• Transactions of Materials Processing
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• v.13 no.3
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• pp.253-261
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• 2004

The machining technology for the brittle materials such as ceramics are applied to the fields of MEMS(micro electromechanical system) by the progress of new machining technologies such as Etching, Diamond machining, Micro drilling, EDM(Electro discharge machining), ECDM(Electro discharge machining), USM(Ultrasonic machining), LBM(Laser beam machining), EBM(Electron beam machining). Especially, the USM technology can be applied to the dieletric brittle materials such as silicon, borosilicate glass, silicon nitride, quartz and ceramics with high aspect ratio. The micro machining system with machining force controlled position servo is developed in this paper and the optimized ultrasonic machining algorithm is constructed by the force controlled position servo control. The load cell is adapted in the force measuring and the servo control algorithm, suit for the ultrasonic machining characteristics, is estabilished with using the PID auto-tunning functions at the PMAC system which is generally adapted in the field of robot industries. The precision force signal amplifier is constructed with high precision operational amplifier AD524. The vacuum adsorption chuck which is made of titanum and internal flow line is engraved, is used in the workpiece fixing. The mahining results by USM shows that there are some deviation between the force command and the actual machining force that the servo control algorithm should be applied in the machining procedures. Therefore, the constant force controlled position servo system is developed for the micro USM system and by the examination machining process in USM, the stable USM system is realized by tracking the average value of machining force.

• Laser Solutions
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• v.14 no.2
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• pp.17-23
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• 2011

Active thin films are ubiquitous in the manufacture of all forms of flat panel display (FPD). One of the most widely employed thin films is indium tin oxide (ITO) and metal films used electrically conductive materials in display industries. ITO is widely used for fabrication of LCD, OLED device, and many kinds of optical applications because of transparency in visible range and its high conductivity and metal films are also widely employed as electrodes in various electric and display industries. It is important that removing specific area of layer, such as ITO or metal film on substrate, to fabricate and repair electrode in display industries. In this work, we demonstrate efficient selective ablation process to ITO and aluminum film on glass using a femtosecond laser (${\lambda}p=1025nm$) respectively. The femtosecond laser with wavelength of 1025nm, pulse duration of 400fs, and the repetition rate of 100kHz was used for selectively removing ITO and Al on glass in the air. We can successfully remove the ITO and Al films with various pulse energies using a femtosecond laser.

• Laser Solutions
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• v.17 no.1
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• pp.1-6
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• 2014

Indium tin oxide (ITO) is an important transparent conducting oxide (TCO). ITO films have been widely used as transparent electrodes in optoelectronic devices such as organic light-emitting devices (OLED) because of their high electrical conductivity and high transmission in the visible wavelength. Finding ways to control ITO micromachining depth is important role in the fabrication and assembly of display field. This study presented the depth control of ITO patterns on glass substrate using a femtosecond laser and slit. In the proposed approach, a gaussian beam was transformed into a quasi-flat top beam by slit. In addition, pattern of square type shaped by slit were fabricated on the surfaces of ITO films using femtosecond laser pulse irradiation, under 1030nm, single pulse. Using femtosecond laser and slit, we selectively controlled forming depth and removed the ITO thin films with thickness 145nm on glass substrates. In particular, we studied the effect of pulse number on the ablation of ITO. Clean removal of the ITO layer was observed when the 6 pulse number at $2.8TW/cm^2$. Furthermore, the morphologies and fabricated depth were characterized using a optical microscope, atomic force microscope (AFM), and energy dispersive X-ray spectroscopy (EDS).

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.4
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• pp.160-166
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• 2015

Ultrasonic machining (USM) has been considered a new, cutting-edge technology that presents no heating or electrochemical effects, with low surface damage and small residual stresses on brittle workpieces. However, nowadays, many researchers are paying careful attention to the disadvantages of USM, such as low productivity and tool wear. On the other hand, in this study, a high-performance rotary ultrasonic drilling (RUD) spindle is designed and assembled. In this system, the core technology is the design of an ultrasonic vibration horn for the spindle using finite element analysis (FEA). The maximum spindle speed of RUM is 9,600 rpm, and the highest harmonic displacement is $5.4{\mu}m$ noted at the frequency of 40 kHz. Through various drilling experiments on glass workpieces using a CVD diamond-coated drill, the cutting force and cracking of the hole entrance and exit side in the glass have been greatly reduced by this system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.42-45
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• 2004

Electrochemical discharge machining (ECDM) has been found to be suitable for the micro-hole machining of nonconductive materials such as ceramics or glass compared with existing conventional and also non-conventional machining methods. However this machining process has some problems such as low geometric accuracy and low machining efficiency due to the random spark generation at the end of the electrode. This paper proposes the methods to improve the geometric accuracy of micro-hole using powder mixed ECDM process. The experimental results show the effects of powder producing improved geometric accuracy of machined hole and decreased concentration of spark energy.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.26 no.3
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• pp.183-189
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• 2013

The chalcogenide glass has superior optical properties in IR region transmittances. We have determined the composition of GeSbSe chalcogenide glass for the application of good IR lenses, resulting in the composite rate of $Ge_{19}Sb_{23}Se_{58}$. The optical, structural, thermal and physical properties were measured by Fourier transform infrared spectroscopy (FT-IR), X-ray diffraction (XRD), Differential scanning calorimeter (DSC), X-ray computed tomography (X-ray CT) respectively. The fabrication of the chalcogenide glass lens for infrared optics applications was proposed using a diamond turning machining technology which is known as the suitable ways for the production cost reduction and the accurate fabrication process control.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.12
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• pp.22-27
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• 2010

The usage of ultra-precision machining is increasing by the manufacturing of precision optical elements such as camera lens, laser printer, CD player, DVD and microscope parts etc.. The WC alloy material is in wide use by mold core to improve the productivity and accuracy in manufacturing those precision parts. The WC alloy mould core can be machined effectively by the parallel grinding process which is an excellent technique for manufacturing of surface profile hard to machining materials such as the hardened metal alloy, Ceramics, Glass and so on. Magnetic assisted polishing as a final polishing process has also been utilized to obtain ultra-precision mirror surface with the elimination of traces presented on ground surface. It is able to deduce the optimal ultra-precision machining conditions of the WC alloy material from the experiment and analyses results.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.109-117
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• 2005

In case of fine machining processes, the cutting state monitoring by a skilled operator is impossible because the physical changes generated during fine machining are very weak. To realize the high efficient and precise fine machining, it is necessary to develop the sensor based monitoring system which is able to detect the fine changes of cutting state. In this paper, the fine acoustic emission monitoring system is developed to monitor the state of the fine machining process. The developed system consists of the AE sensor and the AE signal processing unit. And this has the high-sensitivity and bandwidth which can detect fine AE signal generated during fine machining process. In order to investigate the feasibility of the developed system, evaluation experiments were performed in the fine fixed-abrasive machining processes such as polishing and glass ferrule slicing. Experimental results show that the developed monitoring system possesses an excellent real-time monitoring capability at fine machining processes.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.76-79
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• 2003

Glass molding is an advantageous method to manufacture glass micro optical components. However, it is difficult to make tungsten carbide core for glass molded micro optics way. We have developed novel method to fabricate tungsten carbide core for glass molding of glass micro optical components. Silicon masters were fabricated by micro machining. Tungsten Carbide cores were fabricated by forming, sintering and coating. Finally we fabricated glass molded V-groove with pitch of 192$\mu\textrm{m}$ and glass microlens way with lens diameter of 36∼225$\mu\textrm{m}$ by the present method.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.291-292
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• 2007