• Title/Summary/Keyword: Heat treatment process

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저온 공정 온도에서 $Al_2O_3$ 게이트 절연물질을 사용한 InGaZnO thin film transistors

  • 우창호;안철현;김영이;조형균
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.06a
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    • pp.11-11
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    • 2010
  • Thin-film-transistors (TFTs) that can be deposited at low temperature have recently attracted lots of applications such as sensors, solar cell and displays, because of the great flexible electronics and transparent. Transparent and flexible transistors are being required that high mobility and large-area uniformity at low temperature [1]. But, unfortunately most of TFT structures are used to be $SiO_2$ as gate dielectric layer. The $SiO_2$ has disadvantaged that it is required to high driving voltage to achieve the same operating efficiency compared with other high-k materials and its thickness is thicker than high-k materials [2]. To solve this problem, we find lots of high-k materials as $HfO_2$, $ZrO_2$, $SiN_x$, $TiO_2$, $Al_2O_3$. Among the High-k materials, $Al_2O_3$ is one of the outstanding materials due to its properties are high dielectric constant ( ~9 ), relatively low leakage current, wide bandgap ( 8.7 eV ) and good device stability. For the realization of flexible displays, all processes should be performed at very low temperatures, but low temperature $Al_2O_3$ grown by sputtering showed deteriorated electrical performance. Further decrease in growth temperature induces a high density of charge traps in the gate oxide/channel. This study investigated the effect of growth temperatures of ALD grown $Al_2O_3$ layers on the TFT device performance. The ALD deposition showed high conformal and defect-free dielectric layers at low temperature compared with other deposition equipments [2]. After ITO was wet-chemically etched with HCl : $HNO_3$ = 3:1, $Al_2O_3$ layer was deposited by ALD at various growth temperatures or lift-off process. Amorphous InGaZnO channel layers were deposited by rf magnetron sputtering at a working pressure of 3 mTorr and $O_2$/Ar (1/29 sccm). The electrodes were formed with electron-beam evaporated Ti (30 nm) and Au (70 nm) bilayer. The TFT devices were heat-treated in a furnace at $300^{\circ}C$ and nitrogen atmosphere for 1 hour by rapid thermal treatment. The electrical properties of the oxide TFTs were measured using semiconductor parameter analyzer (4145B), and LCR meter.

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Synthesis of (Ba0.5Sr0.5)0.99Co0.2Fe0.8O3-δ (BSCF) and the Electrochemical Performance of the BSCF/GDC(Buffer)/ScSZ ((Ba0.5Sr0.5)0.99Co0.2Fe0.8O3-δ(BSCF)의 합성 및 BSCF/GDC(Buffer)/ScSZ의 전기화학적 특성)

  • Lim, Yong-Ho;Hwang, Hae-Jin;Moon, Ji-Woong;Park, Sun-Min;Choi, Byung-Hyun;Lee, Mi-Jai
    • Journal of the Korean Ceramic Society
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    • v.43 no.6 s.289
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    • pp.369-375
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    • 2006
  • [ $(Ba_{0.5}Sr_{0.5})_{0.99}Co_{x}Fe_{1-x}O_{3-{\delta}}$ ] [x=0.8, 0.2](BSCF) powders were synthesized by a Glycine-Nitrate Process (GNP) and the electrochemical performance of the BSCF cathode on a scandia stabilized zirconia, $[(Sc_{2}O_3)_{0.11}(ZrO_2)_{0.89}]-1Al_{2}O_3$ was investigated. In order to prevent unfavorable solid-state reactions between the cathode and zirconia electrolyte, a GDC ($Gd_{0.1}Ce_{0.9}O_{2-{delta}}$) buffer layer was applied on ScSZ. The BSCF (x = 0.8) cathode formed on GDC(Buffer)/ScSZ(Disk) showed poor electrochemical property, because the BSCF cathode layer peeled off after the heat-treatment. On the other hand, there were no delamination or peel off between the BSCF and GDC buffer layer, and the BSCF (x = 0.2) cathode exhibited fairly good electrochemical performances. It was considered that the observed phenomenon was associated with the thermal expansion mismatch between the cathode and buffer layer. The ohmic resistance of the double layer cathode was slightly lower than that of the single layer BSCF cathode due to the incorporation of platinum particle into the BSCF second layer.

