• 한국표면공학회지
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• 제28권3호
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• pp.152-163
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• 1995

A theoretical model which combines gaseous transport and solid state diffusion with the multi-component equilibrium at the gas/pack and gas/coating interfaces was used to study the kinetics of diffusion aluminide coating. The diffusion aluminide coatings were applied by pack cementation with Ni substrate under argon atmosphere in the high activity and the low activity pack containing $NH_4CL$ or $AlF_3$ activator. On the basis of the process conditions, the suggested model allows the surface composition, the growth rate of coating layers and the aluminium concentration profiles in coatings to be calculated. In the case of $NH_4$Cl activator, careful consideration was required in the analysis, because activator contains nitrogen and hydrogen as well as halogen element to activate the pack. A good agreement is obtained between the theoretical predictions and the experimental results.

• 한국표면공학회지
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• 제23권4호
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• pp.218-224
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• 1990

Silicon nitride thin(SiNx) is deposited onto 3 inch silicon wafor using ECR plasma apparatus. For the two different plasma extraction windows size, the thin films which were deposited by changing the SiH4/N2 gas fole at at 1.5mTorr without substrate heating are analyzed through the XPS and wlliposometer measurements. The very uniform and good quality silicon nitride thin film were obtained with the analyzed results of the deposited films, and particularly, ion temperature perpendicular to the magnetic filed was nearly same as the neutral gas temperature. The large amount of plasma loss in the transport process following magnetic field lines could be seen from the plasma emission intensity measurements.

• 한국전기전자재료학회논문지
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• 제12권1호
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• pp.88-93
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• 1999

This paper describes the electron transport characteristics in $SiH_4$ gas calculated for the range of E/n:0.5~300(Td) and Pressure:0.5, 1, 2.5(Torr) by the Monte carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the reported results. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal and transverse diffusion coefficients, the electron ionization coefficients, characteristics energy and the electron energy distribution function. The electron energy distributions function has been analysed in $SiH_4$ at E/N: 30, 50(Td)for a case of the equilibrium region in the mean electron energy and respective set of electron collision cross sections. The results of Monte carlo simulation and Boltzmann equation have been compared with experimental data by ohmori ad Pollock.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2004년도 동계학술연구발표회 논문개요집
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• pp.34-35
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• 2004

• 한국막학회:학술대회논문집
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• 한국막학회 2003년도 춘계 총회 및 학술발표회
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• pp.95-98
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• 2003

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1991년도 추계학술대회 논문집
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• pp.160-164
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• 1991

The effect of various parameters, such as temperature, current density and operating valtage on the performance of phosphoric acid fuel cell stack was studied by using numerical analysis. The utilization ratio of reaction gas, inlet condition of reaction air and cooling air, inlet condition of cooling air flow latin were changed regularly, The results showed good agreements with the existing results and experimental ones.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1481_1482
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• 2009

Pure Xe, Kr and Ne atoms and Mixures of Xe-Ne used in fluorescent induction lamps(FILs). However standard regulation of FILs is not made up until now. Therefore, the electron transport coefficients, the electron drift velocity W, the longitudinal diffusion coefficient NDL and the ionization coefficient $\alpha$/N in pure Xe, Kr, Ne gases and Xe-Ne mixtures(1:9, 5:5, 7:3) were calculated over the wide E/N range from 0.01 to 500 Td at 1 Torr by two-term approximation of the Boltzman equation.

• E2M - 전기 전자와 첨단 소재
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• 제6권6호
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• pp.524-535
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• 1993

본 연구에서는 SF$_{6}$가스의 전자이동속도를 더블히트파이프 실험장치를 이용하여 유도전류법에 의해 실험적으로 측정하였다. 그리고 전자수송계수의 정량적인 산출은 볼츠만 수송 방정식의 Backward-Prolongation을 이용하여 계산하고 해석하였다. 이때 전자에너지 분포함수와 전리 및 부착계수를 구하고 운동량변환단면적을 결정하였다. 그리고 실험적으로 측정된 SF$_{6}$가스의 전자이동속도와 계산된 전자수송계수를 비교 검토하여 해석함으로서 절연체의 기초적인 물성자료로 사용할 수 있다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1492-1494
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• 1996

We have studied the generation, growth and behavior of chemical species and particles in silane PCVD. We included the plasma chemistry of silane, particle nucleation by homogeneous formation, acrosol dynamics and transport phenomena of chemical species and particles. The concentration profile of chemical species and particles were shown as a function of reactor length. The effects of process variables such as reactor pressure, total gas flow rate and electrical field strength on the behavior of chemical species and particles were analyzed.

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2000년도 추계학술대회 논문집
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• pp.215-216
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• 2000

대기 중에 존재하는 입자의 생성 및 변화를 모델링 하는데 있어서 가장 중요한 요소는 응축/휘발 (condensation/evaporation)과 같은 기체/입자간의 상호 과정을 어떻게 모사 하느냐 하는 것이다. 일반적으로 지금까지의 연구는 입자와 가스상의 농도가 순간적으로 평형을 이룬다고 가정해 왔으나 실제 대기상의 입자는 비 평형(non-equilibrium)상태의 응축/휘발 과정을 따르는 것으로 알려져 왔다. (중략)