• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.309-312
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• 2002

Triode field emitters with planar-carbon-nanopaticle (CNP) cathodes were successfully fabricated using the conventional photolithography and the hotfilament chemical vapor deposition. Electron emission from a CNP triode emitter with a 12-${\mu}m$-diameter gate hole started at the gate voltage of 45 V, and the anode current reached the level of ${\sim}120$ nA at the gate voltage of 60 V, respectively. For the quantitative analysis of the Fowler-Nordheim (F-N) type emission from a CNP triode emitter, we carried out 2dimensional numerical calculation of electrostatic potential using the finite element method. As it turned out, a radial variation of electric field was very important to account for the emission from a planar emitting layer. By assuming the graphitic work function of 5 eV for CNPs, we were able to extract a consistent set of F-N parameters, together with the radial position of emitting sites.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.2
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• pp.49-56
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• 2001

Diamond thin films have been deposited on the silicon substrate by inductively coupled radio frequency plasma enhanced chemical vapor deposition system. The morphological features of thin films depending on methane concentration and deposition time have been studied by scanning electron microscopy and Raman spectroscopy. The diamond particles deposited uniformly on silicon substrate($10{\times}10[mm^2]$) at the pressure of 1[torr], a methane concentration of 1[%], a hydrogen flow rate of 60[sccm], a substrate temperature of $840\{sim}870[^{\circ}C]$, an input power of 1[kw], and a deposition time of 1[hour]. With increasing deposition time, the diamond particles grew, and than about 3 hours have passed, the graphitic phase carbon thin film with "cauliflower-like" morphology deposited on the diamond thin films.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.192-192
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• 2012

플라즈마 CVD와 아크방전법을 혼합한 하이브리드 공정을 통하여 알곤과 메탄 그리고 질소를 인입하여 Cr을 타겟으로한 아크방전과 기판에 전극을 인가하는 방식의 플라즈마 CVD공정을 복합화하여 금속이 함유된 Cr-C:H 박막을 합성하고, 공정에 질소를 인입하여 박막에 질소를 도핑하여 부내식성과 전기적 전도성에 관한 고찰을 하였다. 내부식성은 동전위분극시험에서 $1{\mu}A/cm^2$을 보였고, 전기저항은 $1m{\Omega}-cm$ 이하로 측정되어 내식성과 전기전도성을 동시에 갖는 박막을 합성할 수 있었다. 내식성과 전기전도성에 대한 원인규명을 위하여 박막의 구조분석을 XPS, XRD, Raman 분석을 통하여 실시하였다. 흑연화 탄소(Graphitic carbon)와 금속콤포짓(Metal composite)은 내식성에 영향을 주었으며, 전도성물질의 percolation효과와 질소와 탄소의 단일 결합과정에서 생성되는 잉여전자에 의한 단일 결합(C-N) 분율이 전기전도성에 영향을 주었다.

• Economic and Environmental Geology
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• v.17 no.4
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• pp.289-298
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• 1984

Uraniferous black slates of the Okchon sequence occur in Koesan (northeast) through Miwon-Boun (middle) to the southwest off Taejon (southwest) within the Okchon fold belt. The Uraniferous balck slates in the southwest off Taejon are particularly well developed in Chubu (northeast) and Moksso-ri (middle) areas whereas they are less developed in Jinsan (southwest) area. The uraniferous beds range from less than a meter to 40 meters in thickness and range from less than 0.02% $U_3O_8$ (cut-off-grade) to 0.05% $U_3O_8$ in the southwestern district off Taejon. Electron microprobe analysis of uranium-minerals found in graphitic slate samples enables to estimate their major compositions semi-quantitatively so that uraninite, ferro-uranophane and chlopinite are tentatively identified. Uranium-minerals are closely associated with carbon and metal sulfides. Correlation analysis of trace element concentrations revealed that U and F.C., and U and Mo are lineary correlative respectively and their correlation coefficients are positively high whereas those of U and V, U and Mn, and U and Zr are negatively low, implying that uranium mineralization has been closely related with concentrations of carbon and molybdenum. Stable isotope analyses of pyrite sulfur range widely from +11.5% to -23.3% in ${\delta}^{34}S$ values whereas those of graphite carbon fall within a narrow range between -23.3% and -28.9% in ${\delta}^{13}C$ values. The wide range of ${\delta}^{34}S$ values suggests that the sulfur could be of meteoric origin rather than of igneous source. The narrow range of ${\delta}^{13}C$ values, which are close to those of coal, indicates that the graphite is organic carbon in origin. Therefore, it is concluded that the uranium mineralization in the Okchon sequence took place primarily in sedimentary environment rich in organic matter and sulfide ion, both of which served as the reducing agents to convert soluble uranyl complex to insoluble uranium dioxide.

