• 대한기계학회논문집B
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• 제26권12호
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• pp.1639-1645
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• 2002

Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer form the engine. Combustor size was determined to be 1 mm scale. Movable piston is engraved inside the wafer. Ignition was done by nickel spark plug which was electroplated with thickness of 40 ${\mu}{\textrm}{m}$. The wafers were bonded by epoxy that resists high temperature. In firing test due to the bonding method and design tolerance pressure buildup by reaction was not confirmed. But ignition, flame propagation and actuation of micro structure from the reaction was observed. From the result basement of design and fabrication technology was obtained.

• 한국재료학회지
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• 제23권8호
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• pp.447-452
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• 2013

Recently, products that a have 3-dimensional(3D) micro structure have been in wide use. To fabricate these 3D micro structures, several methods, such as stereo lithography, reflow process, and diffuser lithography, have been used. However, these methods are either very complicated, have limitations in terms of patterns dimensions or need expensive components. To overcome these limitations, we fabricated various 3D micro structures in one step using a pair of diffusers that diffract the incident beam of UV light at wide angles. In the experiment, we used positive photoresist to coat the Si substrate. A pair of diffusers(ground glass diffuser, opal glass diffuser) with Gaussian and Lambertian scattering was placed above the photomask in the passage of UV light in the photolithography equipment. The incident rays of UV light diffracted twice at wider angles while passing through the diffusers. After exposure, the photoresist was developed fabricating the desired 3D micro structure. These micro structures were analyzed using FE-SEM and 3D-profiler data. As a result, this dual diffuser lithography(DDL) technique enabled us to fabricate various microstructures with different dimensions by just changing the combination of diffusers, making this technology an efficient alternative to other complex techniques.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3322-3324
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• 1999

This paper studies on the design and fabrication of a micro in-plane positioning actuator integrated with a microlens. Proposed in-plane actuator is a micro XY-stage which is composed of two linear comb drive actuators being orthogonal to each other. In the fabrication of actuator, the single crystalline silicon substrate anodically bonded with a #7740 glass substrate is used because of simple release and passivation. The structure of actuator is formed on the silicon facet of bonded fixture by chlorine-based deep RIE and then released by isotropic wet etching of glass (#7740) in hydrofluoric acid solution. Fabricated actuator has a large travel range up to $30({\pm}15){\mu}m$ and high resolution less than 0.01f1l1l in each direction. Experimented resonant frequency of this actuator is 630Hz. The micro-Fresnel lens is fabricated on the square-shape glass structure prepared in the center of actuator.

• 보존과학연구
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• 통권21호
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• pp.57-75
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• 2000

We performed the scientific analysis through composition analysis, micro-structure investigation, melting point and hardness test to the glass beads excavated at Naesanri in Gosung. Through this investigation, we could examine closely the characterization of raw materials and manufacture technique As a result of micro-structure investigation of glass beads, it appeared that the bubbles in glass beads have remained. Coloring agents of yellow glass bead was remained to the shape of inclusion. And on observing the transparent solid particle, we can know that these do not melt the raw materials because of low melting temperature of a crucible. The result of composition analysis of all glass beads using ICP, these were classified as $Na_2O_2$-$SiO_2$ type of glass. Also, these added to $AI_2O_3$ to improve the durability. The value of Vickers hardness of glass beads appeared the HV 490-530. The HV 1,440 of the transparent solid particle was much more than that of inner glass bead. This means that raw materials do not melt because of a low melting temperature of a crucible. The result of melting temperature analysis of glass beads using DSC/TGA, it was measured about $1,250^{\circ}C$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 하계학술대회 논문집 E
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• pp.1749-1751
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• 1997

AC PDP with surface micro discharge has a structure that all discharge electrodes are arranged on the front glass panel, and the rear glass panel merely serves as a cover glass to form the micro discharge space. The relationships between the dischage voltage and the structure among such as electrode width, distance between electrodes, discharge space gap, and dielectric layer width are investigated.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 제39회 하계학술대회
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• pp.1482-1483
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• 2008

