliability estimation method. The methodology to estimate the reliability using the probabilistic method such as the FORM and the SORM has been proposed, after compose the limit state function using Johnson-Cook model. It is found that the failure probability estimated by using the SORM is more reliable than those of the FORM, and the failure probability increases with the increase of applied stress. Moreover, it is noted that the parameters of Johnson-Cook model such as A and n, and applied stress affect the failure probability more than the other random variables according to the sensitivity analysis.