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Recurrent Neural Network Modeling of Etch Tool Data: a Preliminary for Fault Inference via Bayesian Networks

  • Nawaz, Javeria;Arshad, Muhammad Zeeshan;Park, Jin-Su;Shin, Sung-Won;Hong, Sang-Jeen
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.239-240
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    • 2012
  • With advancements in semiconductor device technologies, manufacturing processes are getting more complex and it became more difficult to maintain tighter process control. As the number of processing step increased for fabricating complex chip structure, potential fault inducing factors are prevail and their allowable margins are continuously reduced. Therefore, one of the key to success in semiconductor manufacturing is highly accurate and fast fault detection and classification at each stage to reduce any undesired variation and identify the cause of the fault. Sensors in the equipment are used to monitor the state of the process. The idea is that whenever there is a fault in the process, it appears as some variation in the output from any of the sensors monitoring the process. These sensors may refer to information about pressure, RF power or gas flow and etc. in the equipment. By relating the data from these sensors to the process condition, any abnormality in the process can be identified, but it still holds some degree of certainty. Our hypothesis in this research is to capture the features of equipment condition data from healthy process library. We can use the health data as a reference for upcoming processes and this is made possible by mathematically modeling of the acquired data. In this work we demonstrate the use of recurrent neural network (RNN) has been used. RNN is a dynamic neural network that makes the output as a function of previous inputs. In our case we have etch equipment tool set data, consisting of 22 parameters and 9 runs. This data was first synchronized using the Dynamic Time Warping (DTW) algorithm. The synchronized data from the sensors in the form of time series is then provided to RNN which trains and restructures itself according to the input and then predicts a value, one step ahead in time, which depends on the past values of data. Eight runs of process data were used to train the network, while in order to check the performance of the network, one run was used as a test input. Next, a mean squared error based probability generating function was used to assign probability of fault in each parameter by comparing the predicted and actual values of the data. In the future we will make use of the Bayesian Networks to classify the detected faults. Bayesian Networks use directed acyclic graphs that relate different parameters through their conditional dependencies in order to find inference among them. The relationships between parameters from the data will be used to generate the structure of Bayesian Network and then posterior probability of different faults will be calculated using inference algorithms.

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An Analysis of Trends in Elementary Mathematics Education Research -Focussing on Mathematics Education Journals in Korea- (우리나라 초등수학교육 연구의 동향 분석 -국내 학술지를 중심으로-)

  • Kwon, Jung-Eun;Choi, Jae-Ho
    • Journal of Elementary Mathematics Education in Korea
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    • v.12 no.2
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    • pp.149-163
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    • 2008
  • The purpose of this study was to investigate research trends of the articles in Math-Educational journals between 1998 and 2006 in a bid to discuss whether the articles evenly dealt with different fields and whether studies on elementary mathematics education were in line with the 7th national curricula. It's basically meant to determine some of the right directions for future research on elementary mathematics education. The articles included in Math-Educational journals during the selected period were analyzed to find out the theme, area, method and subjects of the studies and when the studies were conducted. After checking National Assembly Digital Library by inputting a keyword 'elementary mathematics', 235 articles were found, and a content analysis was carried out, and statistical data on percentage were obtained. The results of this study were as follows: First, there had been steady research efforts about elementary mathematics education, as 20 or 30 studies had been conducted on a yearly basis. Second, as for theme of research, the most common themes were instructional design and method(25.5%), and an analysis of curricula and textbook(15.3%) was the second most dominant theme. Third, regarding the area of study, the most widely investigated area was number and operation (30.0%), followed by character/expression(27.8%), figure (23.9%), regularity/function (8.9%), probability/statistics(5.6%), and measurement (3.9%). Fourth, concerning the method of research, didactical analysis(43.8%) was most prevalent, followed by quantitative research(29.8%), qualitative research(16.6%) and a combination of qualitative and quantitative approaches(9.8%). Fifth, as to subjects, many of the studies(21.7%) investigated upper graders. In conclusion, it has to be accomplished the impartial researches for the whole area in order to develop elementary mathematics education and attain the objects of the 7th national curricula.