High Temperature Desulfurization over ZnO-Fe2O3 Mixed Metal Oxide Sorbent (ZnO-Fe2O3 복합금속 산화물을 이용한 고온에서의 황화수소 제거에 관한 연구)

  • Lee, Jae-Bok;Lee, Young-Soo;Yoo, Kyong-Ok
    • Journal of Environmental Health Sciences
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    • v.20 no.1
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    • pp.62-67
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    • 1994
  • Introduction : Recently, water and environmental pollution becomes serious social problem and high technology makes this pollution accelerate. Hydrogen sulfide, the main subject of our research, is one of the most dangerous air pollutant like SO$_x$ and NO$_x$. The major contaminant in coal gasification is H$_2$S, which is very toxic, hazardous and extremely corrosive. Therefore, control of hydrogen sulfide to a safe level is essential. Although commercial desulfurization process called liquid scrubbing is effective for removal of H$_2$S, it has drawbacks, the loss of sensible heat of the gas and costly wastewater treatment. Many investigations are carried out about high-temperature removal ol H$_2$S in hot coal-derived gas using metal oxide or mixed metal qxide sorbents. It was reported that ZnO was very effective sorbent for H2S removal, but it has big flaw to vaporize elemental zinc above 600\ulcorner \ulcorner As alternative, metal oxides such as CaO, $Fe_2O_3$, TiO$_2$ and CuO were added to ZnO. Especially, different results are reported for $Fe_2O_3$ additive. Tamhankar et al. reported SiO$_2$ with 45 wt% $Fe_2O_3$ sorbent is favorable for removal of H$_2$S and regeneration.

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Influence of Activation Temperature on Surface and Adsorption Properties of PAN-based Activated Carbon Fibers/Phenolic Resin Matrix Composites (활성화 온도에 의한 PAN계 활성탄소섬유/페놀수지 복합재료의 표면 및 흡착특성)

  • 박수진;김기동;이재락
    • Polymer(Korea)
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    • v.24 no.1
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    • pp.97-104
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    • 2000
  • PAN-based activated carbon fibers/phenolic resin matrix composites (ACFCs) were manufactured via molding process with oxidized carbon fabrics (plain-type) and phenolic resin (resole-type) compounded by 70 : 30 wt%. The green body (as molded) was submitted to carbonization (at 100$0^{\circ}C$) in an inert environment and activation (at 700, 800, 900 and 100$0^{\circ}C$) in a $CO_2$ environment. In this work, the influence of activation temperatures was investigated in surface properties, such as pH, acid- and base-values by titration method, and in adsorption properties, i.e., specific surface area and pore structures by BET-method of the composites. Also, the pressure drops of the specimens were calibrated by ASTM. As a result, the activation temperature influenced the surface property of ACFCs. When the activation temperature was higher than 90$0^{\circ}C$, the surface was gradually developed in basic nature. And, the evolutions of specific surface area, total pore volume and pore size distribution of ACFCs could be easily confirmed the dependence on the activation temperature. Among them, well-developed pore structure from adsorption characteristics was changed of the ACFCs activated at 90$0^{\circ}C$. Also, the pressure drop was slightly decreased with increasing the temperature due to increasing the burn-off with heat treatment temperature of ACFCs.

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Mechanical Properties of Ta/TaN Multilayer (Ta/TaN 복합 다층 피막의 기계적 특성)

  • Gang, Yeong-Gwon;Lee, Jong-Mu;Choe, Sang-Uk
    • Korean Journal of Materials Research
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    • v.9 no.8
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    • pp.837-842
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    • 1999
  • The Ta/TaN multilayer structure with repeating layers of a poly-crystalline Ta layer of high ductility and a TaN layer of high hardness is expected to exhibit toughness. This paper reports the results on the hardness and the adhesion strength of Ta/TaN multilayers and compositional gradient Ta/TaN layers deposited on the high speed steel substrate by reactive sputtering as a function of annealing temperature. The TaN film deposited with the $N_2$/Ar ratio of 0.4 in the reactive sputtering process exhibits the highest crystallinity, and the highest hardness and the results of scratch test of the Ta/TaN multilayers. The hardness and adhesion strength of the Ta/TaN multilayers becomes deteriorated with increasing the annealing temperature in the heat treatment right after depositing the layers. Therefore, post-annealing treatments are not desirable in the case of the Ta/TaN multilayers from the standpoint of mechanical properties. Also the hardness of Ta/TaN multilayers increases with decreasing the compositional modulation wavelength, but the adhesion property of the layers is nearly independent of the wavelength. On the other hand, the compositional gradient Ta/TaN film exhibits the highest hardness and the value of scratch test for the post-annealing temperatures of 20$0^{\circ}C$ and 40$0^{\circ}C$, respectively. This tendency of the compositional gradient Ta/TaN films differs from that of the Ta/TaN multilayers.

