Computer Simulation and Control performance evaluation of Ultra Precision Positioning Apparatus using Piezo Actuator (Piezo Actuator를 이용한 초정밀 위치결정기구의 Computer Simulation 및 제어 성능평가)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 2000.11a
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- pp.118-122
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- 2000