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Study on the Characteristics and Quality Level of Single Subject Researches in the Sensory Integration Therapy Field of Korean Occupational Therapy (감각통합치료효과에 대한 단일대상연구의 특성과 질적 수준에 대한 고찰)

  • Kwag, Sung-Won;Sim, Je-Muang;Roh, Hyo-Lyun
    • The Journal of Korean Academy of Sensory Integration
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    • v.12 no.2
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    • pp.25-36
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    • 2014
  • Objective : The purpose of this study is learning the characteristics of literature applying single subject researches in the field of sensory integration therapy of Korean occupational therapy and evaluating the quality level of them. Methods : Analyzed the characteristics of 17 single subject research papers (independent variable, study design, study subject, total number of session, study period, intervention time, intervention place, dependent variable, measuring tool and result) published between 2002 and 2013 using the document delivery service of Korean Society of Occupational Therapy, National Discovery for Science Leaders (NDSL), Nuri Media (DBpia), Research Information Sharing Service (RISS), Korean Studies Information Service System (KISS) and National Assembly Library and evaluated the literatures using quality evaluation scale. Results : According to the analysis result on the literature characteristics, reversal design was the most used study method. Total number of session was 10 sessions to 34 sessions. Study period was 4 weeks to 16 weeks. Intervention time was 8 minutes to 70 minutes and most interventions were done in occupational therapy room or sensory integration therapy room. According to the result of quality level evaluation, 4 papers out of 17 papers were on high level and remaining papers were on intermediate level. However, there was no study which included intervention blind. Conclusion : Suggested standards that need to be supplemented and discussions on qualitative improvement including repetitive research on the mediation effect during the application of the single subject research methodology, the securement of adequate data sections, and processing of a mediation blind. It is expected to be used as basic data for conducting a better qualitative research in the future.

Occupational Therapy Intervention for Improving Play of Children : A Systematic Review (아동의 놀이 향상을 위한 작업치료 중재에 관한 체계적 고찰)

  • Lee, Sun-Hee;Park, Hae Yean
    • The Journal of Korean Academy of Sensory Integration
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    • v.15 no.2
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    • pp.93-106
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    • 2017
  • Objective : The purpose of this study is to provide an evidence for clinical practice by systemic analysis on occupational therapy interventions for improvement of children's play. Methods : Articles used in this study were collected from database of Pubmed, ProQuest, EBSCOhost, Scopus, RISS, KISS, and National Library of Korea. The key words used in the search were "Play AND Occupational Therapy AND (Intervention OR Treatment)" and the publication period was limited from January 2007 to April 2017. 11 articles in total were selected for the systematic review analysis. Results : The results revealed that the majority of studies was one-group non-randomized study and the majority of intervention used was play-based intervention in case of that play itself was the intervention goal. The most frequently used environment for the intervention was parallel setting of home and treatment room. The majority of studies was for children with ADHD and the most commonly used assessment tool was Test of Playfulness (ToP). Dependent variables measured along with play were language skills, social interactive skills, communication and pragmatic skills, problem-solving skills, caregiver responsiveness, and parent-child interaction. Conclusion : This study help to understand the current state of occupational therapy intervention for improvement of children's play. Starting with the understanding, it is expected that various studies on play of children will be done in the future.

Study on Extracting Filming Location Information in Movies Using OCR for Developing Customized Travel Content (맞춤형 여행 콘텐츠 개발을 위한 OCR 기법을 활용한 영화 속 촬영지 정보 추출 방안 제시)

  • Park, Eunbi;Shin, Yubin;Kang, Juyoung
    • The Journal of Bigdata
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    • v.5 no.1
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    • pp.29-39
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    • 2020
  • Purpose The atmosphere of respect for individual tastes that have spread throughout society has changed the consumption trend. As a result, the travel industry is also seeing customized travel as a new trend that reflects consumers' personal tastes. In particular, there is a growing interest in 'film-induced tourism', one of the areas of travel industry. We hope to satisfy the individual's motivation for traveling while watching movies with customized travel proposals, which we expect to be a catalyst for the continued development of the 'film-induced tourism industry'. Design/methodology/approach In this study, we implemented a methodology through 'OCR' of extracting and suggesting film location information that viewers want to visit. First, we extract a scene from a movie selected by a user by using 'OpenCV', a real-time image processing library. In addition, we detected the location of characters in the scene image by using 'EAST model', a deep learning-based text area detection model. The detected images are preprocessed by using 'OpenCV built-in function' to increase recognition accuracy. Finally, after converting characters in images into recognizable text using 'Tesseract', an optical character recognition engine, the 'Google Map API' returns actual location information. Significance This research is significant in that it provides personalized tourism content using fourth industrial technology, in addition to existing film tourism. This could be used in the development of film-induced tourism packages with travel agencies in the future. It also implies the possibility of being used for inflow from abroad as well as to abroad.

