• 제목/요약/키워드: Friction pad

검색결과 235건 처리시간 0.022초

실리콘 웨이퍼 연마에서의 Break-in 모니터링 (Monitoring of Break-in time in Si wafer polishing)

  • 정석훈;박범영;박성민;이상직;이현섭;정해도;배소익;최은석;백경록
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.360-361
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    • 2005
  • Rapid progress in IC fabrication technology has strong demand in polishing of silicon wafer to meet the tight specification of nanotopography and surface roughness. One of the important issues in Si CMP is the stabilization of polishing pad. If a polishing pad is not stabilized before main Si wafer polishing process, good polishing result can not be expected. Therefore, new pad must be subjected into break-in process using dummy wafers for a certain period of time to enhance its performance. After the break-in process, the main Si wafer polishing process must be performed. In this study, the characteristics of break-in process were investigated in Si wafer polishing. Viscoelastic behavior, temperature variation of pad and friction were measured to evaluate the break-in phenomenon. Also, it is found that the characteristic of the break-in seems to be related to viscoelastic behavior of pad.

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콘크리트 블록 접촉면의 전단특성 (Shear Behavior Characteristics of Interface between Two Concrete-blocks)

  • 이승현;김병일
    • 한국지반공학회논문집
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    • 제24권6호
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    • pp.69-75
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    • 2008
  • 분리형부재 보강토 옹벽(SRW)을 구성하는 생태축조블록 접촉면에 대한 전단시험을 수행하였다. 전단이 발생하는 두 개의 블록 사이의 접촉면조건은 두 블록을 직접 접촉시키는 경우와 블록 사이에 고무패드를 설치한 경우 그리고 블록 사이에 고무패드와 전단키를 설치한 각각 3가지 접촉면 조건을 고려하였다. 전단시험에 따르면 두개의 블록을 직접 접촉시킨 경우 전단하중-전단변위 관계가 탄성-완전소성형태와 유사하였으며 블록 사이의 접촉면에 고무패드를 설치한 경우 전단하중-전단변위 관계는 연성거동을 보였다. 블록과 블록을 직접 접촉시킨 경우와 블록과 블록 사이의 접촉면에 고무패드를 설치한 경우 그리고 블록과 블록 접촉면 사이에 고무패드와 전단키를 설치한 경우에 대한 최소 전단저항력과 겉보기 마찰각은 각각 1.7kN/m, $27.6^{\circ}$와 4.2kN/m, $26.2^{\circ}$ 그리고 20.9kN/m, $26.0^{\circ}$이었다.

디스크 브레이크의 제동마찰 및 마멸특성에 관한 실험적 연구 (Experimental Study of Braking Friction and Wear Characteristics of Disk Brake)

  • 김청균;이병관;김한구
    • Tribology and Lubricants
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    • 제22권3호
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    • pp.149-154
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    • 2006
  • This paper presents the braking friction and wears on the rubbing surfaces of a friction pad-disk brake. In this study, four friction disk specimens are sampled from unused and used disks in which are taken from the disk brake system when the friction induced vibration and noise problems have been occurred during a braking period at a running period of 10,000 km, 20,000 km, and 30,000 km in random. The experimental results indicate that the tribological characteristics of an unused disk brake shows equal and stable as a friction coefficient and temperature distributions during a braking friction/wear test period including a total friction mode from the start to running periods. But the used disk brake shows unstable and uneven friction modes between an outside and inside rubbing surfaces of a disk brake in terms of a friction coefficient and wears. This may lead to a friction induced friction vibration and noise problems of a used disk brake.

브레이크 패드의 동적 불안정성에 따른 스퀼 소음 발생 원인의 실험적 연구 (An Experimental Study on the Squeal Noise Generation due to Dynamic Instability of Brake Pad)

  • 조상운;임병덕
    • 한국자동차공학회논문집
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    • 제24권5호
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    • pp.520-526
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    • 2016
  • Squeal noise is a typical brake noise that is annoying to both passengers and pedestrians. Its frequency range is fairly wide from 1 kHz to 18 kHz, which can be distressful to people. The brake squeal noise occurs due to various mechanisms, such as the mode coupling of the brake system, self-excited vibration, unstable wear, and others. In this study, several parameters involved in the generation of a squeal noise are investigated experimentally by using a brake noise dynamometer. The speed, caliper pressure, torque, and friction coefficient are measured as functions of time on the dynamometer. The contact pressure and temperature distributions of the disc and the pad are also measured by using a thermal imaging camera and a pressure mapping system. As a result of the simultaneous measurement of the friction coefficient and squeal amplitude as functions of the velocity, it is found that the onset of the squeal may be predicted from the ${\mu}-v$ curve. It is also found that a non-uniform contact pressure causes instability and, in turn, a squeal. Based on the analysis results, design modifications of the pad are suggested for improved noise characteristics.

