• 한국정밀공학회지
• /
• 제26권5호
• /
• pp.142-149
• /
• 2009

This paper proposes and demonstrates novel flexible contact force sensing devices for 3-dimensional force measurement. To realize the sensor, polyimide and polydimethylsiloxane are used as a substrate, which makes it flexible. Thin-film metal strain gauges, which are incorporated into the polymer, are used for measuring the three-dimensional contact forces. The force sensor characteristics are evaluated against normal and shear load. The fabricated force sensor can measure normal loads up to 4N. The sensor output signals are saturated against load over 4N. Shear loads can be detected by different voltage drops in strain gauges. The device has no fragile structures; therefore, it can be used as a ground reaction force sensor for balance control in humanoid robots. Four force sensors are assembled and placed in the four corners of the robot's sole. By increasing bump dimensions, the force sensor can measure load up to 20N. When loads are exerted on the sole, the ground reaction force can be measured by these four sensors. The measured forces can be used in the balance control of biped locomotion system.