• Particle and aerosol research
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• v.14 no.1
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• pp.17-24
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• 2018

Since the motion of the charged particle strongly depends on its charge characteristics, information on charge distributions of target particles is one of the important variables in aerosol research. In this study, charged distribution of atomized NaCl particles were measured using a Gerdien type ion counter. Two kinds of particle charging conditions were used in this study. First, atomized NaCl particles were passed through an aerosol neutralizer to have a Boltzmann charge distribution, and then its charge distribution was measured. In this case, the portion of uncharged particles was compared with the portion obtained from the Boltzmann charge distribution for verifying the suggested experimental method. Second, same experiment was conducted without the aerosol neutralizer to measure the charge distribution of atomized and un-neutralized NaCl particles. In the conclusion, the portion of uncharged, negatively charged and positively charged particles were 19%, 62% and 20%, respectively, for neutralized particles. The atomized particles, which was generated without the aerosol neutralizer, also had almost a zero charge state, but the standard deviation in charge distribution was larger than that of neutralized particles. The test method proposed in this study is expected to be used in various aerosol research fields because it can obtain simple information on the particle charge characteristics more easily and quickly than the existing test methods.

• Journal of the Semiconductor & Display Technology
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• v.5 no.1 s.14
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• pp.45-49
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• 2006

In this paper, a new method that monitors the quantity of particles using ion-counter in vacuum environment is introduced. In-situ particle monitoring (ISPM) system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. The ion-counter applied by positive voltage detects only positive charged particles. Therefore the particles to be detected should be in known charge state for further data analysis. ion-counter is installed at the exhaust line of process equipment where the pressure loss is structurally low. ISPM system performance has been verified with SMPS (Scanning Mobility Particle Sizer) system. The correlation coefficient is above 0.98 at the particle size range of $20{\sim}300nm$ in diameter with identified charge distribution under $0.1{\sim}10.0$ Torr.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.05a
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• pp.255-258
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• 2006

In this paper, the new method which is monitoring quantity of particles using by ion-counter has been developed. ISPM system is composed by Gerdien type ion-counter (house-made), DC power supply and electrometer. Ion-counter applied positive voltage could detect only positive charged particles. Therefore charged particles to Boltzmann equilibrium distribution or to some identified charge distribution can be detected by ion-counter. Ion-counter could install on the exhaust line of process equipment since pressure loss is structurally low. ISPM system has been certified by comparison with the result of SMPS (Scanning Mobility Particle Sizer) system. The relation coefficiency is above 0.98 about $20{\sim}300nm$ particles with identified charge distribution under $0.1{\sim}10.0$ Torr.