• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.350-353
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• 1999

This Paper Presents the optimized design of micro-heaters using 501(Si-on-insulator) substrate and oxide-filled trench structure In order to justify a lumped model approximation and thermal boundary assumptions, two-dimensional FDM(finite difference among which conduction is the dominant heat dissipation path. Compared with no-trenchs on the SOI structure, the micro-heaters with trench structures has properties of low heater loss and good thermal isolation. The simulation results show that the heater loss decreases as the number. width and distance of trenchs increases.

• Journal of the Korean Ceramic Society
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• v.27 no.6
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• pp.790-798
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• 1990

Al2O3 film was chemically deposited by pyrolytic decom,positio of the Al-tri-isopropoxide/N2 system at 350$^{\circ}C$, 30 and 1.86torr. FTIR analysis showed a deposited film was a hydrated alumina and transformed to an anhydrous one after heat treatment(1hr, >800$^{\circ}C$ or 4hr, >500$^{\circ}C$) in N2 atmosphere. This transformation influenced on the CV-hysteresis of Si-Al2O3 structure. Also, a pH sensitivity of EIS(Electrolyte-Insulator-Semiconductor)structure using Si-Al2O3/SiO2 film was 50mV/pH in the range of pH 3 to 7.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.343-346
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• 2000

This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.

• Journal of the Korean Ceramic Society
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• v.42 no.9 s.280
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• pp.624-630
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• 2005

To investigate the possibility of the $ZrO_2$ buffer layer as the insulator for the Metal-Ferroelectric-Insulator-semiconductor (MFIS) structure, $ZrO_2$ and $SrBi_2Ta_2O_9$ (SBT) thin films were deposited on the P-type Si(111) wafer by the R.F. magnetron-sputtering method. According to the process with and without the post-annealing of the $ZrO_2$ buffer layer and SBT thin film, the diffusion amount of Sr, Bi, Ta elements show slight difference through the Glow Discharge Spectrometer (GDS) analysis. From X-ray Photoelectron Spectroscopy (XPS) results, we could confirm that the post-annealing process affects the chemical binding condition of the interface between the $ZrO_2$ thin film and the Si substrate. Compared to the MFIS structure without the post-annealing of the $ZrO_2$ buffer layer, memory window value of MFlS structure with post-annealing of the $ZrO_2$ buffer layer were considerably improved. The window memory of the Pt/SBT (260 nm, $800^{\circ}C)/ZrO_2$ (20 nm) structure increases from 0.75 to 2.2 V under the applied voltage of 9 V after post-annealing.

• Journal of Sensor Science and Technology
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• v.3 no.2
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• pp.74-80
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• 1994

Silicon direct bonding technology is very attractive for both silicon-on-insulator devices and sensor fabrication because of its thermal stress free structure and stability. The process of SDB includes hydration of silicon wafer and heat treatment in a wet oxidation furnace. After hydration process, hydroxyl groups of silicon wafer were analyzed by using Fourier transformation-infrared spectroscopy. In case of hydrophilic treatment using a ($H_{2}O_{2}\;:\;H_{2}SO_{4}$) solution, hydroxyl groups are observed in a broad band around the 3474 $cm^{-1}$ region. However, hydroxyl groups do not appear in case of diluted HF solution. The bonded wafer was etched by using tetramethylammonium hydroxide etchant. The surface of the self etch-stopped silicon dioxide is completely flat, so that it can be used as sensor applications such as pressure, flow and acceleration, etc..

• The KSFM Journal of Fluid Machinery
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• v.17 no.3
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• pp.19-24
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• 2014

Development of long-term mobile energy sources for mobile robots or small-sized unmanned vehicles are actively increasing. The micro gas turbine generator (MTG) is a good candidate for this purpose because it has both of high energy density and high power density, and 500W class MTG is under development. The designed MTG can be divided into 2 main parts. One part consists of motor/ generator and compressor, and the other one consists of combustor, recuperator and turbine. 500W class MTG is designed to operate at ultra-high speed of 400,000 rpm in high turbine temperature over $700^{\circ}C$ to improve the efficiency. Because the magnetism of NdFeB permanent magnet for the motor/generator could be degraded if the temperature is over $150-200^{\circ}C$, MTG needs the thermal insulation to block the heat transfer from combustor/turbine side to motor/generator side. Moreover, the motor/generator is allocated to get the cooling effect from the rapid air flow by the compressor. This study presents the experimental results to verify whether the thermal insulator and air flow are effective enough to keep the motor/generator part in the low temperature less than $100^{\circ}C$. From the motoring test by using the high temperature test rig, it was confirmed that the motor/generator part could maintain the temperature less than $50^{\circ}C$ under the condition of 1.0 bar compressed air.