Analyses of Studies on Swallowing Rehabilitation Program for Stroke patients in Korea (뇌졸중 환자 대상의 연하재활프로그램에 대한 국내 연구 논문 분석)

  • Kwak, Hye-Weon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.16 no.11
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    • pp.7394-7402
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    • 2015
  • The purpose of this study was to investigate the status of studies on swallowing rehabilitation interventions for stroke patients that had been conducted in the past 5 years (2010-2014) in Korea and to examine their findings. A literature search was conducted through RISS, National Assembly Library, and KISS, and 12 papers were analyzed. Four articles were from nursing science, and 8 from other disciplines. Qualitative evaluation of the articles was conducted by using an evaluation framework that was designed by the researcher, which took into account the checklist presented by the Scottish Intercollegiate Guideline Network (2013). In the results of the qualitative evaluation on the papers, 4 studies scored 7 out of 10 points, 6 studies scored between 5 and 6 points, and 2 studies scored 4 points. Intervention sessions were conducted for 25 minutes, on average, each at a frequency of 4.1 sessions per week, for a total of 33.7 sessions. This study found that direct swallowing training and comprehensive intervention of respiratory and oral, including pharyngeal were effective in relieving difficulties in swallowing. In the future, such findings are expected to be used in nursing interventions for establishment of the basis for evidence-based nursing practice.

A Review of Domestic Research for the Brain-science Based Learning According to Age and Comparison and Consideration of Learning Methodology of Korean Medicine According to Age (뇌과학에 기반한 연령별 학습법과 연령별 한의학적 학습방법론 비교고찰)

  • Cho, A-Ram;Park, So-Im;Kang, Da-Hyun;Sue, Joo-Hee
    • Journal of Oriental Neuropsychiatry
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    • v.25 no.4
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    • pp.333-350
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    • 2014
  • Objectives: The purpose of this study was to research learning based on brain science and the learning methodology of Korean Medicine according to disparity of age. Through this, the study aimed to provide a guideline to related Korean Medicine treatments as well as the common nurturing/educational institutions. Methods: All journals and dissertations on brain science based learning methods studied in Korea to date that could be found in the National Assembly Library and the RISS were implemented in the analysis. The terminology used for search was as follows: 1st search, 'Brain'; 2nd search, 'Learning', 'Education'; 3rd search, 'Baby, 'Infant', 'Child'. For the learning methodology of Korean Medicine according to disparity of age, the related contents were extracted from Donguibogam and Liuyi, Sasang constitutional medicine. Results: A total of 30 studies, were collected as data. In the baby stage, the development and myelination of brain neurons are accelerated by experience and learning, highly influenced by social, cognitive and emotional movement. In infancy, the frontal lobe actively develops, so education for development of the prefrontal cortex is suggested. The brain of the infant at this stage can be developed by arts and physical education. In the child stage, the parietal and temporal lobe develop actively. Thus, programs to stimulate brain activity including brain respiration would be helpful in enhancing learning ability, concentration, etc. As evidence for learning and nurturing methodology according to disparity of age from Korean Medicine prospective, the following are listed: Location and time for sexual intercourse before pregnancy, stabilization during pregnancy, baby nurturing methods for nurturing from Donguibogam. Also Liuyi and Sasanag constitutional medicine can be the learning methodology according to disparity of age. And there are acupuncture points on each head section according to age in Donguibogam. Conclusions: Studies on 'brain-science based learning' are continuously being conducted. Based on these studies, diverse new brain-science based learning will be developed in the future. There is also a need to develop the learning methodology of Korean Medicine according to disparity of age in a more systematic and diverse way.

