• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.8
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• pp.3692-3697
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• 2012

Landsat 7 ETM+ sensor is getting imageries in the SLC-off state since May 31, 2003 due to mechanical defect of SLC(Scan Line Corrector). Therefore additional correction works are required to use these imageries. In this study, Landsat 7 SLC-off imageries were corrected using Gapfill function and compared with Landsat 5 around the same time. Most of pixels in omitted areas due to SLC-off by producing SLC-off imageries and imageries without visual incompatibility could be achieved as there were not unnatural noises. Also, the corrected imageries were performed land cover classification which was compared with the classification result using reference image. To do this, it could be suggested the possibility of SLC-off imagery. Landsat 7 SLC-off corrected imageries will improve the difficult conditions to detect changes of large areas and be used to detect changes of large areas and classify imageries as well as to recover imagery loss arising regionally such as small scale cloud, etc.

• Journal of the Korean Vacuum Society
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• v.9 no.1
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• pp.69-75
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• 2000

We have investigated the feasibility of spin on glass (SOG) film from polysilazane-type resin as a premetal dielectric (PMD) layer of the next-generation ultra-large scale integrated (ULSI) devices. A commercial polysilazane resin and a polysilazane-type resin with oxidizing agent were spin-coated and cured to form SOG films. In order to study the effect of oxidizing agent and annealing, the SOG films were characterized as cured and after annealing at $400^{\circ}C$ to $900^{\circ}C$. the density and the resistance against wet chemical of the SOG films were improved by the addition of oxidizing agent, because oxidizing agent enhanced the conversion from polysilazane polymer to $SiO_2$. The hole profile issue associated with insufficient curing of polysilazane in narrow gaps was also resolved by oxidizing agent, while the gapfill capability of SOG was not deteriorated by oxidizing agent.