• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.421-422
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• 2008

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.140.1-140.1
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• 2015

Currently, As Plasma application is expanded to the industrial and medical industrial, Low temperature plasma characteristics became important. Especially in Medical industrial, Low temperature plasma directly adapted to human skin, so their plasma parameter is important. One of the plasma parameters is electron density, some kinds of method to measuring electron density are Thomson scattering spectroscopy and Millimeter-wave transmission measurement. But most methods is expensive to composed of experiment system. Heterodyne interferometer system is cheap and simple to setting up, So we tried to measuring electron density by Laser heterodyne interferometer. To measuring electron density at atmospheric pressure, we need to obtain the phase shift signal. And we use a heterodyne interferometer. Our guiding laser is Helium-Neon laser which generated 632 nm laser. We set up to chopper which can make a laser signal like a pulse. Chopper can make a 4 kHz chopping. We used Needle jet as Ne plasma sources. Interference pattern is changed by refractive index of electron density. As this refractive index change, phase shift was occurred. Electron density is changed from Townsend discharge's electron bombardment, so we observed phenomena and calculated phase shift. Finally, we measured electron density by refractive index and electron density relationship. The calculated electron density value is approximately 1015~1016 cm-3. And we studied electron density value with voltage.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Korean Journal of Optics and Photonics
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• v.10 no.1
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• pp.68-72
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• 1999

We demonstrate a new pulse characterization scheme relying on self-heterodyning that uses intracavity frequency shifter in a fiber soliton laser with frequency shifted feedback. By heterodyning the frequency-shifted pulse stream with the unshifted one, and by measuring the beat strength with varying the delay length between two pulse streams, we obtain the amplitude autocorrelation function from which we estimate the pulsewidth. The result is in good agreement with that obtained by the autocorrelation relying on the second harmonic generation.

• Korean Journal of Optics and Photonics
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• v.13 no.1
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• pp.70-72
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• 2002

Amplified pulsed laser beam with narrow linewidth was generated from CW laser beam with narrow linewidth by using frequency doubled Nd:YAG laser beam and Bethune cell. The degree of the frequency chirping of the amplified pulse laser was measured by using the heterodyne method and obtained by calculating instantaneous phase change from heterodyne beating signals. The frequency chirping of amplified pulsed laser beam from CW laser beam with sub-MHz linewidth by 10 ns pulse was 80 MHz so that pulsed laser beam with very narrow linewidth was obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.195-198
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• 2002

Demand for high precision measurement of large area is increasing in many industrial fields. White-light Scanning Interferometer(WSI) is a well-known method for 3D profile measurement. However WSI has some limitations in a measurement range because of the sensing mechanism. Therefore, in this paper we use a heterodyne laser interferometer to get over the limitations of a short measurement range in WSI, We suggest a new WSI system combined with heterodyne laser interferometer. This system is aimed at eliminating Abbe error with measuring the focus point directly. With the use of triggering functionality of WSI, we can use this system as a probe of a precision stage such as a probe of CMM. The suggested system gives a repeatability of 87 nm in the absolute distance measurement test under the laboratory environment.

• Proceedings of the KIEE Conference
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• 2008.07a
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• pp.1751-1752
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• 2008

The heterodyne laser interferometer has a nano-meter scale resolution. However, the unwanted nonlinearity error caused from frequency-mixing limits the ultra-precise resolution. In this paper, we propose a recursive WLS algorithm to improve the resolution of heterodyne laser interferometer. Some experimental results show an effectiveness of the recursive WLS algorithm in nano-meter scale resolution.

• Proceedings of the KIEE Conference
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• 2007.04a
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• pp.86-88
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• 2007

In the semiconductor manufacturing industry, the heterodyne laser interferometer plays as an ultra-precise measurement system. However, the heterodyne laser interferometer has some unwanted nonlinearity error which is caused from frequency-mixing. This is an obstacle to improve the measurement accuracy in nanometer scale. In this paper we propose a compensation algorithm based on RLS(recursive least square) method and artificial intelligence method, which reduce the nonlinearity error in the heterodyne laser interferometer. With the capacitance displacement sensor we get a reference signal which can be transformed into the intensity domain. Using the back-propagation Neural Network method, we train the network to track the reference signal. Through some experiments, we demonstrate the effectiveness of the proposed algorithm in measurement accuracy.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.34-39
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• 2005

The precision stage is an essential device for optic fiber assembly systems, micro machines and semiconductor equipments. A new piezoelectric inchworm type actuator is proposed to implement an actuator-integrated long-stroke linear stage. An in-and-quadrature phase (I/Q) heterodyne interferometer is developed as a feedback sensor of a servo system, and a synchronized counting method is proposed. The proposed measurement system can measure the accurate position of fast moving object with robustness to external sensing noise from actuator vibration. The developed servo stage will be applied to optic fiber device assembly system.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.13 no.6
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• pp.507-513
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• 2002

In this paper, the receiver using Heterodyne type is designed and implemented for a pulse radar at 9.4 GHz. The If amplifier, which occupies a significant size in a Heterodyne receiver for pulse radars, can be removed. Furthermore, by using detector logarithmic video amplifier in baseband, the receiver has a small size and it's characteristic shows a high dynamic range and sensitivity. From the results of measurements, the minimum receiver power of -70 dBm and selectivity of 55 dB are obtained.