• Title/Summary/Keyword: Gas diffusion layer

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Diffusion barrier characteristics of molybdenum nitride films for ultra-large-scale-integrated Cu metallization(II); Effect of deposition conditions on diffusion barrier behavior of molybdenum nitride

  • Lee, Jeong-Joub;Lee, You-Kee;Jeon, Seok-Ryong;Kim, dong-Joon
    • Journal of Korean Vacuum Science & Technology
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    • v.1 no.1
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    • pp.30-37
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    • 1997
  • Interactions of Cu films with Si substrates separated by thin layers of molybdenum and molybdenum nitride were investigated in the viewpoint of diffusion barrier to copper. the diffusion barrier behavior of the layers was studied as functions of deposition and annealing conditions by cross-sectional transmission electron microscopy and Nomarski microscopy. the layers deposited at $N_2$ gas ratios of 0.4 and 0.5 exhibited good diffusion barrier behaviors up to $700^{\circ}C$, mainly due to the phase transformation of molybdenum to $\gamma$-Mo$_2$N phase. The increase in the N gas ratio in deposition elevates the lower limit of barrier failure temperature. Futhermore, amorphous molybdenum nitride films deposited at 20$0^{\circ}C$ and 30$0^{\circ}C$ did not fail, while the crystalline $\gamma$-Mo$_2$N films deposited at 40$0^{\circ}C$ and 50$0^{\circ}C$ showed signs of interlayer interactions between Cu and Si after annealing at 75$0^{\circ}C$ for 30 minutes. Therefore, the amorphous nature of the molybdenum nitride layer enhanced its ability to reduce Cu diffusion and its stability as a diffusion barrier at elevated temperatures.

The effects of TCO/p-layer Interface on Amorphous Silicon Solar Cell (비정질 실리콘 태양전지에서 TCO/p층 계면 특성의 영향)

  • Ji, I.H.;Suh, S.T.;Choi, B.S.;Hong, S.M.
    • Solar Energy
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    • v.8 no.1
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    • pp.68-73
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    • 1988
  • In the glass/TCO/p-i-n a-Si/Al type of amorphous silicon solar cell, the effects on solar cell efficiency and metastability for the various kinds of TCO analyzed by SAM and ESCA, which was used to measure the diffusion profiles of In and Sn and the Fermi energy shifts in the TCO/p interface respectively. Indium which diffused into a-Si p-layer did not have any significant effects on the Fermi level shift of p-layer when the content of $B_2H_6/SiH_4$ in p-layer was at 1 gas%. The cell fabricated on $SnO_2$ turned out to have the best cell photovoltaic characteristics. ITO fabricated by electron beam deposition system, which was shown to have the greatest rate of diffusion of Indium in ITO/p interface produced the worst metastability among the cells tested.

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High-sensitivity ZnO gas Sensor with a Sol-gel-processed SnO2 Seed Layer (Sol-Gel 방법으로 제작된 SnO2 seed layer를 적용한 고반응성 ZnO 가스 센서)

  • Kim, Sangwoo;Bak, So-Young;Han, Tae Hee;Lee, Se-Hyeong;Han, Ye-ji;Yi, Moonsuk
    • Journal of Sensor Science and Technology
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    • v.29 no.6
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    • pp.420-426
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    • 2020
  • A metal oxide semiconductor gas sensor is operated by measuring the changes in resistance that occur on the surface of nanostructures for gas detection. ZnO, which is an n-type metal oxide semiconductor, is widely used as a gas sensor material owing to its high sensitivity. Various ZnO nanostructures in gas sensors have been studied with the aim of improving surface reactions. In the present study, the sol-gel and vapor phase growth techniques were used to fabricate nanostructures to improve the sensitivity, response, and recovery rate for gas sensing. The sol-gel method was used to synthesize SnO2 nanoparticles, which were used as the seed layer. The nanoparticles size was controlled by regulating the process parameters of the solution, such as the pH of the solution, the type and amount of solvent. As a result, the SnO2 seed layer suppressed the aggregation of the nanostructures, thereby interrupting gas diffusion. The ZnO nanostructures with a sol-gel processed SnO2 seed layer had larger specific surface area and high sensitivity. The gas response and recovery rate were 1-7 min faster than the gas sensor without the sol-gel process. The gas response increased 4-24 times compared to that of the gas sensor without the sol-gel method.