마찰재에 함유된 금속섬유의 종류에 따른 마찰 특성 (Tribology of friction materials containing different metal fibers)

  • 고길주;장호
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2001년도 제33회 춘계학술대회 개최
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    • pp.55-63
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    • 2001
  • Friction and wear properties of brake friction materials containing different metal fibers (Al, Cu or Steel fibers) were investigated using a pad-on-disk type friction tester. Two different materials(gray iron and Al-MMC)) were used for disks rubbing against the friction materials. Results from ambient temperature tests revealed that the friction material containing Cu fibers sliding against cast iron disk showed a distinct negative ${\mu}$-ν (friction coefficient vs. sliding velocity) relation implying possible stick-slip generation at low speed. The negative ${\mu}$-ν relation was not observed when the Cu-containing friction materials were rubbed against the. Al-MMC counter surface. As applied loads increased, friction materials showed higher friction coefficients comparatively. Friction materials slid against cast iron disks exhibited higher friction coefficients than Al-MMC disks during high temperature tests. On the other hand, high temperature test results suggested that copper fibers in the friction material improved fade resistance and the steel fibers were not compatible with Al-MMC disks showing severe material transfer and erratic friction behavior during sliding at elevated temperatures.

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제동시 피스톤 소재를 고려한 브레이크 오일 온도의 수치적 예측 (Numerical Prediction of Brake Fluid Temperature Considering Materials of Piston During Braking)

  • 김수태;김진한;김주신
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2004년도 추계학술대회 논문집
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    • pp.445-450
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    • 2004
  • Recently, many studies have been performed and good results have been reported in literature on the prediction of the brake disk temperature. However, study on the brake fluid temperature is rarely found despite of its importance. In this study, brake fluid temperature is predicted according to material property of brake piston. For the analysis, a typical disk-pad brake system is modeled including the brake disk, pad, caliper, piston and brake fluid. Vehicle deceleration, weight distribution by deceleration, disc-pad heat division and the cooling of brake components are considered in the analysis of heat transfer. Unsteady-state temperature distribution are analyzed by using the finite element method and numerical results are compared with the vehicle test data

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컨디셔닝 방식에 따른 패드의 트라이볼로지적 특성 (Tribological Characteristics of Conditioning Methods on Polishing Pad)

  • 이현섭;박범영;서헌덕;정해도
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.358-359
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    • 2005
  • Chemical mechanical polishing(CMP) process depends on a variety of variables. Especially, surface roughness of pad plays a key role in material removal in CMP in terms of transportation ability of pores and real contact area. The surface roughness is deteriorated with polishing time by applied pressure and relative velocity. In this reason, diamond conditioner has been used to maintain the roughness on the pad. The authors try to investigate the correlation between pad roughness and frictional behavior by comparing ex-situ conditioning with in-situ conditioning.

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직접해법에 의한 공기윤활 틸팅패드 저어널 베어링의 정특성 및 동특성에 관한 연구 (A Study on the Static and Dynamic Characteristics of Air Lubricated Titing Pad Journal Bearing with Direct)

  • 황평;김인식
    • Tribology and Lubricants
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    • 제10권1호
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    • pp.46-55
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    • 1994
  • The static and dynamic analysis of air lubricatied tilting pad journal bearing which considers tilting effect of each pad, preload but which neglects pad inertia effect and deflection are performed. A direct numerical method is used in evaluating the static characteristics such as load carrying capacity, friction force and small peturbation method is used for calculation of dynamic characteristics. Stiffness and damping coefficients are compared with the variation of the preload. And these coefficients are slightly decreased with increased compressibility number under the constant bearing load carrying capacity.

통기식 디스크 브레이크의 방열 성능에 관한 수치적 연구 (A Numerical Study of Thermal Performance in Ventilated Disk Brake)

  • 김진택;백병준
    • Tribology and Lubricants
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    • 제17권5호
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    • pp.358-364
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    • 2001
  • Disk brake system transforms a large amount of kinetic energy to thermal energy in a short time. As the size and speed of automotive increases in recent years, the disk brakes absorbs more thermal energy. And this thermal energy can cause an unacceptable braking performance due to the high transient temperature, that is attained at the friction surface of brake disk and pad. Although these high temperatures are one of the biggest problems. In this study, the overall thermal behavior of ventilated disk brake system was investigated by numerical method. The 3-Dimensional unsteady model was simulated by using a general purpose software package “FLUENT” to obtain the temperature distributions of disk and pad. The model includes the more realistic braking method, which repeats braking and release. The effects of several parameters such as the repeated braking, inlet air velocity and thermal conductivity on the temperature distribution were investigated.

풍력발전기 요 브레이크 시스템의 설계 (Design for Yaw Brake System in Wind Turbine)

  • 박진환;박상신;윤용익;유창희;황정규
    • Tribology and Lubricants
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    • 제27권4호
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    • pp.204-208
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    • 2011
  • Yaw brakes are used in wind turbines to control the orientation of blades to be perpendicular to the wind. These devices are very important machine elements because they are closely related to the overall efficiency of wind turbines. One unit of yaw brakes is composed of a friction pad and a caliper. In this study, a tangential force between the friction pad and the disk is calculated when the brake is acting in 750 kW wind turbine. Then, stress distribution and the deformation of the caliper are calculated using a finite element analysis. An experimental equipment is also developed to verify the exactness of calculated results. The analytical and experimental results are presented and discussed.