Research trends to analysis of 『Muyedobotongji』 (『무예도보통지』 연구동향 분석)

  • Kwak, Nak-hyun
    • (The)Study of the Eastern Classic
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    • no.55
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    • pp.193-221
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    • 2014
  • This study aims to analyze trends of advanced research of "Muyedobotongji". The conclusions are as following in these. First, the number of theses related with "Muyedobotongji" is 47 in total including 29 master's theses and 18 doctor's theses. The sports science comprises the largest proportion of study including 23 master's degree and 12 doctor's degree. Besides sports science field, "Muyedobotongji" is analyzed in various study fields such as library and information, engineering, science of art and culture contents. In master's theses, They focused on practical ways of "Muyedobotongji". But "Muyedobotongji" is conducted by perspective of the humanities in doctor's theses. Second, There are 72 theses related with "Muyedobotongji" in scientific journal. Regarding these in detail, there are 35 theses in sports science, 12 theses in Korean history, 7 theses in martial arts, 5 theses in dance studies, 4 these in Korean studies, 2 theses in Chinse studies, 2 theses in art history, 1 these in Japanese literature and 1 thesis in military science. This fact helps us understand "Muyedobotongji" is studied actively in sports science field. Third, the future research directions of "Muyedobotongji" Should be considered in 3 categories. first, it needs to do interdisciplinary fusion research. Through this, it can complement insufficient parts of existing researches. Second, it needs to make standard Key words. The unified Key words are able to use communicating in different field of scientific journals without confusing. Third It needs to build data bases which are applied to martial art areas. It can provide chances for both Korean martial arts and "Muyedobotongji" to be practiced in culture contents.

Transforming a Buffer Green into an Urban Park as Multi-functional Green Infrastructure - A Case of the Buffer Green of Sinmae Market in Daegu, Korea - (입체적 도시기반시설로서 완충녹지의 공원화 계획 - 대구광역시 신매시장 완충녹지 공원화 계획을 사례로 -)

  • Kim, Miyeun;Min, Byoungwook
    • Journal of the Korean Institute of Landscape Architecture
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    • v.49 no.2
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    • pp.101-112
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    • 2021
  • In Korea, efforts have been made continuously to improve the environment of traditional markets concerning the issues of urban regeneration. In particular, many old cities and traditional markets face a lack of parking spaces. As a solution to this, attempts are being made to prepare underground parking spaces by designing urban planning facilities in three-dimensional ways and utilizing the upper part as a more meaningful space. This study is about the master plan to use the upper green area while creating an underground parking lot at 571 Sinmae-dong, Suseong-gu, Daegu. This green area was defined as a space with dual values, 'defensive green space' that needs to be ecologically protected, and 'active cultural space' where walking flows to the market and various events are concentrated. Three specific design strategies to balance these values were presented. First, to prevent indiscriminate occupation and damage by people and maintain a healthy green environment, securing the maximum amount of undivided green space in the site was suggested. Second, a space layout and a topography and planting patterns that can overcome the morphological characteristics of narrow and long-shaped sites enable the experience of abundant green spaces. Third, providing space to strengthen the connections with nearby urban facilities such as Sinmae Market and Gosan Library can also intensively accommodate cultural activities in various cities. This study has academic significance in providing implications for urban regeneration projects with similar contexts in the future.

Analyses of stidies on acupuncture therapies for reducing obesity in obeses patients (비만환자의 비만감소를 위한 침술요법에 대한 국내외 논문 분석)

  • Cha, Hyun-Su
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.11
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    • pp.166-181
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    • 2018
  • The aim of this review was to determine the status of acupuncture therapies in reducing obesity in obese patients and to determine the scheme and effectiveness of acupuncture therapies. Existing reports published between January 1, 2003 and December 31, 2017 in Kiss, Riss, National Assembly Library, Pubmed and CINAHL databases were searched electronically with the keywords obesity, acupuncture, auricular acupuncture, and electroacupuncture. After checking the original sources of the articles, 19 articles were included in the review. In a qualitative evaluation of the papers using a checklist from the Scottish Intercollegiate Guideline Network, one study scored 9 out of 10 points, 15 studies scored 7-8 out of 10 points, two studies scored 6 out of 10 points, and one study scored 3 out of 10 points. In the acupuncture therapy schemes, acupoints to reduce obesity included shemen, hunger, LI-11 (Quchi), LI-4 (Hegu), St-25 (Tianshu) and St-44 (Neiting). Acupuncture therapies were conducted for an average of 16.9 total sessions. In the studies that involved 20-day or 72-day duration for acupuncture therapies, the frequency of acupuncture therapies was 1 time/1-2 days. In the studies that involved 4- to 18-week duration for acupuncture therapies, the frequency of acupuncture therapies was 1-3 times/week. This study found acupuncture therapies were effective in reducing obesity, and acupuncture therapies reduced anthropometry, blood glucose and lipids and changed blood hormones. In the future, there is an urgent need for well-planned studies of the effectiveness of acupuncture therapies for reducing obesity in obese patients.