• Title/Summary/Keyword: Gas Transport

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Analysis of electron transport properties in $SF_6$+He mixtures gas used by MCS-BE (MCS-BE에 의한 $SF_6$+He 혼합기체의 전자수송특성 해석)

  • 서상현;하성철;유희영;김상남;송병두
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.11a
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    • pp.159-162
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    • 1998
  • This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from 50~700[Td] by the Monte Carlo simulation and Boltzrnann equation method using a set of electmn collision cross sections determined by the authors and the values of electron swarm parameters are obtained by M F method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficents, longitudinal and h-ansverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

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Monte Carlo Simulation of the Electron transport coefficients using Electron collision cross sections for $SP_{6}$ Gas ($SP_{6}$ 가스의 전자충돌단면적을 이용한 전자수송계수에 대한 몬테칼로 시뮬레이션)

  • 서상현;전병훈;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1995.11a
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    • pp.152-157
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    • 1995
  • The electron transport coefficients in $SP_{6}$ gas is calculated and analysed for range of E/N values from 150∼800(Td) by a Monte Carlo simulation, using a set of electron collision cross sections determined by the authors. The result of the Monte Carlo simulation such as electron drift velocity, ionization and electron attachment coefficients, longitudinal and transverse diffusion coefficients in neatly agreement with the respective experimental and theoretical for a range of E/N. The validity of the results obtained has been confirmed by a Monte Carlo simulation carried out parallel to the analysis.

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Study on the electron transport properties in $SF_6$+He mixtures gas used by MCS-BE ($SF_6$+He 혼합기체의 MCS-BE에 의한 전자수송계수 연구)

  • Kim, Sang-Nam;Seo, Sang-Hyeon;Ha, Sung-Chul;Yu, Heoi-Young;Song, Byung-Doo
    • Proceedings of the KIEE Conference
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    • 1999.11a
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    • pp.16-19
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    • 1999
  • This paper describes the electron transport characteristics in $SF_6$+He gas calculated for range of E/N values from $50{\sim}700[Td]$ by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained by TOF method. The results gained that the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N.

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Analysis of Electron Energy Distribution Function and Transport Characteristic in SiH$_4$ Gas Plasma by MCS-BE Method (MCS-BE법을 이용한 SiH$_4$가스 프라즈마중의 전자에너지분포함수와 수송특성해석)

  • 이형윤;하성철;유회영;김상남;임상원;문기석
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.04a
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    • pp.154-159
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    • 1997
  • This paper describes the electron transport characteristic in SiH$_4$ gas calculated for range of E/N values from 0.5~300(Td) by the Monte Calro simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters are obtained for TOF method. The results gained that the value of an electron swarm parameter such as the electron drift velocity, the electron ionization coefficients longitudinal and transverse diffusion coefficients, characteristics energy agree with thee experimental and theoretical for a range of E/N. The electron energy distributions function were analysed in monosilane at EN : 30, 50(Td) for a case of equilibrium region in the mean electron energy. The validity of the results obtained has been confirmed by a TOF method.

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불포화 토양내에서 가스상 오존 측정을 위한 광섬유센서의 적용

  • 정해룡;최희철
    • Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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    • 2003.04a
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    • pp.111-114
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    • 2003
  • A new monitoring system has been developed for in-situ and realtime measurement of ozone transport in unsaturated porous media using a fiber optic sensor. The calibration of the fiber optic transflection dip probe (FOTDP) system was successfully carried out at various ozone concentrations using a column with length of 30 cm and diameter of 5 cm packed with glass beads, which don't react with gaseous ozone. The breakthrough curves (BTCs) of ozone was obtained by converting the normalized intensity into ozone concentration. The FOTDP system reflected the ideal transport phenomena of gas phase ozone at various flow rates. The FOTDP system worked well for in-situ monitoring of gas phase ozone at various water saturations and in presence of SOM. However, the FOTDP system did not measure the ozone concentration at more than 70% water saturation.