• Journal of the Korean Vacuum Society
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• v.17 no.3
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• pp.199-203
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• 2008

The effects of surface treatment by $O_2$ plasma on the Bio-FETs were investigated by using the pseudo-MOSFETs on the SOI substrates. After a surface treatment by $O_2$ plasma with different RF powers, the current-voltage and field effect mobility of pseudo-MOSFETs were measured by applying back gate bias. The subthreshold characteristics of pseudo-MOSFETs were significantly degraded with increase of RF power. Additionally, a forming gas anneal process in 2 % diluted $H_2/N_2$ ambient was developed to recover the plasma process induced surface damages. A considerable improvement of the subthreshold characteristics was achieved by the forming gas anneal. Therefore, it is concluded that the pseudo-MOSFETs are a powerful tool for monitoring the surface treatment of Bio-FETs and the forming gas anneal process is effective for improving the electrical characteristics of Bio-FETs.

• Transactions of the Korean hydrogen and new energy society
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• v.27 no.6
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• pp.642-650
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• 2016

One of the most feasible solution for reducing the excessive energy consumption and carbon dioxide emission is usage of more efficient fuel such as hydrogen. As is well known, there are three viable technologies for storing hydrogen fuel: compressed gas, metal hydride absorption, and cryogenic liquid. In these technologies, the storage for liquid hydrogen has better energy density by weight than other storage methods. However, the cryogenic liquid storage has a significant disadvantage of boiling losses. That is, high performance of thermal insulation systems must be studied for reducing the boiling losses. This paper presents an experimental study on the effective thermal conductivities of the composite layered insulation with aerogel blankets($Cryogel^{(R)}$ Z and $Pyrogel^{(R)}$ XT-E) and Multi-layer insulation(MLI). The aerogel blankets are known as high porous materials and the good insulators within a soft vacuum range($10^{-3}{\sim}1$ Torr). Also, MLI is known as the best insulator within a high vacuum range(<$10^{-6}{\sim}10^{-3}$ Torr). A vertical axial cryogenic experimental apparatus was designed to investigate the thermal performance of the composite layered insulators under cryogenic conditions as well as consist of a cold mass tank, a heat absorber, annular vacuum space, and an insulators space. The composite insulators were laminated in the insulator space that height was 50 mm. In this study, the effective thermal conductivities of the materials were evaluated by measuring boil-off rate of liquid nitrogen and liquid argon in the cold mass tank.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2010.11a
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• pp.257-260
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• 2010

The purpose of this paper is to introduce a method to predict the case thermal insulation charred and erosion thickness as a function of the exposure time to combustion gases and in solid rocket motors. The sizing of the insulator requires a good estimation of the thermal and mechanical loads at the wall. The method is particularly suitable for internal insulation areas subjected to high radiative, convective heat fluxes and $Al_2O_3$ slag pool. The mathematical approach and lab-scale experiment were intentionally simplified in order to obtain some simple and rapid relationships particularly useful for trade-off studies and thermal insulation preliminary design. The method was utilized to compute the charred and erosion thicknesses of the insulation on the aft chamber domes. A comparison between theoretical and experimental insulator char thicknesses of the motor insulation is reported, indicating the applicability of the predictive method employed.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.61 no.7
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• pp.992-997
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• 2012

In this paper, we were analyzed the vibration characteristics of the three-phase cast resin transformer using less than 50% of load in the field. Most of the cast resin transformer is less than 50% in the domestic field is used for load conditions. Consisting of a solid insulator cast resin transformer is generating lots of noise and vibration. In addition, because it is affected by Joule 's heat is used in light load conditions. As a results, the transformer vibrations at frequencies below about from 200Hz to 500Hz were detected. Vibration velocity depends on the load variations were found. Load up to approximately 20-30% in most cases the vibration velocity was found at 4,000 ${\mu}m/s$ or less, 8,000 ${\mu}m/s$ or more. Vibration frequency at light load conditions were generated at the 120Hz, 240Hz, 360Hz and 480Hz. At the load condition of from 10% to 20%, vibration velocity is higher than another. Most of the vibration velocity were identified at the 1,000 ${\mu}m/s$ or less. Using the vibration frequency and velocity measurements data, the load on the cast resin transformer analyzed the correlation of the burden. Therefore, this data could be found in the vibration characteristics of the light-load conditions. If the field measurements using the data perform diagnostics on the transformer, it's expected to be very effective.