• Title/Summary/Keyword: Hexagonal Si

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Effects of ${Y_2}{O_3}$Buffer Layer on Ferroelectric Properties of $YMnO_3$Thin Films Fabricated on Pt/$TiO_2$/$SiO_2$/Si Substrate (Pt/$TiO_2$/$SiO_2$/Si 기판 위에 제조된 $YMnO_3$박막의 강유전 특성에 미치는 ${Y_2}{O_3}$버퍼층의 영향)

  • 김제헌;강승구;은희태
    • Journal of the Korean Ceramic Society
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    • v.37 no.11
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    • pp.1097-1104
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    • 2000
  • MOD(Metal-Organic-Decomposition)법에 의해 $Y_2$O$_3$버퍼층에 Pt/TiO$_2$/SiO$_2$/Si 기판 위에 제조한 후, 그 표면 위에 졸-겔 방법으로 YMnO$_3$박막을 형성하였다. 기판의 종류와 수화조건 변화가 YMnO$_3$박막의 결정화 거동에 미치는 영향을 고찰하였으며, 또한 $Y_2$O$_3$버퍼층 유.무에 따른 Mn의 산화상태를 확인하고 이에 따른 유전특성 변화를 연구하였다. $Y_2$O$_3$버퍼층을 삽입하지 않고 직접 기판 위에 형성한 YMnO$_3$박막의 결정상은 기판의 종류 및 Rw 변화에 관계없이 orthorhombic 구조임이 확인되었다. 반면, $Y_2$O$_3$버퍼층 위에 형성된 YMnO$_3$박막의 경우에는 Rw($H_2O$/alkoxide mole ratio)가 0~6 범위 내에서 낮아질술고 hexagonal 결정상 성장에 유리하였으며, 또한 Pt(111)/TiO$_2$/SiO$_2$/Si 기판이 Ptd(200)/TiO$_2$/SiO$_2$/Si에 비하여 결정상 형성에 용이하였다. $Y_2$O$_3$버퍼층은 YMnO$_3$결정상 내에서 $Mn^{4+}$ 이온형성을 억제함으로써 누설전류밀도가 크게 감소되는 효과를 주었으며, 동시에 강유전 특성을 지닌 hexagonal 결정상 형성에 유리하게 작용하였다. 결론적으로, $Y_2$O$_3$는 Pt가 코팅된 Si 기판 위에 YMnO$_3$박막 제조시 그 강유전 특성을 향상시켜주는 우수한 버퍼층 재료임을 확인하였다.

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The Properties of GaN Grown by BVPE Method on the Si(111) Substrate with Pre-deposited Al Layer (Al 박막이 증착 된 Si(111) 기판 위에 HVPE 방법으로 성장한 GaN의 특성)

  • Shin Dae Hyun;Baek Shin Young;Lee Chang Min;Yi Sam Nyung;Kang Nam Lyong;Park Seoung Hwan
    • Journal of the Korean Vacuum Society
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    • v.14 no.4
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    • pp.201-206
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    • 2005
  • In this work, we tried to improve the fabrication process in HVPE (Hydride Vapor Phase Epitaxy) system by using Si(111) substrate with pre-deposited Al layer. PL measurements was done for samples with and without pre-deposited Al on Si and it was also examined the dependence of the optical characteristic properties on AlN buffer thickness for GaN/AIN/Al/Si. A sample with thin Al nucleation layer on Si substrate reveals a better optical property than the other. And it suggests that the thickness for AlN buffer layer with thin Al nucleation layer on Si(111) substrate is most proper about $260{\AA}$ to grow GaN in HVPE system. The surface morphology of GaN clearly shows the hexagonal crystallization. The XRD pattern showed strong peak at GaN{0001} direction.

Thermal Stability Study of $Eu^{2+}-doped$ $BaAl_2Si_2O_8$ Phosphor using Polymorphism for Plasma Display Panel applications

  • Im, Won-Bin;Kim, Yong-Il;Jeon, Duk-Young
    • 한국정보디스플레이학회:학술대회논문집
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    • 2005.07b
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    • pp.1568-1571
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    • 2005
  • We have evaluated thermal stability of a $BaAl_2Si_2O_8:Eu^{2+}$ $(BAS:Eu^{2+})$, which have polymorph property such as hexagonal, monoclinic structure depending upon firing temperature. When both polymorph $BAS:Eu^{2+}$ were baked in air at 500 $^{\circ}C$ for 30 min, the photoluminescence (PL) intensity of $monoclinic-BAS:Eu^{2+}$ was maintained of the initial intensity. However, the PL intensity of $hexagonal-BAS:Eu^{2+}$ decreased significantly, corresponding to about 34 %. From analyses of Rietveld refinement, the difference of thermal stability of both $BAS:Eu^{2+}$ can be ascribed to both crystal structure of host materials and the average interatomic distances between $Eu^{2+}$ ion and oxygen their crystal structure which plays a key role of shield for Eu2+ ions against oxidation atmosphere.

