• Journal of the Semiconductor & Display Technology
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• v.19 no.2
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• pp.45-50
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• 2020

We investigated the Si_1-xGe_x surface properties when dry cleaning the films using NF₃ / H₂O remote plasma. After the dry cleaning process, it was found that about 80-250 nm wide bumps were formed on the SiGe surface regardless of Ge concentration in the rage of x = 0.1 ~ 0.3. In addition, effects of the dry cleaning processing parameters such as pressure, substrate temperature, and H₂O flow rates were examined. It was found that the surface bump is significantly dependent on the flow rate of H₂O. Based on these observations, we would like to provide additional guidelines for implementing the dry cleaning process to SiGe materials.

• Korean Journal of Materials Research
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• v.4 no.4
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• pp.416-427
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• 1994

The changes of crystallinity and microstructure and the $Si_{1-x}Ge_x/Sio_2$ interfaces of $Si_{1-x}Ge_x$ alloys deposited on amorphous $SiO_{2}$ were studied as a function of deposition temperature. The crystallinity, microstructure, and compositional uniformity of $Si_{1-x}Ge_x$ alloys deposited on the SiOl at different temperature were investigated by X-ray diffraction and transmission electron microscopy. And $Si_{1-x}Ge_x/Sio_2$ interface were investigated by high-resolution transmission electron microscopy. The $Si_{0.7}Ge_{0.3}/Sio_2$ films were deposited on amorphous $SiO_{2}$ at $300^{\circ}C,400^{\circ}C,500^{\circ}C,600^{\circ}C,$ and $700^{\circ}C$ by Si-MBE. In the film deposited at $300^{\circ}C$, only amorphous phase were observed. In the film deposited at $400^{\circ}C$, both amorphous and polycrystalline films were observed. Both phases were deposited simultaneously, but, at initial film growth, amorphous phase prevailed over polycrystalline phase. As the film thickness increased, the fraction of polycrystalline phase increased. At $500^{\circ}C$, thin amorphous layer was observed at lOnm from $SiO_{2}$ surface. In the films deposited at higher than $600^{\circ}C$, only crystalline phase were observed. Polycrystalline films had columnar structure. Compositional uniformity for deposited films were good regardless of deposition temperature. The interfaces of $Si_{1-x}Ge_x/Sio_2$ were flat, whatever polycrystal or amorphous was deposited on $SiO_{2}$.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.181-187
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• 1998

The ionization energy and degree of ionization for p-type $Si_{1-x}Ge_x$ with boron doping are calculated taking into account the screening and broadening effects. The drift and Hall mobilities are then calculated using the relaxation time approximation and compared with the previously reported measurement data for relaxed and strained $Si_{1-x}Ge_x$ alloys to estimate the alloy scattering potential. From a fit, the alloy scattering potential is found to be 0.5 eV. The in-plane drift mobility for p-type strained $Si_{1-x}Ge_x$ grown on (001) Si substrate is approximately 1+$10x^2$ times higher than that for bulk Si in the high doping range.

• Journal of the Korean Ceramic Society
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• v.28 no.7
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• pp.525-530
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• 1991

The effects of 0.15mol% Y2O3 doped semiconducting (Ba1-xPbx)TiO3 ceramics with 0.5 mol% Pb5Ge3O11 as sintering additives have been investigated as function of Pb contents (from 0.05 mol to 0.3 mol) and sintering temperatures (from 1050$^{\circ}C$ to 1200$^{\circ}C$). As the Pb content increases in the (Ba1-xPbx)TiO3 system, the size and resistance of the grain increase but the capacitance of the grain boundary decreases due to the formation of liquid phase during the sintering. And with increasing the sintering temperatures, the resistance of the grain decreases but the capacitance of the grain boundary increases. The PTCR effects decrease with increasing the Pb content and the sintering temperature.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.288.1-288.1
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• 2014

