• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1082-1086
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• 2004

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of wafer. The grinding of wafer is usually used by the infeed grinding machine. The infeed grinding machine has been depended on imports. Therefore, it is necessary to develop the infeed grinding machine because the demand of the infeed grinding machine is increasing more and more. This paper describes the technologies of infeed grinding machine and intend to introduce the studies in the development of the intelligent grinding system for grinding of wafer. The air bearing spindle for the infeed grinding machine was developed by domestic technologies and the grinding part design of the intelligent grinding system for wafer grinding was completed.

• 제어로봇시스템학회:학술대회논문집
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• 1997.10a
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• pp.387-390
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• 1997

Grinding process takes a long time that grinding machine is setted properly. It is difficult for user to judge correctly the abnormal states generated in grinding process. Air grinding has to be reduced for the improvement of productivity. In addition, it is important to monitor the dressing and the grinding process so that the grinding working maintains optimal grinding conditions. In this study, the monitoring system using the acoustic emission is developed to monitor these processes continuously. This system was able to reduce the preparation as well as the machine setting time in grinding operation.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.9
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• pp.149-155
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• 1996

Recent researches in the trouble monitoring system of grinding process have emphasized the use of deep knowledge. Such works include the monitoring and diagnostic systems for cylindrical grinding using sensors on chatter vibration and grinding burn during the process. But, since grinding operations are especially related with a lalrge amount of ambique parameters, it is effectively difficult to detect the grinding troubles occuring during the grinding process. In this paper, monitoring system for grinding utilizes the neural networks based on grinding power signatures. The monitoring system of grinding operations, which makes use of PDP neural networks, is presented. Then, the implementation results by computer simulations and experimental data with respect to chatter vibration and grinding burn are compared.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.9
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• pp.145-151
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• 1998

In this study, the experimental and analytic investigation with cold air system has been performed for improving the working environment of the conventional grinding fluid. Very simple cold air system was developed which could replace by the conventional grinding fluid system. The identification of heat of grinding Bone is very important for precision grinding. The experimental data was analysed to investigate the heat which was transferred to the workpiece. It was found that 45∼55％ of the total energy for dry grinding, 22∼28％ for wet grinding, and 32∼35％ for cold air system are conducted to the workpiece in grinding with cubic boron nitride wheel. Cubic boron nitride wheel could reduce the residual stress and thermal demage comparing with aluminium oxide wheel, because cubic boron nitride wheel has very high extreme thermal conductivity.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.9
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• pp.2866-2874
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• 1996

In the grinding of difficult-to-materials, the major problmes of conventional grinding are grinding burn, wheel wear, grinding surface crack, loading and glazing, When a conventioanl grinding wheel is used, wheel wear and grinding surface crack easily occur in low heat conductive material and annealed steel. Intermittent grinding is suitable for diffcult-to-matrical such as stainless steel, titanium alloy, aluminum alloy and copper alloy. The purpose of this paper is to develop a new type intermittent wheel of the grinding system for improving the problem of stainless steel grinding, to observe the effect of intermittent grinding on surface quality and grinding characteristics of stainless steel grinding using intermittent grinding wheel. The characteristics of intermittent grinding system improve surface quality, low grinding temperature and low loading.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.3
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• pp.174-183
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• 2000

Non-Parallelism the axial direction occurs during grinding process of long slender shafts. The reason for the axial error is due to elastic deformation of the components, accumulation phenomenon of the grinding and wheel wear during the grinding process. The accumulation phenomenon, the size generation mechanism and the wheel wear process during traverse grinding result in complicated process at each step on the wheel surface. The grinding system stiffness obtained from the stiffness of the center on the tailstock and the workpiece varing according to the relative position of the wheel and the workpiece. Further more, the value of wheel wear increases as the grinding process advances. The above mentioned issues make the shape generation process during traverse grinding quite complicated. This research analyzes the shape generation process in the direction of the work spindle. First, the formulation of the grinding system stiffness was conducted and the simulation analysis method of the traverse grinding was established. Also, a measuring system for assessing the dimensinal accuracy of the workpiece has been developed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.563-564
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• 2006

In silicon wafer manufacturing process, the grinding process has been adopted to improve the flatness of water. The grinding of wafer is usually used by the infeed grinding machine. Grinding conditions are spindle speed, feed speed, rotation speed, grinding stone etc. But grinding condition selection and analysis is so difficult in grinding machine. In the intelligent grinding system based on knowledge many researchers have studied expert system, neural network, fuzzy etc. In this paper we deal grinding condition selection method, Taguchi method and Genetic Analysis.

• International Journal of Precision Engineering and Manufacturing
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• v.2 no.1
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• pp.81-86
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• 2001

This paper deals with the monitoring of grinding wheel wear in surface grinding process. A monitoring system, which makes use of a laser scanning micrometer, is developed to measure the circumferential shape as well as the axial profile of grinding wheel. The monitoring system is applied to surface grinding processes. The experimental results show that the developed monitoring system is useful not only for monitoring the amount of wear in grinding wheel but also for evaluation the quality of ground surface and determining proper derssing time for the grinding wheel.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1245-1251
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• 2013

This study has focused on development of ELID monitoring system and its application to ELID grinding of structural ceramics. ELID monitoring system was consisted of grinding equipment, ELID power supply, grinding wheel, electrode and monitoring program. It can give a real time data to check spindle grinding resistance, wheel revolution, dressing current and voltage in ELID grinding process. The performance of developed system was evaluated by applying to grinding of structural ceramics, silicon carbide and alumina. As the results of experiments, monitored data for spindle resistance and ELID dressing current was useful to check steady-state ELID grinding process. From the comparison of spindle resistance between ELID grinding and conventional grinding process according to change of depth of cut, it could be confirmed that the spindle resistance in ELID grinding was lower than conventional grinding process.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.6
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• pp.37-44
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• 1995

Grinding is used for machining high precision parts with high additional value. However, the grinding operation needs high skill and long experience of an operator because of a lack of the scientific knowledge and engineering principles. Also, the wheel and grinding conditions affect grinding results. For these reasons, it is difficult to construct computer integrated manufacturing system(CIMA). Therefore, it is necessary for Expert System to be informed of qualitative knowledge of grinding expert's skills and experiences. In this research, the Grinding Expert System is constructed by Fuzzy Decision Making Algorithm. Using this system, unskilled workers will be able to use the knowledge and experience of an expert.