This report describes the design, fabrication and experimental results of an implantable micro pressure regulator. It consists of three silicon substrates, a glass substrate, and a PDMS layer. Silicon and glass substrates are fabricated by using bulk micro machining and sandblasting. The PDMS layer is used as a intermediate layer for Si-Si and Si-glass bonding processes. This micro regulator is a key component of the portable drug delivery systems for low power consumption. The device has some advantages, such as a passive type device, no power consumption, and simple structure.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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• pp.906-911
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• 2004

In this paper, we used only PR as etching mask, while it used usually Cr/AU as etching mask, and in order to fabricate a photosensor has the increased sensitivity, we investigated on the sensitivity of general type and p-i-n type diode. we designed microchannel size width max 10um, min 5um depth max 10um, reservoir size max 100um, min 2mm. Fabrication of microfluidic devices in glass substrate by glass wet etching methods and glass to glass fusion bonding. The p-i-n diode has higher sensitivity than photodiode. Considering these results, we fabricated p-i-n diodes on the high resistive($4k{\Omega}{\cdot}cm$) wafer into rectangle and finger pattern and compared internal resistance of each pattern. The internal resistance of p-i-n diode can be decreased by the application of finger pattern has parallel resistance structure from $571\Omega$ to $393\Omega$.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권3호
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• pp.149-154
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• 2000

Bi-layer Mo films were deposited on soda-lime glass substrates using DC magnetron supttering. Increasing gas pressure, the resistivity varied from $1\times10^{-5}\; to\; 8.3\times10^{-3}\; \Omega.cm$. Furthermore, stress direction yielded compressive-to-tensile transition stress curves. The micro-structure of the compressively-stressed film which had poor adhesion consists of tightly packed columns, but of the tensile-stressed films had less dense structure. Under all gas pressure conditions, Mo films exhibited distinctly increasing optical reflection with decreasing gas pressure. The expansion of (110) peak width with the gas pressure meant the worse crystalline growth. The impurity levels in the Mo film exhibited highly concentrated Na, Se and O elements due to less dense micro-structure. The degree of Na diffusion depends on the type of the glass substrate used and the nature of the Mo film.

• 한국지반공학회논문집
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• 제27권11호
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• pp.83-92
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• 2011

무질서하고 불균질한 형상을 갖는 지반 재료 내 간극 구조는 하중에 의한 재료의 변형 및 간극 내 유체의 흐름 등 물리 역학적 거동에 중요한 영향 인자이다. 최근 들어 X-ray CT에 의한 비파괴 검사를 통해 지반 재료의 내부 구조를 마이크로미터 단위의 높은 해상도를 통해 평가하는 기법이 사용되고 있다. CT 이미지는 재료의 많은 정보를 포함하고 있음에도 그에 따른 이미지 해석 기법의 개발이 다소 미흡하여 2, 3차원 이미지의 정성적 관찰 및 간극비와 같은 거시적인 물성치 획득만이 이루어지고 있다. 본 연구에서는 연속적으로 획득된 글라스 비드의 2차원 CT 이미지에 기반하여 3차원 입자 및 간극 구조를 형성하고, 복잡한 간극구조를 간극셀과 간극채널로 정량적 분리를 실시하였다. 이를 위해 좌표 변환법, 이진화, 들로네 삼각망, 그리고 유클리디안 거리변환법과 같은 이미지 프로세싱 기법을 3차원 CT 이미지에 적용하였고 불균질한 글라스 비드의 간극구조에 대해 정량적으로 간극셀의 분포 및 간극간의 연결도 평가가 가능함을 확인하였다.

• Journal of the Optical Society of Korea
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• 제14권4호
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• pp.403-408
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• 2010

The acoustic properties of anti-inflammatory egonol were investigated by using micro-Brillouin scattering spectroscopy, by use of a 6-pass tandem Fabry-Perot interferometer and an optical microscope specially modified for spectroscopic purposes. The measured Brillouin spectrum was composed of a central peak centered at zero and a Brillouin doublet arising from the longitudinal acoustic waves, i.e. propagating density fluctuations. For the first time, the glass transition of egonol was identified to be about $5^{\circ}C$ at which the Brillouin peak position and the half width showed abrupt changes. The substantial damping of acoustic phonons of egonol near the glass transition temperature indicated that the contribution of internal relaxation processes such as small-amplitude librations of side chains to the damping of acoustic phonons may be substantial depending on the internal structure of molecules.