• Applied Chemistry for Engineering
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• v.9 no.7
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• pp.1059-1064
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• 1998

We have investigated various kind of graphite and MCMB6-28 to develop carbon negative electrode for lithium ion secondary battery. The interlayer length of them was $3.358{\sim}3.363{\AA}$ and the BET specific surface area was $2.95{\sim}26.15m^2/g$. From this study, When the interlayer of them was large and the BET specific surface area was high, the electrochemical characteristics of them was very excellent. Adding 0, 3, 5, wt% of KJ-Black as conducting agent to various graphitic carbon active materials, interface resistance of electrode and electrolyte was less, but rechargeability was better at 3 wt%. At constant current charge and discharge test, discharge capacity was small according to large current.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.139-139
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• 1999

다이아몬드는 지구상에서 가장 단단한 물질로 잘 알려져 있을 뿐만 아니라 공업적 측면에서 볼 때, 여러 가지 특출한 성질들을 동시에 지니고 있다. 인장강도, 압축강도, 탄성계수 등 기계적 특성이 우수하고 넓은 광투과성과 내열, 내화학, 내방사성을 지니고 있으며, 열전도율이 높고 전기적으로 절연체이다. 또한 hole이동도가 높고 도핑에 의해서 반도체적 특성을 나타낸다. 이와 같이 매우 뛰어난 성질을 공업적으로 응용하기 위하여 이전부터 많은 연구가 행해져 왔으며, 1980년대에 들어와 박막이나 코팅 형태로의 합성이 가능한 기상합성법이 큰 발전을 보임으로써 다이아몬드의 우수한 특성을 여러 분야에서 폭넓게 응용할 수 있게 되었다. 특히 마찰 응용분야에 최적의 재료로 추천되고 있다. 지금도 Epitaxial 다이이몬드를 기지 위에 성장시키고 다결정질박막을 여러 가지 비다이아몬드(Si, W, Mo 등) 기지 위에 성장시키는 연구가 계속되고 있으며 공구강 위엥 경질코팅으로써 한층 개선된 다이아몬드박막 제조를 위한 수많은 연구노력들이 집중되고 있다. 그러나 일반탄소강에 다이아몬드박막을 성장시키기 위한 많은 노력들은 크게 바람직하지 않은 non-diamond carbon(black carbon or graphitic soot)의 형성 때문에 방해를 받고 있다. 계면에서 이들의 형성은 증착된 다이아몬드박막과 금속기지의 저조한 밀착력을 나타내게 된다. 이외 같이 다이아몬드박막의 응용을 위하여 다이아몬드피막에 요구되는 중요한 조건은 기지에 대해서 강한 밀착력을 나타내는 것이며, 동시에 상대물에 대하여 낮은 마찰계수를 가져야 한다. 그러나 다이아몬드와 금속기지는 서로 다른 열챙창계수(각각 0.87$\times$10-6K-1, 12$\times$10-6K-1)의 차이로 인하여 밀착력이 현저히 떨어진다는 단점으로 인해 산업화에 많은 제약을 받아왔다. 이러한 문제점을 해결하기 위하여 본 연구에서는 다이아몬드박막과 금속기지 사이에 중간층을 이용하는 방법을 제안하였다. 이러한 시도는 일반적으로 중간층 형성 금속인 Ti 또는 TiN 등이 적용되었으나 원하는 결과를 얻지 못하였다. 즉 carbon과 Fe의 상호확산, non-diamond carbon상의 형성 그리고 열잔류응력을 완화시키고 일반탄소강 위에 다이아몬드박막을 형성시켜 우수한 밀착력을 얻기 위한 목적에 미흡하였던 것이다. 이에 중간층으로 Cr 또는 Cr계 화합물 박막을 이용하였는 바, 이 중간층을 이용한 결과 우수한 밀착력을 나타내는 다이아몬드박막을 얻었으며 열적, 구조저으로 모재와 다이아몬드에 적합한 결과를 얻을 수 있었다. 본 연구에 의해 얻어진 결과들은 재료 가공을 위하여 높은 경도와 내마모성등이 요구되는 절삭공구나 금형의 수명 향항에 크게 기여할 것이며 산업적으로 큰 응용이 기대된다.