The Stress Distribution Analysis of PEMFC GDL using FEM (유한요소법을 이용한 고분자전해질연료전지 기체확산층의 응력분포 연구)

  • Kim, Chulhyun;Sohn, Youngjun;Park, Gugon;Kim, Minjin;Lee, Jonguk;Kim, Changsoo;Choi, Yusong;Cho, Sungbaek
    • Transactions of the Korean hydrogen and new energy society
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    • v.23 no.5
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    • pp.468-475
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    • 2012
  • A proper stacking force and assembly are important to the performance of fuel cell. Improper assembly pressure may lead to leakage of fuels and high interfacial contact resistance, excessive assembly pressure may result in damage to the gas diffusion layer and other components. The pressure distribution of gas diffusion layer is important to make interfacial contact resistance less for stack performance. To analyze the influence of design parameter factors for pressure distribution, and to optimize stack design, DOE (Design of Experiment) was used for polymer electrolyte membrane fuel cell stack pressure test. As commonly known, the higher clamping force improves the fuel cell stack performance. However, non-uniformity of stress distribution is also increased. It shows that optimization between clamping force and stress distribution is needed for well designed structure of fuel cell stack. In this study, stack design optimization method is suggested by using FEM (Finite Element Methode) and DOE for light-weighted fuel cell stack.

Visualization of Water Droplets in the Simple Flow Channel and Rib Geometry for Polymer Electrolyte Membrane Fuel Cells (PEMFCs) (고분자전해질형 연료전지의 단순 채널 리브 형상에서의 물방울 가시화 연구)

  • Choi, Min Wook;Kim, Han-Sang
    • Transactions of the Korean hydrogen and new energy society
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    • v.25 no.4
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    • pp.386-392
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    • 2014
  • The effective water management in a polymer electrolyte membrane fuel cell (PEMFC) is one of the key strategies for improving cell performance and durability. In this work, an ex situ measurement was carried out to understand the water droplet behavior on the surface of gas diffusion layer (GDL) as a fundamental study for establishing novel water management. For that purpose, simplified cell including one rib and two flow channels was designed and fabricated. Using this ex situ device, the water droplet emergence through the GDL of the PEMFC was emulated to understand liquid water transport through the porous diffusion medium. Through the visualization experiment, the emergence and growth of water droplets at the channel/GDL interface are mainly observed with the surface characteristics of GDL (SGL 10BA, 24BA) and rib when the liquid water passes through the GDL and is expelled to the flow channel. It is expected that the results obtained from this study can contribute to the better understanding on the water droplet behavior (emergence and removal) in the flow channels of PEMFC.

Evaluation of Degradation Characteristics of Thermal Barrier Coating on Gas Turbine Blades

  • Jung, Yongchan;Kim, Mintae;Lee, Juhyeung;Ahn, Jamin;Kim, Kihong
    • KEPCO Journal on Electric Power and Energy
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    • v.2 no.2
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    • pp.273-278
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    • 2016
  • In order to evaluate the lifespan of high-temperature parts with thermal barrier coating in gas turbines used for power generation, this study was performed on an 80 MW-class gas turbine exceeding 24 k equivalent operating hours. Degradation characteristics were evaluated by analyzing the YSZ (Yttria Stabilized Zirconia) top coat, which serves as the thermal barrier coating layer, the NiCrAlY bond coat, and interface layers. Microstructural analysis of the top, middle, and bottom sections showed that Thermal Growth Oxide (TGO) growth, Cr precipitate growth within the bond coat layer, and formation of diffusion layer occur actively in high-temperature sections. These microstructural changes were consistent with damaged areas of the thermal barrier coating layer observed at the surface of the used blade. The distribution of Cr precipitates within the bond coat layer, in addition to the thickness of TGO, is regarded as a key indicator in the evaluation of degradation characteristics.

