• 제목/요약/키워드: Glow plasma

검색결과 147건 처리시간 0.036초

진공 저온 플라즈마와 대기압 코로나 방전가공 PET 직물의 물리화학적 특성 (The Physicochemical Characteristics of PET Fabrics Treated with Low Temperature Glow Plasma and Atmospheric Corona Discharge)

  • 마재혁;양진영;구강;양현아;박영미
    • 한국염색가공학회지
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    • 제26권3호
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    • pp.201-208
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    • 2014
  • The high value-added functionality for synthetic fiber can be considered through a plasma enhanced treatment. In this study, PET(Polyethyleneterephthalate) was treated with a glow plasma and corona treatment. Surface characteristics of treated fabric were investigated using electron scanning microscopy(SEM), contact angle, X-ray photoelectron spectroscopy(XPS), tensile and adhesion strength. It was found that the contact angle showed $85.5^{\circ}$ for untreated fabric, $0^{\circ}$ for plasma and corona treatment at the condition of 200W for 7min. By XPS analysis, atomic ratio of O 1s/C 1s was increased from 0.27 to 0.43 by glow plasma and 0.27 to 0.41 by corona treatment at 200W for 7min, respectively. Glow plasma and corona treatment did not significantly change the tensile strength of PET fabric. Adhesion strength showed a substantial enhancement for the surface treated with the glow plasma, while corona treatment was adversely affected.

마이크로 채널 반응기 내 상압 글로우 플라즈마 생성 및 응용 (Generation and Application of Atmospheric Pressure Glow Plasma in Micro Channel Reactor)

  • 이대훈;박현향;이재옥;이승섭;송영훈
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1869-1873
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    • 2008
  • In this work, to make it possible to generate glow discharge in atmospheric pressure condition with relatively high and wide electric field, micro channel reactor is proposed. Si DRIE and Cr deposition by Ebeam evaporation is used to make channel and bottom electrode layer. Upper electrode is made from ITO glass to visualize discharge within micro channel. Fabricated reactor is verified by generating uniform glow plasma with N2 / He gases each as working fluid. The range of gas electric field to generate glow plasma is from about 200 V/cm and upper limit is not observed in tested condition of up to 150 kV/cm. This data shows that micro channel plasma reactor is more versatile. Indirect estimation of electron temperature in this reactor can be inferred that the electron temperature within glow discharge in micro reactor lies $0{\sim}2eV$. This research demonstrates that the reactor is appropriate in application that needs to maintain low temperature condition during chemical process.

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저진공 글로플라즈마를 이용한 탄소나노튜브의 표면 자유에너지와 소수성 특성 (Surface free-energy and hydrophobicity of MWCNT using glow plasma at low pressure)

  • 조순국;이건아;김정원;고광철
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2010년도 하계학술대회 논문집
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    • pp.123-123
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    • 2010
  • The hydrophobic coating for multi-walled nanotubes was treated with toluene and trimethylchlorosilane glow discharge plasma under low pressure, and the hydrophobic surface of the treated MWCNT was investigates. In order to investigate the effects of -CH components from the toluene and TMCS glow plasma, we conducted on the total surface free energies of the MWCNT powder, which was calculated by measuring the contact angle between the cushion of MWCNT powder and the probe liquids. The total surface free energies were determined by Owens-Wendt equation and drastically decreased.

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2차원, 2유체 MHD 식을 이용한 플라즈마 디스플레이 판넬의 미소 방전 특성 해석 (Numerical Analysis of Micro-Discharge in Plasma Display Panel Using 2-Fluid, 2-Dimensional MD equations)

  • 최경철;황기웅
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1992년도 하계학술대회 논문집 B
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    • pp.911-914
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    • 1992
  • We have investigated the micro-discharge in plasma display panel using 2 dimensional 2 fluid MHD equations. Plasma display utilizes the physical phenomena of the normal glow or abnormal glow and is considered to be able to provide the largest display area among various flat panel. 2 fluid, 2 dimensional Magneto-Hydro-Dynamic equations are applied to Computational field of 100${\times}$800${\mu}m^2$. Time varing glows and after-glows were investigated for 11 $\mu$sec. We obtained the distribution of the microscopic variables such as the density, temperature, velocity of Ne+Ar0.1% gas plasma. During the first 6$\mu$ sec, glow discharge dued to DC pulse was investigated. Time varing phenomena of after-glow was also investigated during the last 5 $\mu$set. From results, it was found that the driving efficiency of a DC Plasma Display Panel could be improved when the diffusion of ions and electrons are controlled by the pulses applied to the auxiliary anode.

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글로우 방전 플라즈마 진단 특성 (The Characteristics of Glow Discharge Plasma Diagnosis)

  • 우성훈
    • 한국조명전기설비학회:학술대회논문집
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    • 한국조명전기설비학회 2009년도 춘계학술대회 논문집
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    • pp.372-375
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    • 2009
  • We have studied on plasma diagnosis, characteristics of the glow discharge at the several different conditions of pressure, discharge current and such. The discharge onset voltage and onset current decreased as pressure increase, the general trend was nearly in agreement with the left regions of Paschen's curve. As normal glow discharge, discharge voltage was constant according to discharge current.