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A Comparative Study on the Metallurgical Characteristics of the Iron Knife Using Traditional Iron-Making Method (전통 제철법을 적용하여 제작한 철제 칼의 금속학적 특성에 관한 비교 연구)

  • Cho, Sung Mo;Cho, Nam Chul;Han, Jung Uk
    • Journal of Conservation Science
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    • v.34 no.5
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    • pp.433-442
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    • 2018
  • In this study, metal properties were compared by preparingthree iron knives from steel ingots produced via traditional iron-making, and ingot which jointed the steel of modern times. Metal microscope and SEM-EDS analysis revealed fine ferrite and pearlite structures of the hypo-eutectoid steel of Fe-C alloys. All samples also exhibited martensite on the blade of the knife. By Vicker's hardness analysis, the hardness of the sand iron knife (K1) was 533.38 HV, sand iron-nickel steel knife (K3) was 514.8 HV, and sand iron-carbon steel knife (K2) was 477.02 HV. The mass reduction due to wear was 0.058% for K1, 0.059% for K3, and 0.144% for K2. EPMA(Electron probe micro-analyzer) analysis of the surface pattern of the specimens confirmed that the patterns were exposed due to differences in the content of C or the chemical composition. Additional research on heat treatment processes is needed to increase the abrasion resistance of blades. Traditional steel ingots could produce high-quality steel if combined with nickel steel.

Studies on Chemical Properties and Thermal Analysis of (Sr,M)FeO3-y System (M=Ca) ((Sr,M)FeO3-y계(M=Ca)의 화학적 성질과 열분석에 대한 연구)

  • Lee, Eun-Seok
    • Applied Chemistry for Engineering
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    • v.8 no.6
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    • pp.954-959
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    • 1997
  • The solid solutions of the $Sr_{1-X}M_XFeO_{3-y}$ (x=0.1, 0.2, 0.3, 0.4, 0.5, M=Ca) system having perovskite structures were prepared in air by heat treatment at 1473 K for 18hr. X-ray diffraction assigns cubic system for all the samples and shows that the lattice volume of each system decreases with increasing x value until x=0.3, but increases abruptly from x=0.4. The mole fractions of $Fe^{4+}$ ion($\tau$ value), the amounts of oxygen vacancy (y value) and finally nonstoichiometric chemical formulas for each composition were determined from Mohr salt analysis. TG/DTA thermal analysis (temperature range: 300~1173K) exhibits that 3-y values of the samples having x=0.1 and 0.2, decrease with temperature and increase almost reversibly with decreasing temperature. The samples of $x{\geq}0.3$, however, didn't show the reversible weight change and the 3-y values of them were nearly 2.5 in cooling process. Conductivities of each sample were varied within the semiconductivity range at relatively low temperature. And the conductivity at constant temperature decreases steadily with x value. The conduction mechanism of this ferrite system may be proposed as a hopping model of conducting electrons between the mixed valence states. At high temperature semiconductivity of each sample changed into metallic property.

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Study on Seombody Drying (섬바디의 건조에 관한 연구)

  • Park, Kyung-Kyu;Chung, Chang-Joo
    • Journal of Biosystems Engineering
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    • v.1 no.1
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    • pp.55-55
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    • 1976
  • An experimental work was conducted to develop an optimum operating system of various hay drying systems ; sun-drying with long hay, sun-drying after chopping, sun-drying after crushing, heated air drying after chopping using batch-type dryer and heated air drying after crushing using tunnel-type dryer. Seombody having 60 cm long and initial moisture content of approximately 79 % in wet basis was used for the experiment. The criteria selected for determining the optimum operating condition were the drying performance rate, the production cost and quality of dried matter of each drying systems. The result of this study are summarized as follows : 1. Drying characteristics of leaves of long stem hay, chopped seombody and crushed one were obtained by maintaining the oven temperature at 70 degrees centigrade. The required drying times for various samples to approximately 15% moisture content in wet basis were about 50 min .for leaves ; 160 min. for crushed hay ; 250 min. for chopped hay ; 340min. for ling hay and more than 360 min .for stems. The drying time of crushed hay was required about 50 % of that for the uncrushed long hay. Such a significant difference of drying of time between the leaf and long stem may indicate that an effective drying of seombody may not be achieved unless any kind of special process treatment for the whole hay is undertaken. 2. In each individual drying system, the following conclusions were drawn: a. After 8 days sun-drying on concrete floor under good days with average tempe?rature at $256{\circ}C$ and relative humidity at 55% at 2 P.M., the moisture content of long hay was still above 25 5'~ and the leaf loss during drying caused by wind and rough handling was more than 50 ~G. b. It was possible to dry the chopped seombody by sun-drying down to about 10 % moisture content within 5 days, however, a stock of heat and discolouration phenomena were observed during the drying, which may be due to the increased deposit-density by chopping, resulting in lowering the quality of the dried product. c. Sun-drying for the crushed material by hay-conditioner was required about 4 days to reduce the moisture content to about 10 %, keeping the quality of dried product at good grade. o. The optimum deposit-depth of the chopped seombody in the batch-type dryer used was about 28cm with about 42kg/hr of drying performance rate. However, it was necessary to overturn the materials between the upper and lower layers in order to obtain a good quality of dried product. d. The drying performance rate by the tunnel-type drier was highest among those of drying systems tested, giving the rate of approximately 400kg/day. 3. On reviewing the individual drying system for seombody, it was possible to draw conclusion that the best system was tunnel drying with the crushed seombody as far as the performance rate was concerned. However, the methods gives the highest operational cost. The system for the lowest operational cost with good quality of dried product was the sun-drying with the crushed material. Accordingly, it may be recommended that the system of sun-drying for the crushed seombody may be the most feasible system presently applicable to farm-level operation.