We investigated the optical properties of Ge1-xSex and Ge1-x-ySexAsy amorphous semiconductor films using spectroscopic ellipsometry and Raman spectroscopy. The dielectric functions and absorption coefficients of the amorphous films were determined from the measured ellipsometric angles. We obtained the optical gap energies and Urbach energies from the absorption coefficients, and found a strong bowing effect in the optical gap energy of Ge1-x-ySexAsy where the endpoint binaries were Ge0.50Se0.50 and Ge0.31As0.69. Based on the correlation between optical gap energies and Urbach energies, the large bowing parameter was attributed to the electronic disorder. We found the composition dependence of several phonon modes using Raman spectroscopy. For Ge1-x-ySexAsy, the D mode (232-267 cm-1) changed from As-As (or As3 pyramid), to As(Se1/2)3 pyramid, and finally to Se clusters, as the Se composition increased. Resonant Raman phenomenon was observed in Ge0.38Se0.62 at a laser excitation of 514 nm (2.41 eV). We verified that this laser energy corresponds to the transition energy of Ge0.38Se0.62 using the second derivative of the dielectric function of Ge0.38Se0.62.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.12
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• pp.989-995
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• 2000

G $e_{1-x}$ S $n_{x}$G $e_{1-y}$S $n_{y}$ is a very promising material for the high-speed device due to the fact that electron and hole mobilities for the strained G $e_{1-x}$ S $n_{x}$G $e_{1-y}$S $n_{y}$ are greatly enhanced. Because G $e_{1-x}$ S $n_{x}$G $e_{1-y}$S $n_{y}$ has a direct band gap for the proper combination of x and y, it can be applied to the optoelectronic device. Therefore, the study of the electrical property for G $e_{1-x}$ S $n_{x}$G $e_{1-y}$S $n_{y}$(001) with a direct energy gap is needed. G $e_{1-x}$ S $n_{x}$ layer can not be grown thickly due to the large difference of lattice constants. This fact prefers the structure of the device where electrons and holes move in the plane direction. The transverse mobilities of electron and hole for G $e_{0.8}$S $n_{0.2}$Ge(001) are 2~3 times larger than those for Ge/Ge/ sub0.8/S $n_{0.2}$(001). Therefore, G $e_{0.8}$S $n_{0.2}$Ge(001) is expected to be better than Ge/G $e_{0.8}$S $n_{0.2}$(001) for the development of the high-speed device.h-speed device.device.h-speed device. device.

• Current Photovoltaic Research
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• v.4 no.3
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• pp.114-118
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• 2016

$Cu_{1.8}Zn_{1.2}(Sn_{1-x}Ge_x)S_4$ (CZTGeS) nanocrystals were mechanochemically synthesized from elemental precursor powders without using any organic solvents and any additives. The composition of CZTGeS nanocrystals were systematically varied with different Ge mole fraction (x) from 0.1 to 0.9. The XRD, Raman spectroscopy, high-resolution TEM, and diffuse reflectance studies show that the as-synthesized CZTGeS nanocrystals exhibited consistent changes in various structural and optical properties as a function of x, such as lattice parameters, wave numbers for $A_1$ Raman vibration mode, interplanar distances (d-spacing), and optical bandgap energies. The bandgap energy of the synthesized CZTGeS nanocrystals gradually increases from 1.40 to 1.61 eV with increasing x from 0.1 to 0.9, demonstrating that Ge-doping is useful means to tune the bandgap of mechanochemically synthesized nanocrystals-based kesterite thin-film solar cells. The preliminary solar cell performance is presented with an efficiency of 3.66%.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.419-420
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• 2008

In this work, we report several experimental data capable of evaluating the phase transition characteristics of (InTe)x(GeTe)y (x = 0.1, 0.3, y =1) pseudo-binary thin films. (InTe)x(GeTe)y phase change thin films have been prepared by thermal evaporator. The crystallization characteristics of amorphous (InTe)x(GeTe)y thin films were investigated by using nano-pulse scanner with 658 nm laser diode (power : 1~17 mW, pulse duration : 10~460 ns) and XRD measurement. It was found that the crystalline speed of In-Ge-Te thin films are faster than $Ge_2Sb_2Te_5$[1] and also the crystalline temperature is higher. Changes in the optical transmittance of as-deposited and annealed films were measured using a UV-VIS-IR spectrophotometer and four-point probe was used to measure the sheeresistance of InGeTe films annealed at different temperature.