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Raman Spectroscopic Study of CVD-grown Graphene on h-Boron Nitride Substrates

  • An, Gwang-Hyeon;Go, Taek-Yeong;Ryu, Sun-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.382-382
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    • 2011
  • 이차원 결정인 그래핀(graphene)은 전하도핑(charge doping)과 기계적 변형에 민감하기 때문에 기판의 물리 및 화학적 구조 및 특성에 따라 그래핀의 물성이 크게 영향을 받는다고 알려져 있다. 특히 널리 사용되고 있는 산화실리콘($SiO_2$/Si) 기판에 존재하는 나노미터 크기의 굴곡과 전하 트랩(charge trap)은 전하 이동도 및 화학적 안정성 등의 면에서 그래핀 고유의 뛰어난 물성을 제한하는 것으로 알려져 있다. 본 연구에서는 비정질 산화실리콘 기판을 대조군으로 삼아 편평도가 높은 결정성 h-BN (hexagonal boron nitride) 기판이 그래핀에 미치는 영향을 관찰하였다. 화학기상증착법(chemical vapor deposition 또는 CVD)으로 성장시킨 그래핀을 각 기판에 전사시킨 후 라만 분광법을 통해 전하 도핑 및 기계적 변형 정도를 측정하였다. h-BN 위에서는 외부 환경에서 기인하는 전하 도핑 정도가 산화실리콘 기판보다 적게 관찰되었다. 또한 h-BN 위에 고착된 그래핀 시료에서는 기판-그래핀 상호작용에서 기인하는 것으로 보이는 새로운 라만 분광 특성이 관찰되었다.

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Phase Identification of the Interfacial Reaction Product of $SiC_p/Al$ Composite Using Convergent Beam Electron Diffraction Technique (수렴성 빔 전자회절법을 이용한 $SiC_p/Al$ 복합재에서의 계면 생성물의 상분석)

  • Lee, Jung-Ill;Lee, Jae-Chul;Suk, Hyun-Kwang;Lee, Ho-In
    • Applied Microscopy
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    • v.26 no.1
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    • pp.95-104
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    • 1996
  • A comprehensive methodology to characterize the interfacial reaction products of $SiC_p/2024$ Al composites is introduced on the basis of the experimental results obtained using XRD, SEM and TEM. XRD performed on the electrochemically extracted $SiC_p$ and bulk $SiC_p/2024$ Al composite have shown that the interfacial reaction products consist of $Al_{4}C_3$ having hexagonal crystallographic structure, pure eutectic Si having diamond cubic crystallographic structure, and $CuAl_2$, having tetragonal crystalloraphic structure, respectively. According to the images observed by SEM, $Al_{4}C_3$, which has been reported to have needle shape, has a hexagonal platelet-shape and eutectic Si is found to have a dendritic shape. In addition eutectic $CuAl_2$, was observed to form near interface and/or along the grain boundaries. In order to confirm the results obtained by XRD, the primitive cell volume and reciprocal lattice height of such interfacial reaction products were calculated using the data obtained from convergent beam electron diffraction (CBED) patterns, and then compared with theoretical values.

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The Effects of $TiO_2$ Underlayer on Magnetic Properties of Hexagonal Barium-Ferrite(BaM) Thin Films (Hexagonal Barium-Ferrite(BaM) 박막의 미세구조와 자기적 특성에 미치는 $TiO_2$하지층의 효과)

  • 김동현;남인탁;홍양기
    • Journal of the Korean Magnetics Society
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    • v.11 no.3
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    • pp.129-133
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    • 2001
  • In this paper, we studied structural and magnetic properties of Ba-ferrite thin film deposited on Si(100) substrate with TiO$_2$ underlayer. Ba-ferrite thin films with TiO$_2$ underlayer were deposited by reactive RF/DC magnetron sputtering system at room temperature. TiO$_2$ underlayer was reactive sputtered with $O_2$. After deposition, the thin films were annealed at vatious temperatures to get the crystallized sample. Underlayer was used to prevent interdiffusion from Ba-ferrite thin film to substrate. The growth of Ba-ferrite thin films was influenced by TiO$_2$ underlayer. Easy magnetization direction is in-plane. From these results the Ba-ferrite film with TiO$_2$ underlayer can be used as longitudinal recording media.