• Journal of the Microelectronics and Packaging Society
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• v.9 no.4
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• pp.55-60
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• 2002

This paper presents a technique for the preparation of vertically grown CNTs by ICPHFCVD(inductively coupled plasma hot filament chemical vapor deposition) below $580^{\circ}C$. Purification of the CNTs(carbon nanotubes) using RE(radio frequency) plasma in a one step process, based on the different etching property of the Ni-tip, amorphous carbon and carbonaceous materials is also discussed. After purifying the grown materials. CNTs shown the multi walled and hollow typed structure. The typical outer and inner diameters or CNT were 50 nm and 25 nm, respectively. The graphitic wall was composed of 82 layers and the distance between wall and wall was 0.34 nm. From the results of TEM observation, the Ni catalyst at the tip of the carbon nanotubes were effectively removed by using a RF plasma etching, continuously.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.26-26
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• 2009

Vertically aligned arrays of mm-long multi-walled carbon nanotubes (MWCNTs) on Si substrates have been synthesized by water-assisted thermal chemical vapor deposition (CVD). The growth of CNTs was investigated by changing the experimental parameters such as growth temperature, growth time, gas composition, annealing time, catalyst thickness, and Al underlayer thickness. The 0.5-nm-thick Fe served as catalyst, underneath which Al was coated as a catalyst support as well as a diffusion barrier on the Si substrate. We grew CNTs by adding a little amount of water vapor to enhance the activity and the lifetime of the catalyst. Al was very good at producing the nm-size catalyst particles by preventing "Ostwald ripening". The Al underlayer was varied over the range of 15~40 nm in thickness. The optimum conditions for the synthesis parameters were as follows: pressure of 95 torr, growth temperature of $815^{\circ}C$, growth for 30 min, 60 sccm Ar + 60 sccm $H_2$ + 20 sccm $C_2H_2$. The water vapor also had a great effect on the growth of CNTs. CNTs grew 5.03 mm long for 30 min with the water vapor added while CNTs were 1.73 mm long without water vapor at the same condition. As-grown CNTs were characterized by using scanning electron microscopy (SEM), high resolution transmission electron microscopy (HRTEM), and Raman spectroscopy. High-resolution transmission electron microscopy showed that the as-grown CNTs were of ~3 graphitic walls and ~6.6 nm in diameter.

• Clean Technology
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• v.21 no.1
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• pp.62-67
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• 2015

We have developed a versatile method for the preparation of chemically linked graphene/multi-walled carbon nanotubes (MWNTs) hybrid materials via simple acid-catalyzed dehydration reaction between graphene oxide (GO) and amine-functionalized MWNTs (af-MWNTs). In this condition, ketone (-C=O) groups in GO and primary amine (-NH₂) moieties in af-MWNTs readily react to form imine (-C=N-) linkage. The chemical structures of graphene/MWNTs hybrid materials have been investigated using various microscopic and spectroscopic measurements. As a result of the synergetic effects of hybrid materials such as improved surface area and the superior structural restoration of graphitic networks, the hybrid materials demonstrate improved capacitance with excellent long-term stability. Furthermore, controlled experiments were conducted to optimize the weight ratio of graphene/MWNTs in hybrid materials. The highest capacitance of 132.4 F/g was obtained from the GM7.5 material, in which the weight ratio between graphene and MWNTs was adjusted to 7.5/1, in 1M KOH electrolyte at a scan rate of 100 mV/s.

• Korean Journal of Materials Research
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• v.33 no.4
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• pp.124-129
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• 2023

This study assessed the influences of fluorine introduced into DLC films on the structural and mechanical properties of the sample. In addition, the effects of the fluorine incorporation on the compressive stress in DLC films were investigated. For this purpose, fluorinated diamond-like carbon (F-DLC) films were deposited on cobalt-chromium-molybdenum substrates using radio-frequency plasma-enhanced chemical vapor. The coatings were examined by Raman scattering (RS), Attenuated total reflectance Fourier transform infrared spectroscopic analysis (ATR-FTIR), and a combination of elastic recoil detection analysis and Rutherford backscattering (ERDA-RBS). Nano-indentation tests were performed to measure hardness. Also, the residual stress of the films was calculated by the Stony equation. The ATR-FTIR analysis revealed that F was present in the amorphous matrix mainly as C-F and C-F₂ groups. Based on Raman spectroscopy results, it was determined that F made the DLC films more graphitic. Additionally, it was shown that adding F into the DLC coating resulted in weaker mechanical properties and the F-DLC coating exhibited lower stress than DLC films. These effects were attributed to the replacement of strong C = C by feebler C-F bonds in the F-DLC films. F-doping decreased the hardness of the DLC from 11.5 to 8.8 GPa. In addition, with F addition, the compressive stress of the DLC sample decreased from 1 to 0.7 GPa.