• Journal of the Korean GEO-environmental Society
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• v.15 no.1
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• pp.63-68
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• 2014

In this study, it was found that determined the photocatalytic degradation of antibiotics (lincomycin, LM) with various catalyst composite of titanium dioxide ($TiO_2$), hydroxyapatite (HAP) and germanium (Ge) under UV-A irradiation. At first, various type of complex catalysts were investigated to compare the enhanced photocatalytic potential. It was observed that in order to obtain the removal efficiencies were $TiO_2/HAP/Ge$ > $TiO_2/Ge$ > $TiO_2/HAP$. The composition of $TiO_2/HAP/Ge$ using a statistical approach based on mixture analysis design, one of response surface method was investigated. The independent variables of $TiO_2$ ($X_1$), HAP ($X_2$) and Ge ($X_3$) which consisted of 6 condition in each variables was set up to determine the effects on LM ($Y_1$) and TOC ($Y_2$) degradation. Regression analysis on analysis of variance (ANOVA) showed significant p-value (p < 0.05) and high coefficients for determination value ($R^2$ of $Y_1=99.28%$ and $R^2$ of $Y_2=98.91%$). Contour plot and response curve showed that the effects of $TiO_2/HAP/Ge$ composition for LM degradation under UV-A irradiation. And the estimated optimal composition for TOC removal ($Y_2$) were $X_1=0.6913$, $X_2=0.2313$ and $X_3=0.0756$ by coded value. By comparison with actual applications, the experimental results were found to be in good agreement with the model's predictions, with mean results for LM and TOC removal of 99.2% and 49.3%, respectively.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.64-64
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• 1999

다결정 실리콘-게르마늄(poly-SiGe)은 태양전지 및 TFT-LCD와 같은 소자 응용에 있어서 중요하게 연구되고 있는 물질이다. 우리는 수소화된 비정질 실리콘-게르마늄 (a-Si1-xGex:H) 박막을 증착시키고 고상결정화시키며 XRD(x-ray diffraction) 및 ESR (electron spin resonance) 측정을 수행하였다. PECVD 증착가스는 SiH4과 GeH4가스를 사용하였고 Ge의 성분비는 x=0.0, 0.1, 0.5 정도로 조절되었다. 기판은 Corning 1737 glass를 사용하였고, 기판 온도는 20$0^{\circ}C$ 이었다. 증착압력과 r.f. 전력은 각각 0.6Torr와 3W이었다. 증착된 SiGe 박막은 고상결정화를 위해 $600^{\circ}C$ N2 분위기에서 가열되고, 그에 따른 XRD 및 ESR spectrum의 변화를 관찰하였다. ESR 측정은 X-band 그리고 상온에서 행해졌다. 먼저 XRD 측정으로부터 박막의 고상결정화 정도를 알 수 있었고, 고상결정화 과정이 초기 핵형성 단계와 결정화 단계, 그리고 더 이상 결정화가 일어나지 않는 완료 단계로 구분될 수 있음을 보여주었다. X값이 증가함에 따라 결정화 시간은 훨씬 단축되었다. ESR로 측정된 스핀 밀도는 a-Si1-xGex:H 박막이 처음 가열됨에 따라 전체적으로 크게 증가했다가, 결정화가 일어나면서 다시 감소하여 나중에는 거의 변화가 없었다. ESR 신호의 초기 증가는 수소 이탈에 의한 dangling bond의 증가에 기인하며, 다음 단계의 감소 및 안정 상태는 결정화에 따른 결정경계 영역의 감소와 결함들의 안정성에 기인하는 것으로 생각된다. 그러나 흥미로운 것은 Si1-xGex 합금의 경우 가열시간이 증가됨에 따라 Si-db(Si-dangling bond)와 Ge-db에 의한 신호가 서로 분리되어 나타났으며, 이 Si-db 스핀 밀도와 Ge-db 스핀밀도의 변화정도는 x값에 크게 의존함을 보여준 것이다. 즉 순수한 a-Si:H의 경우 Si-db 의 스핀밀도의 증가시간은 4시간 정도였고, 그리고 다시 감소하였으며, x=0.1 인 박막에서 Si-db와 Ge-db의 변화 시간은 순수 S-db 변화의 경우와 거의 유사하였다. 그러나 x=0.5 샘플에서는 Si-db의 변화가 빨라져서 0.1 시간 안에 증가되었고, Ge-db의 변화는 더 빠르게 수 분 동안에 증가 된후 다시 감소하였다. 이것은 수소의 Si에 대한 친화력 뿐 만아니라 Si-H과 Ge-H 결합에너지가 주위 원자들의 구성에 크게 영향받을 수 있는 가능성을 제시해준다.