• 전기학회논문지
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• 제57권10호
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• pp.1841-1846
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• 2008

In this paper, we present the fabrication of microlens by electrohydrodynamic atomization(EHDA) of PDMS prepolymer. The diameter and contact angle of PDMS microlens can be altered by changing the applied voltage and substrate temperature at the experimental setup. It is considered that PDMS microlens can be integrated into the Lab-on-a-chip directly without any photolithographic process by EHDA. The property of PDMS microlens is confirmed by transmitting and measuring the Gaussian beam through microlens.