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MOCVD of GaN Films on Si Substrates Using a New Single Precursor

  • Song, Seon-Mi;Lee, Sun-Sook;Yu, Seung-Ho;Chung, Taek-Mo;Kim, Chang-Gyoun;Lee, Soon-Bo;Kim, Yun-Soo
    • Bulletin of the Korean Chemical Society
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    • v.24 no.7
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    • pp.953-956
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    • 2003
  • Hexagonal GaN (h-GaN) films have been grown on Si(111) substrates by metal organic chemical vapor deposition using the azidodiethylgallium methylamine adduct, Et₂Ga(N₃)·NH₂Me, as a new single precursor. Deposition was carried out in the substrate temperature range 385-650 °C. The GaN films obtained were stoichiometric and did not contain any appreciable amounts of carbon impurities. It was also found that the GaN films deposited on Si(111) had the [0001] preferred orientation. The photoluminescence spectrum of a GaN film showed a band edge emission peak characteristic of h-GaN at 378 nm.

Fabrication of various Si particle by Pulsed Laser Ablation (PLA법에 의한 Si 미립자 제작)

  • Kim, M.S.;Yoshimoto, Mamoru;Koinuma, Hideomi
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11b
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    • pp.121-125
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    • 2001
  • We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles by the He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient gas pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

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Fabrication of various Si particle by Pulsed Laser Ablation (PLA법에 의한 Si 미립자 제작)

  • ;Mamoru Yoshimoto;Hideomi Koinuma
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.121-125
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    • 2001
  • We study the feasibility of synthesizing Si particles using PLA method. In the previous studies, it was possible to control the size of Si nanoparticles bythe He gas pressure. In this study, we fabricated sub-micron size Si particles with various shapes such as conical, hexagonal, and ring by controlling not only the ambient as pressure but also the laser energy density. Furthermore, we found that the conical Si particles were uniform-sized and had step shape when observed from FE-SEM and AFM. The conical Si particle has the same crystal structure as the bulk single crystalline Si by the analysis of the Raman scattering. It is shown that the relationship between the laser energy density and the He gas pressure inside the chamber affects the shape of the Si particle.

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Characterization and Conversion Electron Mössbauer Spectroscopy of HoMn1-x-FexO3 Thin Films by Pulsed Laser Deposition (PLD를 이용한 HoMn1-x-FexO3 박막 제조 및 후방 산란형 뫼스바우어 분광 연구)

  • Choi, Dong-Hyeok;Shim, In-Bo;Kim, Chul-Sung
    • Journal of the Korean Magnetics Society
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    • v.17 no.1
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    • pp.18-21
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    • 2007
  • The hexagonal $HoMn_{1-x}-Fe_xO_3$(x=0.00, 0.05) thin films were prepared using pulsed laser deposition(PLD) method on $Pt/Ti/SiO_2/Si$ substrate. The microstructure and magnetic properties have been studied by x-ray diffraction(XRD), atomic force microscopy (AFH), scanning electron microscope(SEM:), x-ray photoelectron spectroscopy(XPS), and conversion electron $M\"{o}ssbauer$ spectroscopy(CEMS). From the analysis of the x-ray diffraction patterns, the crystal structure for all films was found to be a hexagonal($P6_3cm$), which was preferentially grown along(110) direction. The lattice constant $c_0$ of the film with x=0.05 was close to that of single crystal, whereas lattice constant $a_0$ with respect to single crystal shows a slight decrease. This difference of lattice parameters between film and single crystal was caused by the lattice mismatch between the film and $Pt/Ti/SiO_2/Si$ substrate. Conversion electron $M\"{o}ssbauer$ spectrum of $HoMn_{0.95}Fe_{0.05}O_3$ thin film shows an asymmetry doublet absorption ratio at room temperature, which is due to the oriented direction of crystallographic domains. This is corresponding with analysis of x-ray diffraction. The quadrupole splitting(${\Delta}E_Q$) at room temperature is found to be $1.62{\pm}0.01mm/s$. This large ${\Delta}E_Q$ was caused by asymmetry environment surrounding Fe ion.