• Title/Summary/Keyword: Full Mechanism

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Development of a Inchworm-Type Precise Rotational Motor (자벌레형 정밀 회전 모터의 개발)

  • 김상채;김수현;곽윤근
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.458-461
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    • 1995

  • A new type of rotational motor which is developed has a resolution smaller than 10 $^{-4}$ radian and can be accessed for full rotational angles. The operation principle of the motor is based on inchworm motion of two belt driving mechanism. Flexure hinge mechanism, which is pertinent to symmetry construction of the motor, is designed to minimze the effort to frame and is analyzed by using finite element method. Depending on input signal amplitude, rotational angle by one cycle is varied form 0.2*10 $^{-4}$ rad to 9.76* $^{-4}$ rad. This shows that it has the capability of getting very small rotational angle by considering radius of rotor and amplitude of input signal.

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LCD 팬널의 임프린트 공정을 위한 접촉 평평도 증진 연구

  • Gang Yun-Seok;Jang Si-Yeol;Im Hong-Jae;Sin Dong-Hun;Jeong Jae-Il
    • Proceedings of the Korean Society Of Semiconductor Equipment Technology
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    • 2006.05a
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    • pp.269-272
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    • 2006

  • Surface contacts between mold and target should be in parallel for the imprinting mechanism. However, the size of contacting area makes it difficult for both mating surfaces to be in all contact because of precision level of the imprinting machine and the waviness of mold and target. The gripping force for both mold and target with the vacuum chuck is also major effect to interrupt the full contact, which must be avoided in imprinting mechanism. In this study, the preliminary study for the causes of non-uniformity of contacting surfaces such as mold and target is performed with $470{\times}370mm^2$ LCD panel size.

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