The Added Carbon Content Effect on the Hardness And Wear Characteristics in Ion-Nitriding (이온질화 에 있어서 첨가탄소량 이 경도 및 마모특성 에 주는 영향)

  • 김희송
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.7 no.1
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    • pp.19-27
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    • 1983
  • This paper deals with hardness and wear characteristics of ion-nitrided metal, and with ion-nitride processing which is concerned with the effects of added carbon content in gas atmosphere. A small optimal amount of carbon content in gas atmosphere increase compound layer thickness, as well as to increase diffusion layer thickness and hardness, and reduces wear rate when the applied wear load is small. It is found in the analysis that under small applied wear load, the critical depth where voids and cracks may be created and propagated is located at the compound layer, so that the abrasive wear where hardness is an important factor, is created and the existence of compound layer reduces the amount of wear. When the load becomes large, the critical depth is located below nucleation and propagation, is created and the existence of compound layer increase wear rate.

Effect of Heat Treatment Characteristic on the Gas Nitriding of Stainless Steels (스테인리스강의 가스질화에 미치는 열처리 조건의 영향에 관한 연구)

  • Kim, H.G.;Hwang, G.S.;Sun, C.G.
    • Journal of the Korean Society for Heat Treatment
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    • v.16 no.2
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    • pp.78-82
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    • 2003
  • Nitrided compound layer and diffusion layer structure were observed by SEM. The compound layer and the constituent of nitrided surface of STS 304, STS 316, STS 410 and SACM 645 steel were analysed using EMPA and XRD respectively. The depth of nitriding layer that is obtained from similar nitriding condition decrease in the order of SACM 645 > STS 410 > STS 316 > STS 304. Result of phase transformation of the nitrided at $550^{\circ}C$ by XRD analysis were as follows; The austenitic stainless steel was mainly consist of $Cr_2N$ accompanying with $Fe_4N$ and $Fe_{2-3}N$ phase and martensitic stainless steel was mainly consist of present $Fe_{2-3}N+Cr_2N$ phase, but SACM 645 steel was $Fe_{2-3}N$ phase present only.

Resistance Analysis by Distribution of Relaxation Time According to Gas Diffusion Layers and Binder Amounts for Cathode of High-temperature Polymer Electrolyte Membrane Fuel Cell (고온 고분자 막 전해질 연료전지 캐소드의 가스 확산층 및 바인더 함량에 따른 완화 시간 분포(DRT) 저항 분석)

  • DONG HEE KIM;HYOEN SEUNG JUNG;CHANHO PAK
    • Transactions of the Korean hydrogen and new energy society
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    • v.34 no.3
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    • pp.283-291
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    • 2023
  • The physical properties were analyzed for four gas diffusion layers, and gas diffusion electrodes (GDEs) for the cathode of high-temperature polymer electrolyte membrane fuel cell were fabricated through bar coating with three binder to carbon (B/C) ratios. Among them, The GDE from JNT30-A6P showed a significant change in secondary pore volume at a B/C ratio of 0.31, which had the largest pore volume among all GDEs. In the polarization curve, JNT30-A6P GDE showed the best membrane electrode assembly (MEA) performance with a peak power density of 384 mW/cm2 at a a B/C ratio of 0.31. From the distribution of relaxation time analysis, the peak 1 corresponding to mass transfer resistance of oxygen reduction reaction (ORR) was significantly reduced in the JNT30-A6P GDE. This is the result that when the binder content decreased, the volume of the secondary pore increased, and the mass transfer resistance of ORR decreased, which played an essential role in the MEA performance.