Study on Seombody Drying (섬바디의 건조에 관한 연구)

  • 박경규
    • Journal of Biosystems Engineering
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    • v.1 no.1
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    • pp.56-63
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    • 1976
  • An experimental work was conducted to develop an optimum operating system of various hay drying systems ; sun-drying with long hay, sun-drying after chopping, sun-drying after crushing, heated air drying after chopping using batch-type dryer and heated air drying after crushing using tunnel-type dryer. Seombody having 60 cm long and initial moisture content of approximately 79 % in wet basis was used for the experiment. The criteria selected for determining the optimum operating condition were the drying performance rate, the production cost and quality of dried matter of each drying systems. The result of this study are summarized as follows : 1. Drying characteristics of leaves of long stem hay, chopped seombody and crushed one were obtained by maintaining the oven temperature at 70 degrees centigrade. The required drying times for various samples to approximately 15% moisture content in wet basis were about 50 min .for leaves ; 160 min. for crushed hay ; 250 min. for chopped hay ; 340min. for ling hay and more than 360 min .for stems. The drying time of crushed hay was required about 50 % of that for the uncrushed long hay. Such a significant difference of drying of time between the leaf and long stem may indicate that an effective drying of seombody may not be achieved unless any kind of special process treatment for the whole hay is undertaken. 2. In each individual drying system, the following conclusions were drawn: a. After 8 days sun-drying on concrete floor under good days with average tempe\ulcornerrature at $256{\circ}C$ and relative humidity at 55% at 2 P.M., the moisture content of long hay was still above 25 5'~ and the leaf loss during drying caused by wind and rough handling was more than 50 ~G. b. It was possible to dry the chopped seombody by sun-drying down to about 10 % moisture content within 5 days, however, a stock of heat and discolouration phenomena were observed during the drying, which may be due to the increased deposit-density by chopping, resulting in lowering the quality of the dried product. c. Sun-drying for the crushed material by hay-conditioner was required about 4 days to reduce the moisture content to about 10 %, keeping the quality of dried product at good grade. o. The optimum deposit-depth of the chopped seombody in the batch-type dryer used was about 28cm with about 42kg/hr of drying performance rate. However, it was necessary to overturn the materials between the upper and lower layers in order to obtain a good quality of dried product. d. The drying performance rate by the tunnel-type drier was highest among those of drying systems tested, giving the rate of approximately 400kg/day. 3. On reviewing the individual drying system for seombody, it was possible to draw conclusion that the best system was tunnel drying with the crushed seombody as far as the performance rate was concerned. However, the methods gives the highest operational cost. The system for the lowest operational cost with good quality of dried product was the sun-drying with the crushed material. Accordingly, it may be recommended that the system of sun-drying for the crushed seombody may be the most feasible system presently applicable to farm-level operation.

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Influence of Precursor on the Electrochemical Properties of Li(Ni0.5Co0.2Mn0.3)O2 Cathode for the Lithium Secondary Battery (전구체의 물성에 따른 리튬 2차전지용 Li(Ni0.5Co0.2Mn0.3)O2의 전기화학적 특성 변화)

  • Kang, Donghyun;Arailym, Nurpeissova;Chae, Jeong Eun;Kim, Sung-Soo
    • Journal of the Korean Electrochemical Society
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    • v.16 no.4
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    • pp.191-197
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    • 2013
  • The one of the cathode material, $Li(Ni_{0.5}Co_{0.2}Mn_{0.3})O_2$, was synthesized by the precursor, $Ni_{0.5}Co_{0.2}Mn_{0.3}(OH)_2$, from the co-precipitation method and the morphologies of the primary particle of precursors were flake and needle-shape by controlling the precipitation parameters. Identical powder properties, such as particle size, tap density, chemical composition, were obtained by same process of lithiation and heat-treatment. The relation between electrochemical performances of $Li(Ni_{0.5}Co_{0.2}Mn_{0.3})O_2$ and the primary particle morphology of precursors was analyzed by SEM, XRD and EELS. In the $Li(Ni_{0.5}Co_{0.2}Mn_{0.3})O_2$ cathode from the needle-shape precursor, the primary particle size was smaller than that from flake-shape precursor and high Li concentration at grain edge comparing grain center. The cycle and rate performances of the cathode from needle-shape precursor shows superior to those from flake-shape precursor, which might be attributed to low charge-transfer resistance by impedance measurement.