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A Study of Electron Transport properties in $SF_6+Ar$ Gas ($SF_6+Ar$의 전자수송계수에 관한 연구)

  • Park, Jae-Sae;Kim, Sang-Nam
    • Proceedings of the KIEE Conference
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    • 2001.07e
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    • pp.72-75
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    • 2001
  • In this paper, we describe the results of a combined experimental theoretical study designed to understand and predict the dielectric properties of $SF_6$ and $SF_6+Ar$ mixtures. The electron transport, ionization, and attachment coefficients for pure $SF_6$ and gas mixtures containing $SF_6$ has been analysed over the E/N range $30{\sim}300Td$ by a two term Boltzrnann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2% and 0.5% $SF_6+Ar$ mixtures were measured by time- of- flight method, The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with the experimental and theoretical for a rang of E/N values.

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Experimental Study of a High Efficiency Transport Refrigeration Container under Cooling and Defrosting Conditions (고효율 냉동 컨테이너의 냉각 및 제상 실험)

  • Mun, Je-Cheol;Ardiyansyah, Ardiyansyah;Choi, Kwang-Il;Oh, Jong-Taek
    • Proceedings of the SAREK Conference
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    • 2008.06a
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    • pp.277-281
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    • 2008
  • This paper presents the development of a high efficiency transport refrigeration system for sliced-raw fish transportation. The refrigeration system is equipped with heat storage for reverse cycle-hot gas defrost (the stored heat is used during defrost cycle of the system). System performance and container operating conditions are analyzed during experimental investigation on a $3,225{\times}1,740{\times}1,640\;mm$ full-scale refrigerated container under cooling and defrosting conditions. The prototype system indicates better performance in terms of shorter cooling-down time, shorter defrost time and smaller fluctuations of refrigerated container's temperature.

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Analysis of electron transport properties in $SF_6+N_2$ mixtures gas used by MCS-BE (MCS-BE에 의한 $SF_6+N_2$ 혼합기체의 전자수송특성 해석)

  • 서상현;하성철
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.05a
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    • pp.696-699
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    • 1999
  • The electron transport coefficients in $SF_6+N_2$ gas is analysed in range of E/N values from 100~900(Td) by a Monte Carlo simulation and Boltzmann method, using a set of electron collision cross sections determined by the authors. The result of the Monte Carlo simulation such as electron drift velocity, ionization and electron attachment coefficients, longitudinal and transverse diffusion coefficients in nearly agreement with the respective experimental and theoretical for a range of E/N.

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Modeling of CCP plasma with H2/N2 gas (H2/N2 가스론 이용한 CCP 플라즈마 모델링)

  • Shon, Chae-Hwa
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.158-159
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    • 2006
  • The resistance-capacitance (RC) delay of signals through interconnection materials becomes a big hurdle for high speed operation of semiconductors which contain multilayer interconnection layers. In order to reduce the RC delay, low-k materials will be used for inter-metal dielectric (IMD) materials. We have developed self-consistent simulation tool that includes neutral-species transport model, based on the relaxation continuum (RCT) model. We present the parametric study of the modeling results of a two-frequency capacitively coupled plasma (2f-CCP) with $N_2/H_2$ gas mixture that is known as promising one for organic low-k materials etching. We include the neutral transport model as well as plasma one in the calculation. The plasma and neutrals are calculated self-consistently by iterating the simulation of both species till a spatiotemporal steady state profile could be obtained.

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FIBER OPTIC SENSOR FOR IN-SITU AND REALTIME MONITORING OF TRANSPORT OF GAS PHASE OZONE IN UNSATURATED POROUS MEDIA

  • Jung, Hae-Ryong;Park, Hee-Chul
    • Environmental Engineering Research
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    • v.10 no.2
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    • pp.71-78
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    • 2005
  • A series of column experiments was conducted to develop a monitoring system for in-situ and realtime measurement of ozone transport in unsaturated porous media using a fiber optic sensor. The calibration of the fiber optic transflection dip probe (FOTDP) system was successfully carried out at various ozone concentrations using a column with length of 30 cm and diameter of 5 cm packed with glass beads, which don't react with gaseous ozone. The breakthrough curves (BTCs) of ozone were obtained by converting the normalized intensity into ozone concentration. The FOTDP system worked well for in-situ monitoring of gas phase ozone at various water saturations and in presence of soil organic matter (SOM). However, the FOTDP system did not measure the ozone concentration at more than 70% water saturation.