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Modeling and Experimental Study of Radio-frequency Glow Discharges and Applications for Plasma Processing

  • Kang, Nam-Jun
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.179-179
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    • 2012
  • Low pressure radio-frequency glow discharges are investigated using theoretical modeling and various experimental diagnostic methods. In the calculations, global models and transformer models are developed to understand the chemical kinetics as well as the electrical properties such as the effective collision frequency, the heating mechanism and the power transferred to the plasma electrons. In addition, Boltzmann equation solver is used to compensate the effect of the electron energy distribution function (EEDF) shape in the global model, and the general expression of energy balance for non-Maxwellian electrons is developed. In the experiments, a number of traditional plasma diagnostic methods are used to compare with calculated results such as Langmuir probe, optical emission spectroscopy (OES), optical absorption spectroscopy (OAS) and two-photon absorption laser-induced fluorescence (TALIF). These theoretical and experimental methods are applied to understand several interesting phenomena in low pressure ICP discharges. The chemical and physical properties of low pressure ICP discharges are described and the applications of these methods are discussed.

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글로우방전을 이용한 가스크로마토그라프 검출기의 개발 (Glow Discharge as Detector for Gas Chromatography)

  • 김효진;박일영;장성기;김박광;박만기
    • 약학회지
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    • 제37권1호
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    • pp.76-83
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    • 1993
  • The changes in discharge current, emission and/or oscillation frequency of the electric oscillation of a glow discharge are the potential sensitive measure of the concentration of an impurity in the argon plasma supporting gas. A single jet enhanced glow discharge has been interfaced with the gas chromatograph via 1/8" O.D. tube with a heating pad to study the changes in discharge current. To investigate the optimum operating conditions of the glow discharge system as detector for gas chromatography, pressure, gas flow rate, discharge current, distance between the anode and the cathode have been studied.

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플라즈마진동을 이용한 기체크로마토그래프의 검출기에 대한 연구 (Study on the Plasma Oscillation for Gas Chromatographic detector)

  • 김효진;맹대영;강종성
    • 분석과학
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    • 제6권4호
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    • pp.369-374
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    • 1993
  • 플라즈마 진동 현상은 글로우방전을 이용한 기체크로마토그래프 검출기의 개발 과정에서 측정되었으며 전류의 변화에 비하여 매우 안정하며 낮은 검출한계로 새로운 검출기로의 개발 가능성이 높다. 플라즈마 진동의 최적 조건과 메카니즘을 규명하기 위하여 몇 가지 실험조건을 변화시키며 관찰하였다. 즉, 방전전압(전류), 압력, 그리고 방전전극 간격을 변화시킨 결과 다양한 형태의 진동이 10KHz에서 10MHz까지의 주파수 범위에서 관찰되었다. 특히 방전전극 간격에 따라 낮은 압력과 전압의 조건에서 두 가지 형태의 진동이 나타났다. 한 가지 형태는 positive column 영역에서, 또 다른 하나는 negative glow 영역에서 측정되었다. Positive column 영역보다 negative glow 영역에서 발생된 플라즈마 진동이 훨씬 더 높은 감도 변화와 더 큰 주파수를 보였다.

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폴리프로필렌 직물의 젖음성에 관한 연구 (The Effect of Oxygen Low Temperature Plasma Treatment on the Wettability of Polypropylene Fabrics)

  • Kwon, Young-Ah
    • 한국섬유공학회:학술대회논문집
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    • 한국섬유공학회 2003년도 가을 학술발표회 논문집
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    • pp.307-308
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    • 2003
  • Improved wettability and dyeability of Polypropylene(PP) fabrics were obtained using glow discharge plasma by grafting nitrogen-containing active groups on the surface. Few studies of glow discharge plasma on PP fabrics exist. The objective of this study was to give a fabric a good affinity for water. (omitted)

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저기압하의 아르곤 가스의 RF 글로우 방전특성 (RF Glow Discharge Characteristics of Argon at Low Gas Pressure)

  • 곽동주;김두환;박정후
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 하계학술대회 논문집 C
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    • pp.1382-1384
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    • 1995
  • In order to study the structure of RF glow discharge driven at 13.56MHz in argon, the discharge voltage, current and phase shift between them will be measured over a wide range of discharge parameters(gas pressure between 1mTorr and 50mTorr with discharge power between 20mW and 200W). In this paper, the dc glow discharge characteristics and plasma parameters of both FTS and CPMS systems are studied experimentally. It is found that for CPMS system discharge is stablized under wider ranges of magnetic field and pressure than for FTS system. The plasma density and electron temperature of the plasma for these two systems are in the range of $10^{10}{\sim}7{\times}10^{11}[cm^{-3}]$ and $3.5{\sim}6.5$[eV], respectively.

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